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Nanoelectromechanical systems, or NEMS, are MEMS scaled to submicron dimensions. In this size regime, it is possible to attain extremely high fundamental frequencies while simultaneously preserving very high mechanical responsivity (small…

Mesoscale and Nanoscale Physics · Physics 2007-05-23 M. L. Roukes

Topological mechanical metamaterials translate condensed matter phenomena, like non-reciprocity and robustness to defects, into classical platforms. At small scales, topological nanoelectromechanical metamaterials (NEMM) can enable the…

Applied Physics · Physics 2019-03-06 Jinwoong Cha , Kun Woo Kim , Chiara Daraio

Implementing microelectromechanical system (MEMS) resonators calls for detailed microscopic understanding of the devices, such as energy dissipation channels, spurious modes, and imperfections from microfabrication. Here, we report the…

Applied Physics · Physics 2023-03-22 Daehun Lee , Shahin Jahanbani , Jack Kramer , Ruochen Lu , Keji Lai

Over the past few years, microelectromechanical system (MEMS) based on-chip resonators have shown significant potential for sensing and high frequency signal processing applications. This is due to their excellent features like small size,…

Other Computer Science · Computer Science 2013-01-15 Joydeep Basu , Tarun Kanti Bhattacharyya

Nanoelectromechanical Systems (NEMS) have emerged as a promising technology for performing the mass spectrometry of large biomolecules and nanoparticles. As nanoscale objects land on NEMS sensor one by one, they induce resolvable shifts in…

Mesoscale and Nanoscale Physics · Physics 2019-07-24 Mert Yuksel , Ezgi Orhan , Cenk Yanik , Atakan B. Ari , Alper Demir , M. Selim Hanay

Aberration-corrected environmental transmission electron microscopy (ETEM) enables atomic-resolution imaging of dynamic catalytic processes. Correlating atomic-scale structural changes with reaction products detected by mass spectrometry…

Nanoelectromechanical systems (NEMSs) are emerging nanoscale elements at the crossroads between mechanics, optics and electronics, with significant potential for actuation and sensing applications. The reduction of dimensions compared to…

Mesoscale and Nanoscale Physics · Physics 2012-03-20 Antoine Reserbat-Plantey , Laetitia Marty , Olivier Arcizet , Nedjma Bendiab , Vincent Bouchiat

We introduce a novel electro-optomechanic neural sensor for realizing ultra-compact neural recording probes that can detect and relay electrophysiology signals from within neural tissue. This technology addresses outstanding challenges…

Nanoelectromechanical systems (NEMS) are nano-to-micrometer scale mechanical resonators coupled to electronic devices of similar dimensions. NEMS show promise for fast, ultrasensitive force microscopy and for deepening our understanding of…

Mesoscale and Nanoscale Physics · Physics 2015-06-25 M. P. Blencowe

In recent decades, microelectromechanical systems (MEMS)-based gyroscopes have been employed to meet positioning and navigation demands of a plethora of commercially available devices. Most of such gyroscopes rely on electrostatic actuators…

CMOS-MEMS resonators seamlessly integrated in advanced integrated circuit (IC) technology have the unique capability to enable unprecedented integration of stable frequency references, acoustic spectral processors, and physical sensors.…

Applied Physics · Physics 2023-04-13 Udit Rawat , Jackson Anderson , Dana Weinstein

Scanning tunneling microscopy (STM) and micro-electromechanical systems (MEMS) have traditionally addressed vastly different length scales - one resolving atoms, the other engineering macroscopic motion. Here we unite these two fields to…

Mesoscale and Nanoscale Physics · Physics 2026-01-09 R. J. G. Elbertse , M. Xu , A. Keşkekler , S. Otte , R. A. Norte

Active manipulation of mechanical waves at high frequencies opens opportunities in heat management, radio-frequency (RF) signal processing, and quantum technologies. Nanoelectromechanical systems (NEMS) are appropriate platforms for…

Applied Physics · Physics 2018-11-09 Jinwoong Cha , Chiara Daraio

Atomically thin layers of two-dimensional (2D) materials such as graphene, MoS2 and h-BN have immense potential as sensors and electronic devices thanks to their highly desirable electronic, mechanical, optical and heat transport…

Mesoscale and Nanoscale Physics · Physics 2015-09-03 Nicholas D. Kay , Peter D. Tovee , Benjamin J. Robinson , Konstantin S. Novoselov , Oleg V. Kolosov

Compact, low-power analog RF components are essential for next-generation microwave electronics and wireless systems. We demonstrate an all-electric integrated piezo-magnonic microelectromechanical system that enables efficient voltage…

Applied Physics · Physics 2026-03-31 M. Cocconcelli , A. Angotti , P. Florio , N. Pellizzi , F. Maspero , R. Bertacco

Sensors and actuators based on resonant micro-electro-mechanical systems (MEMS), such as scanning micro mirrors, are well-established in automotive and consumer products. As the areas of application broaden, the requirements for the MEMS…

Applied Physics · Physics 2020-02-07 Ulrike Nabholz , Florian Stockmar , Jan E. Mehner , Peter Degenfeld-Schonburg

Strong coupling between electrical and mechanical phenomena and the presence of switchable polarization have enabled applications of ferroelectric materials for nonvolatile memories (FeRAM), data storage, and ferroelectric lithography.…

Nanoelectromechanical Systems (NEMS) are among the best candidates to measure interactions at nanoscale [1-6], especially when resonating oscillators are used with high quality factor [7, 8]. Despite many efforts [9, 10], efficient and easy…

We describe the application of nanoelectromechanical systems (NEMS) to ultrasensitive mass detection. In these experiments, a modulated flux of atoms was adsorbed upon the surface of a 32.8 MHz NEMS resonator within an ultrahigh vacuum…

Other Condensed Matter · Physics 2009-11-10 K. L. Ekinci , X. M. H. Huang , M. L. Roukes

For many decades High Energy Physics (HEP) instrumentation has been concentrated on detectors of ionizing radiation -- where the energy of incident particles or photons is sufficient to create mobile charge in gas, liquid, or solid…

Instrumentation and Detectors · Physics 2022-04-06 Josef Frisch , Paul O'Connor
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