Related papers: Self Calibration by ON/OFF Sensitivity Switching -…
This study presents the design, fabrication, and test of a micro accelerometer with intrinsic processing capabilities, that integrates the functions of sensing and computing in the same MEMS. The device consists of an inertial mass…
Particle-exchange machines utilize electronic transport to continuously transfer heat between fermionic reservoirs. Here, we couple a quantum mechanical resonator to a particle-exchange machine hosted in a quantum dot and let the system run…
This paper presents the design, simulation, and analytical modeling of the single proposed axis MEMSbased capacitive accelerometer. Analytical modeling has been done for frequency and displacement sensitivity. The performance of the…
Nanomechanical resonant sensors that are based on detecting and tracking the resonance frequency deviations due to events of interest are being advocated for a variety of applications. All sensor schemes currently in use are subject to a…
The paper presents the results of a study of electron-beam modification (EBM) of VO2-switch I-V curve threshold parameters and the self-oscillation frequency of a circuit containing such a switching device. EBM in vacuum is reversible and…
Resonant electromagnetic actuators have been broadly used as vibration motors for mobile devices given their ability of generating relatively fast, strong, and controllable vibration force at a given resonant frequency. Mechanism of the…
Nanomechanical resonators are used as high performance detectors in a variety of applications such as mass spectrometry and atomic force microscopy. Initial emphasis in nanomechanical resonant sensor research was on increasing the…
In the present work we develop an algorithm for calibrating MEMS sensors, which accounts for the nonorthogonality of the accelerometers' axis, as well as for the constant bias and scaling errors. We derive an explicit formula for computing…
The calibration technique for accelerometers has been internationally developed for up to 20 kHz to ensure the reliability of vibration measurement. However, it has been established that the calibrated sensitivity changes at over 10 kHz…
This paper shows the effect of scaling silicon accelerometers down from MEMS to NEMS. It models both electronics and Brownian noise sources for both capacitive and resonant devices, and computes the minimum detectable signal attainable.…
An excitation method for MEMS devices with planar electrodes is described. The stationary part of the device (the stator) consists of three electrode arrays arranged in the 'ABCABC' order. 'A', 'B', and 'C' carry time-independent potentials…
Phase transitions can dramatically alter system dynamics, unlocking new behavior and improving performance. Exceptional points (EPs), where the eigenvalues and corresponding eigenvectors of a coupled linear system coalesce, are particularly…
Nonlinear micro-electro-mechanical systems (MEMS) resonators open new opportunities in sensing and signal manipulation compared to their linear counterparts by enabling frequency tuning and increased bandwidth. Here, we design, fabricate…
External effects such as shocks and temperature variations affect the calibration of visual-inertial sensor systems and thus they cannot fully rely on factory calibrations. Re-calibrations performed on short user-collected datasets might…
We demonstrate a microfabricated optomechanical accelerometer that is capable of percent-level accuracy without external calibration. To achieve this capability, we use a mechanical model of the device behavior that can be characterized by…
The sensitivity of mechanical resonators to physical quantities such as acceleration, pressure, mass and temperature enables them to underpin sensing and metrology applications. Here, we observe that the resonance frequency of a…
The exquisite precision of atom interferometers has sparked the interest of a large community for use cases ranging from fundamental physics to geodesy and inertial navigation. However, their practical use for onboard applications is still…
A method is proposed and experimentally explored for in-situ calibration of complex transmission data for superconducting microwave resonators. This cryogenic calibration method accounts for the instrumental transmission response between…
Atomic force spectroscopy and microscopy (AFM) are invaluable tools to characterize nanostructures and biological systems. Most experiments, including state-of-the-art images of molecular bonds, are achieved by driving probes at their…
This article presents a comprehensive study and design methodology of co-integrated oscillators for nano mass sensing application based on resonant Nano-Electro-Mechanical-System (NEMS). In particular, it reports the capacitive with the…