Related papers: Active Compensation of Position Dependent Flexible…
The ever increasing need for performance results in increasingly rigorous demands on throughput and positioning accuracy of high-precision motion systems, which often suffer from position dependent effects that originate from relative…
Growing demands in the semiconductor industry result in the need for enhanced performance of lithographic equipment. However, position tracking accuracy of high precision mechatronics is often limited by the presence of disturbance sources,…
Micro/Nano-positioning stages are of great importance in a wide range of manufacturing machines and instruments. In recent years, the drastically growing demand for higher throughput and reduced power consumption in various IC manufacturing…
Precision motion stages are playing a prominent role in various manufacturing equipment. The drastically increasing demand for higher throughput in integrated circuit (IC) manufacturing and inspection calls for the next-generation precision…
This paper presents a robust position controller for electric power assisted steering and steer-by-wire force-feedback systems. A position controller is required in steering systems for haptic feedback control, advanced driver assistance…
Visual pose tracking is playing an increasingly vital role in industrial contexts in recent years. However, the pose tracking for industrial metal objects remains a challenging task especially in the real world-environments, due to the…
Increasingly stringent throughput requirements in the industry necessitate the need for lightweight design of high-precision motion systems to allow for high accelerations, while still achieving accurate positioning of the moving-body. The…
Mechatronic systems have increasingly stringent performance requirements for motion control, leading to a situation where many factors, such as position-dependency, cannot be neglected in feedforward control. The aim of this paper is to…
Increasingly stringent performance requirements for motion control necessitate the use of increasingly detailed models of the system behavior. Motion systems inherently move, therefore, spatio-temporal models of the flexible dynamics are…
This paper is concerned with fault/disturbance compensation control for fully actuated systems. In particular, we explore observer-based control, incorporating an active compensation mechanism. First, we propose a novel observer with…
Precision motion stages play a critical role in various manufacturing and inspection equipment, for example, the wafer/reticle scanning in photolithography scanners and positioning stages in wafer inspection systems. To meet the growing…
In this article, we investigate the model based position control of soft hydraulic actuators arranged in an antagonistic pair. A dynamical model of the system is constructed by employing the port-Hamiltonian formulation. A control algorithm…
Vibration compensation is important for many domains. For the machine tool industry it translates to higher machining precision and longer component lifetime. Current methods for vibration damping have their shortcomings (e.g. need for…
A self-learning optimal control algorithm for episodic fixed-horizon manufacturing processes with time-discrete control actions is proposed and evaluated on a simulated deep drawing process. The control model is built during consecutive…
A hyper-redundant robotic arm is a manipulator with many degrees of freedom, capable of executing tasks in cluttered environments where robotic arms with fewer degrees of freedom are unable to operate. This paper introduces a new method for…
Dynamic control of a soft-body robot to deliver complex behaviors with low-dimensional actuation inputs is challenging. In this paper, we present a computational approach to automatically generate versatile, underactuated control policies…
A novel approach is presented for computing flexible body dynamics based on conventional structural dynamics models. This approach innovatively captures the rigid body motion component embedded within a flexible body's movement, generates…
Shared Control methods often use impedance control to track target poses in a robotic manipulator. The guidance behavior of such controllers is shaped by the used stiffness gains, which can be varying over time to achieve an adaptive…
Precision motion stages are an essential part of a wide range of manufacturing equipment, and their motion performance are critical to the quality and throughput of the systems. The drastically increasing demand for higher manufacturing…
Ultrasonic motors used in high-precision mechatronics are characterized by strong frictional effects, which are among the main problems in precision motion control. The traditional methods apply model-based nonlinear feedforward to…