Related papers: Double-layer Thin-film LiNbO3 Longitudinally Excit…
This work reports a 50.74 GHz lithium niobate (LiNbO3) acoustic resonator with a high quality factor (Q) of 237 and an electromechanical coupling (k2) of 5.17% resulting in a figure of merit (FoM, Q x k2) of 12.2. The LiNbO3 resonator…
We report a structurally simple double-layer lithium tantalate (LiTaO3) bulk acoustic resonator that enables symmetry-selective excitation of the second-order thickness-shear (SH2) mode with ultrahigh electromechanical coupling. Two 31 deg…
This letter presents miniature millimeter wave (mmWave, above 30 GHz) acoustic resonators based on a single-layer thin-film lithium niobate (LN) platform. More specifically, we present high performance third-order antisymmetric (A3) mode…
Compact, high-performance components in millimeter-wave (mmWave) communication systems demand new acoustic filter technology at increasingly higher frequencies. Among various promising mmWave platforms, first-order antisymmetric (A1) mode…
In this work, Laterally excited Bulk Acoustic Wave (LBAW) resonators on X-cut Lithium Niobate (LiNbO3) and, for the first time their higher-order overtones (LOBAW) are demonstrated by embedding interdigitated electrodes recessed into the…
This work reports an acoustic filter at 23.5 GHz with a low insertion loss (IL) of 2.38 dB and a 3-dB fractional bandwidth (FBW) of 18.2%, significantly surpassing the state-of-the-art. The device leverages electrically coupled acoustic…
We demonstrate a three-dimensional fin lithium niobate (FinLN) acoustic resonator fabricated from thick lithium niobate on insulator using deep ion etching and sidewall electrode patterning. The FinLN geometry enables strong…
The continuous growth of global data traffic over the past three decades, along with advances in disaggregated computing architectures, presents significant challenges for optical transceivers in communication networks and high-performance…
This work reports the first study of periodically poled piezoelectric film (P3F) lithium niobate (LiNbO3) resonators at cryogenic temperatures. We experimentally investigate the temperature dependency of resonant frequencies and quality…
The development of sophisticated integrated photonic circuits demands microresonators that combine exceptional optical confinement with dynamic operational flexibility. Here, we demonstrate a racetrack resonator on the thin-film lithium…
In this work, a 38.7 GHz acoustic wave ladder filter exhibiting insertion loss (IL) of 5.63 dB and 3-dB fractional bandwidth (FBW) of 17.6% is demonstrated, pushing the frequency limits of thin-film piezoelectric acoustic filter technology.…
This paper is the first report of the high-temperature characteristics of a laterally vibrating piezoelectric lithium niobate (LiNbO$_{3}$) MEMS resonator array up to 500{\deg}C in air. After a high-temperature burn-in treatment, device…
In this work, we demonstrate a C-band shear-horizontal surface acoustic wave (SH-SAW) resonator with high electromechanical coupling (kt2) of 22% and a quality factor (Q) of 565 based on a thin-film lithium niobate (LN) on silicon carbide…
In this work, we investigate the frequency scaling of shear-horizontal (S.H.) surface acoustic wave (SAW) resonators based on a lithium niobate on insulator (LNOI) substrate into the centimeter bands for 6G wireless systems. Prototyped…
The demand for high-performance electromechanical resonators is ever-growing across diverse applications, ranging from sensing and time-keeping to advanced communication devices. Among the electromechanical materials being explored,…
High overtone bulk acoustic resonators are essential components in microwave signal processing and emerging quantum technologies; however, conventional designs suffer from limited impedance matching, spurious mode interference, and…
This paper reports the first high-performance acoustic filters toward millimeter wave (mmWave) bands using transferred single-crystal thin film lithium niobate (LiNbO3). By transferring LiNbO3 on the top of silicon (Si) and sapphire (Al2O3)…
Lithium niobate is a promising material for developing quantum acoustic technologies due to its strong piezoelectric effect and availability in the form of crystalline thin films of high quality. However, at radio frequencies and cryogenic…
Recently, piezoelectric power conversion has shown great benefits from replacing the bulky and lossy magnetic inductor in a traditional power converter with a piezoelectric resonator due to its compact size and low loss. However, the…
Electro-optical modulation is widely employed for optical signal processing and in laser technology. To date, it is efficiently realized in integrated photonic systems as well as in bulk optics devices. Yet, the achievement of modulators…