Related papers: Acoustic resonators above 100 GHz
Radio frequency (RF) acoustic resonators have long been used for signal processing and sensing. Devices that integrate acoustic resonators benefit from their slow phase velocity (vp), in the order of 3 to 10 km/s, which allows…
This paper presents significant frequency scaling of acoustic filter technology to 50 GHz. This achievement is enabled by the P3F LiNbO3 multilayer stack, in which piezoelectric thin-films of alternating orientations are transferred in…
This work reports the procedure for modeling piezoelectric acoustic resonators and filters at millimeter wave (mmWave). Different from conventional methods for lower frequency piezoelectric devices, we include both acoustic and…
While piezoelectric transduction enables designing acoustic resonators operating at multi-GHz frequencies, the deposition of piezoelectric materials typically requires high temperature processes and specific crystallographic orientation of…
Piezoelectric crystals are widely used for acoustic wave resonators of different functioning modes and types including BAW and SAW. It is well-known that only some special orientations of crystals will exhibit desirable properties such as…
As the demand for compact and efficient power conversion systems increases, piezoelectric power converters have gained attention for their ability to replace bulky magnetic inductors with acoustic resonators, enabling higher power density…
Advancing electromechanical resonators towards terahertz frequencies opens vast bandwidths for phononic signal processing. In quantum phononics, mechanical resonators at these frequencies can remain in their quantum ground state even at…
This letter presents miniature millimeter wave (mmWave, above 30 GHz) acoustic resonators based on a single-layer thin-film lithium niobate (LN) platform. More specifically, we present high performance third-order antisymmetric (A3) mode…
Demonstrating a device that efficiently connects light, motion, and microwaves is an outstanding challenge in classical and quantum photonics. We make significant progress in this direction by demonstrating a photonic crystal resonator on…
Millimeter-wave superconducting resonators are a useful tool for studying quantum device coherence in a new frequency domain. However, improving resonators is difficult without a robust and reliable method for coupling millimeter-wave…
This is a review of theoretical results from the three-dimensional equations of anisotropic elasticity or linear piezoelectricity on waves and vibrations in quartz crystal plates. It covers both the classical results on acoustic wave…
The integration of GHz-frequency, high quality factor ($Q$), and electrically tunable acoustic resonators holds significant potential for advancing applications in quantum information technologies, microwave photonics, and reconfigurable RF…
This work presents a new class of micro-electro-mechanical system (MEMS) resonators toward Ka band (26.5-40GHz) for fifth-generation (5G) wireless communication. Resonant frequencies of 21.4 and 29.9 GHz have been achieved using the fifth…
We present a piezoelectric transducer in thin-film lithium niobate that converts a 1.7 GHz microwave signal to a mechanical wave in a single mode of a 1 micron-wide waveguide. We measure a -12 dB conversion efficiency that is limited by…
Acoustic waves have emerged as versatile on-chip information carriers with applications ranging from microwave filters to transducers. Nonreciprocal devices are desirable for the control and routing of high-frequency phonons. This is…
Lithium niobate is a promising material for developing quantum acoustic technologies due to its strong piezoelectric effect and availability in the form of crystalline thin films of high quality. However, at radio frequencies and cryogenic…
Optical microresonators have recently attracted a growing attention in the photonics community. Their applications range from quantum electro-dynamics to sensors and filtering devices for optical telecommunication systems, where they are…
Milligram-scale resonators have been shown to be suitable for the creation of 3-mode optoacoustic parametric amplifiers, based on a phenomena first predicted for advanced gravitational-wave detectors. To achieve practical optoacoustic…
Connecting nanoscale mechanical resonators to microwave quantum circuits opens new avenues for storing, processing, and transmitting quantum information. In this work, we couple a phononic crystal cavity to a tunable superconducting quantum…
This paper is the first report of the high-temperature characteristics of a laterally vibrating piezoelectric lithium niobate (LiNbO$_{3}$) MEMS resonator array up to 500{\deg}C in air. After a high-temperature burn-in treatment, device…