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Lithography, transferring chip design masks to the silicon wafer, is the most important phase in modern semiconductor manufacturing flow. Due to the limitations of lithography systems, Extensive design optimizations are required to tackle…

Machine Learning · Computer Science 2024-05-07 Haoyu Yang , Haoxing Ren

As the feature size of integrated circuits continues to decrease, optical proximity correction (OPC) has emerged as a crucial resolution enhancement technology for ensuring high printability in the lithography process. Recently, level…

Image and Video Processing · Electrical Eng. & Systems 2023-11-01 Xing-Yu Ma , Shaogang Hao

Inverse lithography (ILT) is critical for modern semiconductor manufacturing but suffers from highly non-convex objectives that often trap optimization in poor local minima. Generative AI has been explored to warm-start ILT, yet most…

Machine Learning · Computer Science 2026-02-24 Haoyu Yang , Haoxing Ren

This paper presents an iterative inversion algorithm for computed tomography image reconstruction that performs well in terms of accuracy and speed using limited data. The computational method combines an image domain technique and…

Image and Video Processing · Electrical Eng. & Systems 2019-01-17 Victor Churchill , Anne Gelb

Edge-preserving image smoothing is a fundamental procedure for many computer vision and graphic applications. There is a tradeoff between the smoothing quality and the processing speed: the high smoothing quality usually requires a high…

Graphics · Computer Science 2020-05-19 Wei Liu , Pingping Zhang , Xiaolin Huang , Jie Yang , Chunhua Shen , Ian Reid

In this paper, we propose a novel gradient-based method to optimize curvilinear masks in optical lithography. The mask pattern is represented by periodic B-spline curves. We apply Delaunay triangulation to discretize the domains circled by…

Optimization and Control · Mathematics 2025-04-17 Xiaoru Yi , Junqing Chen

Creating visual layouts is a critical step in graphic design. Automatic generation of such layouts is essential for scalable and diverse visual designs. To advance conditional layout generation, we introduce BLT, a bidirectional layout…

Computer Vision and Pattern Recognition · Computer Science 2022-07-26 Xiang Kong , Lu Jiang , Huiwen Chang , Han Zhang , Yuan Hao , Haifeng Gong , Irfan Essa

Facial image inpainting is a challenging problem as it requires generating new pixels that include semantic information for masked key components in a face, e.g., eyes and nose. Recently, remarkable methods have been proposed in this field.…

Image and Video Processing · Electrical Eng. & Systems 2022-02-15 Yahya Dogan , Hacer Yalim Keles

As integrated circuit (IC) dimensions shrink below the lithographic wavelength, optical lithography faces growing challenges from diffraction and process variability. Model-based optical proximity correction (OPC) and inverse lithography…

Machine Learning · Computer Science 2025-12-25 Yuting Hu , Lei Zhuang , Hua Xiang , Jinjun Xiong , Gi-Joon Nam

Optical proximity correction (OPC) is crucial for pushing the boundaries of semiconductor manufacturing and enabling the continued scaling of integrated circuits. While pixel-based OPC, termed as inverse lithography technology (ILT), has…

Artificial Intelligence · Computer Science 2024-09-02 Guojin Chen , Haoyu Yang , Haoxing Ren , Bei Yu , David Z. Pan

Photonic Crystal Surface Emitting Lasers (PCSEL)'s inverse design demands expert knowledge in physics, materials science, and quantum mechanics which is prohibitively labor-intensive. Advanced AI technologies, especially reinforcement…

Applied Physics · Physics 2024-03-11 Ceyao Zhang , Renjie Li , Cheng Zhang , Zhaoyu Zhang , Feng Yin

Inverse design (ID) is a computational method that systematically explores a design space to find optimal device geometries based on specific performance criteria. In silicon photonics, ID often leads to devices with design features that…

Systems and Control · Electrical Eng. & Systems 2024-10-11 Shaheer Khan , Mustafa Hammood , Nicolas A. F. Jaeger , Lukas Chrostowski

In the realm of lithography, Optical Proximity Correction (OPC) is a crucial resolution enhancement technique that optimizes the transmission function of photomasks on a pixel-based to effectively counter Optical Proximity Effects (OPE).…

Optics · Physics 2024-12-20 Ruixiang Chen , Yang Zhao , Haoqin Li , Rui Chen

We present an improved inverse ray-shooting code based on GPUs for generating microlensing magnification maps. In addition to introducing GPUs for acceleration, we put the efforts in two aspects: (i) A standard circular lens plane is…

Instrumentation and Methods for Astrophysics · Physics 2022-06-08 Wenwen Zheng , Xuechun Chen , Guoliang Li , Hou-zun Chen

For robust visual-inertial SLAM in perceptually-challenging indoor environments,recent studies exploit line features to extract descriptive information about scene structure to deal with the degeneracy of point features. But existing…

Computer Vision and Pattern Recognition · Computer Science 2024-07-02 Wanting Li , Shuo Wang , Yongcai Wang , Yu Shao , Xuewei Bai , Deying Li

Recovering the intrinsic physical attributes of a scene from images, generally termed as the inverse rendering problem, has been a central and challenging task in computer vision and computer graphics. In this paper, we present GUS-IR, a…

Computer Vision and Pattern Recognition · Computer Science 2024-11-13 Zhihao Liang , Hongdong Li , Kui Jia , Kailing Guo , Qi Zhang

Extreme Ultraviolet (EUV) photolithography is seen as the key enabler for increasing transistor density in the next decade. In EUV lithography, 13.5 nm EUV light is illuminated through a reticle, holding a pattern to be printed, onto a…

Distributed, Parallel, and Cluster Computing · Computer Science 2019-02-22 Mohamed A. Bamakhrama , Alejandro Arrizabalaga , Frank Overman , Jean-Paul Smeets , Kornel van der Sommen , Remko van der Vossen , John Wagensveld

Fast production of large area patterns with nanometre resolution is crucial for the established semiconductor industry and for enabling industrial-scale production of next-generation quantum devices. Metastable atom lithography with binary…

Machine Learning · Computer Science 2022-07-19 Johannes Fiedler , Adrià Salvador Palau , Eivind Kristen Osestad , Pekka Parviainen , Bodil Holst

Computed Tomography (CT) has been widely adopted in medicine and it is increasingly being used in scientific and industrial applications. Parallelly, research in different mathematical areas concerning discrete inverse problems has led to…

Inverse rendering seeks to estimate scene characteristics from a set of data images. The dominant approach is based on differential rendering using Monte-Carlo. Algorithms as such usually rely on a forward model and use an iterative…

Computer Vision and Pattern Recognition · Computer Science 2021-10-04 Ido Czerninski , Yoav Y. Schechner
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