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We report resolution enhancement in scanning electron microscopy (SEM) images using a generative adversarial network. We demonstrate the veracity of this deep learning-based super-resolution technique by inferring unresolved features in…

Computer Vision and Pattern Recognition · Computer Science 2019-08-21 Kevin de Haan , Zachary S. Ballard , Yair Rivenson , Yichen Wu , Aydogan Ozcan

The scanning electron microscope (SEM) produces an image of a sample by scanning it with a focused beam of electrons. The electrons interact with the atoms in the sample, which emit secondary electrons that contain information about the…

Computer Vision and Pattern Recognition · Computer Science 2017-09-08 Shahar Tsiper , Or Dicker , Idan Kaizerman , Zeev Zohar , Mordechai Segev , Yonina C. Eldar

Scanning Electron Microscopy (SEM) is indispensable in modern materials science, enabling high-resolution imaging across a wide range of structural, chemical, and functional investigations. However, SEM imaging remains constrained by…

Scanning electron microscopy (SEM) is indispensable in diverse applications ranging from microelectronics to food processing because it provides large depth-of-field images with a resolution beyond the optical diffraction limit. However,…

Characterisation of rare microstructural features in scanning electron microscopy (SEM) requires imaging large areas at high resolution. This leads to prohibitively long acquisition times. We present an open-source Python framework that…

Scanning electron microscopy (SEM) has been widely utilized in the field of materials science due to its significant advantages, such as large depth of field, wide field of view, and excellent stereoscopic imaging. However, at high…

A growing need exists for efficient and accurate methods for detecting defects in semiconductor materials and devices. These defects can have a detrimental impact on the efficiency of the manufacturing process, because they cause critical…

Computer Vision and Pattern Recognition · Computer Science 2023-08-21 Thibault Lechien , Enrique Dehaerne , Bappaditya Dey , Victor Blanco , Sandip Halder , Stefan De Gendt , Wannes Meert

This paper is concerned with investigating super-resolution algorithms and solutions for handling electron microscopic images. We note two main aspects differentiating the problem discussed here from those considered in the literature. The…

Image and Video Processing · Electrical Eng. & Systems 2020-08-26 Yanjun Qian , Jiaxi Xu , Lawrence F. Drummy , Yu Ding

Single-beam scanning electron microscopes (SEM) are widely used to acquire massive data sets for biomedical study, material analysis, and fabrication inspection. Datasets are typically acquired with uniform acquisition: applying the…

Image and Video Processing · Electrical Eng. & Systems 2021-01-11 Lu Mi , Hao Wang , Yaron Meirovitch , Richard Schalek , Srinivas C. Turaga , Jeff W. Lichtman , Aravinthan D. T. Samuel , Nir Shavit

Perhaps surprisingly, the total electron microscopy (EM) data collected to date is less than a cubic millimeter. Consequently, there is an enormous demand in the materials and biological sciences to image at greater speed and lower dosage,…

Computer Vision and Pattern Recognition · Computer Science 2016-12-06 Suhas Sreehari , S. V. Venkatakrishnan , Katherine L. Bouman , Jeffrey P. Simmons , Lawrence F. Drummy , Charles A. Bouman

The scanning electron microscopy (SEM) is probably one the most fascinating examination approach that has been used since more than two decades to detailed inspection of micro scale objects. Most of the scanning electron microscopes could…

Computer Vision and Pattern Recognition · Computer Science 2016-02-18 Wichai Shanklin

Scanning electron microscopy (SEM), a century-old technique, is today a ubiquitous method of imaging the surface of nanostructures. However, most SEM detectors simply count the number of secondary electrons from a material of interest, and…

Scanning Electron Microscopy (SEM) is critical in nanotechnology, materials science, and biological imaging due to its high spatial resolution and depth of focus. Signal-to-noise ratio (SNR) is an essential parameter in SEM because it…

Machine Learning · Computer Science 2025-10-10 K. S. Sim , I. Bukhori , D. C. Y. Ong , K. B. Gan

The Scanning electron microscope (SEM) and Electron-Dispersive Spectroscope (EDS) are two highly effective instruments in the field of nanoscience and nanotechnology. The quality of these instruments is determined by various factors, with…

Applied Physics · Physics 2023-10-24 Hamidreza Moradi , Fatemeh Mehradnia

The porous media community extensively utilizes digital rock images for core analysis. High-resolution digital rock images that possess sufficient quality are essential but often challenging to acquire. Super-resolution (SR) approaches…

Image and Video Processing · Electrical Eng. & Systems 2024-09-06 Shaohua You , Shuqi Sun , Zhengting Yan , Qinzhuo Liao , Huiying Tang , Lianhe Sun , Gensheng Li

A new tool providing material contrast control in scanning electron microscopy (SEM) is demonstrated. The approach is based on deep-UV illumination during SEM imaging and delivers a novel material based contrast as well as higher resolution…

Instrumentation and Detectors · Physics 2016-04-07 Gediminas Seniutinas , Armandas Balcytis , Saulius Juodkazis

Electron tomography, as an important 3D imaging method, offers a powerful method to probe the 3D structure of materials from the nano- to the atomic-scale. However, as a grant challenge, radiation intolerance of the nanoscale samples and…

Materials Science · Physics 2020-03-30 Chunyang Wang , Guanglei Ding , Yitong Liu , Huolin L. Xin

A central problem in neuroscience is reconstructing neuronal circuits on the synapse level. Due to a wide range of scales in brain architecture such reconstruction requires imaging that is both high-resolution and high-throughput. Existing…

Computer Vision and Pattern Recognition · Computer Science 2012-10-03 Tao Hu , Juan Nunez-Iglesias , Shiv Vitaladevuni , Lou Scheffer , Shan Xu , Mehdi Bolorizadeh , Harald Hess , Richard Fetter , Dmitri Chklovskii

Magnetic resonance imaging (MRI) is a widely used medical imaging modality. However, due to the limitations in hardware, scan time, and throughput, it is often clinically challenging to obtain high-quality MR images. The super-resolution…

Image and Video Processing · Electrical Eng. & Systems 2020-02-20 Qing Lyu , Hongming Shan , Ge Wang

Scanning electron microscopy (SEM) is a versatile technique used to image samples at the nanoscale. Conventional imaging by this technique relies on finding the average intensity of the signal generated on a detector by secondary electrons…

Instrumentation and Detectors · Physics 2021-11-04 Akshay Agarwal , John Simonaitis , Vivek K. Goyal , Karl K. Berggren
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