Related papers: Electron dynamics and particle transport in capaci…
The electron dynamics and SiO2 etching profile evolution in capacitively coupled Ar/CHF3 plasmas driven by sawtooth-waveforms are investigated based on a one-dimensional fluid/Monte-Carlo (MC) model coupled with an etching profile evolution…
Using particle-in-cell simulation technique, we investigate the plasma and ionization asymmetry, electron and ion energy distribution function in capacitive discharges excited by tailored waveforms. At a base frequency of 13.56 MHz, three…
Using particle-in-cell (PIC) simulation technique, the effect of gas pressure (5-500 mTorr) on the plasma spatial asymmetry, ionization rate, metastable gas densities profile, electron energy distribution function and higher harmonics…
Control over plasma asymmetry in a low-pressure capacitively coupled plasma (CCP) discharges is vital for many plasma processing applications. In this article, using the particle-in-cell simulation technique, we investigated the asymmetry…
Very high frequency (VHF) driven capacitive discharges are now being increasingly adopted for plasma-based materials processing due to their high processing rates and lower substrate damage. Past studies related to complex plasma dynamics…
Understanding electron and ion heating phenomenon in capacitively coupled radio-frequency plasma discharges is vital for many plasma processing applications. In this article, using particle-in-cell simulation technique we investigate the…
In magnetized capacitively coupled radio-frequency discharges operated at low pressure the influence of the magnetic flux density on discharge properties has been studied recently both by experimental investigations and in simulations. It…
Low-pressure radio-frequency capacitively coupled plasmas operated in Ar/O$_2$ gas mixtures are widely adopted in critical semiconductor manufacturing processes. O($^3$P) and O($^1$D) are key highly reactive species for oxidation or as…
A self-consistent particle-in-cell simulation study is performed to investigate the effect of driving frequency on the electric field non-linearity, electron heating mechanism and electron energy distribution function (EEDF) in a low…
One-dimensional particle-in-cell simulation is used to simulate the capacitively coupled argon plasma for a range of driving frequency from 13.56 MHz to 100 MHz. The argon chemistry set can, selectively, include two metastable levels…
In capacitively coupled radio frequency (CCRF) discharges, the interaction of the plasma and the surface boundaries is linked to a variety of highly relevant phenomena for technological processes. One possible plasma-surface interaction is…
In the presence of a strong electric field perpendicular to the magnetic field, the electron cross-field (E$\times$B) flow relative to the unmagnetized ions can cause the Electron Cyclotron Drift Instability (ECDI) due to resonances of the…
The effects of the discharge voltage on the formation and nature of electric field transients in a symmetric, collisionless, very high frequency, capacitively coupled plasma are studied using a self-consistent particle-in-cell (PIC)…
A particle-in-cell (PIC) simulation study is performed to investigate the discharge asymmetry, higher harmonic generations and electron heating mechanism in a low pressure very high frequency capacitively coupled plasma (CCP) excited by a…
The Electron Cyclotron Drift Instability (ECDI) driven by the electron $E\times B$ drift in partially magnetized plasmas is investigated with highly resolved particle-in-cell simulations. The emphasis is on two-dimensional effects involving…
The specific form of one electrode capacitive discharge was studied in long tubes filled with high purity neon or argon at pressure 1-4 Torr. The main feature of the discharge is the low rate (less than 10 kHz) of the voltage pulses of…
The effect of changing the driving frequency on the plasma density and the electron dynamics in a capacitive radio-frequency argon plasma operated at low pressures of a few Pa is investigated by Particle in Cell/Monte Carlo Collisions…
Tailoring ion energy distribution function (IEDF) is vital for advanced plasma processing applications. Capacitively coupled plasma (CCP) discharges excited using non-sinusoidal waveform have shown its capability to control IEDF through…
In atmospheric pressure capacitively coupled microplasma jets, Voltage Waveform Tailoring (VWT) was demonstrated to provide ultimate control of the Electron Energy Distribution Function (EEDF), which allows to enhance and adjust the…
In this work, we analyze the creation of the discharge asymmetry and the concomitant formation of the DC self-bias voltage in capacitively coupled radio frequency plasmas driven by multi-frequency waveforms, as a function of the electrode…