Related papers: Shape Optimization of Geometrically Nonlinear Moda…
Microelectromechanical systems (MEMS) gyroscopes are widely used in consumer and automotive applications. They have to fulfill a vast number of product requirements which lead to complex mechanical designs of the resonating structure.…
Atomically thin two dimensional (2D) layered materials have emerged as a new class of material for nanoelectromechanical systems (NEMS) due to their extraordinary mechanical properties and ultralow mass density. Among them, graphene has…
We explore the nonlinear dynamics of a cavity optomechanical system. Our realization consisting of a drumhead nano-electro-mechanical resonator (NEMS) coupled to a microwave cavity, allows for a nearly ideal platform to study the…
The requirements pertaining to the reliability and accuracy of micro-electromechanical gyroscopic sensors are increasing,as systems for vehicle localization emerge as an enabling factor for autonomous driving. Since micro-electromechanical…
Scanning micro-mirror actuators are silicon-based oscillatory micro-electro-mechanical systems (MEMS). They enable laser distance measurements for automotive LIDAR applications as well as projection modules for the consumer market. For MEMS…
Mechanical nonlinearities dominate the motion of nanoresonators already at relatively small oscillation amplitudes. Although single and coupled two-degrees-of-freedom models have been used to account for experimentally observed nonlinear…
Studying the dynamical behavior of micro- and nano-mechanical systems (MEMS and NEMS) is essential in various fields from nonlinear dynamics to quantum technologies. Hence, it is important to be able to precisely monitor the mechanical…
This paper presents a detailed noise analysis and a noise-based optimization procedure for resonant MEMS structures. A design for high sensitivity of MEMS structures needs to take into account the noise shaping induced by damping phenomena…
The aim of this paper is to deal with multi-physics simulation of micro-electro-mechanical systems (MEMS) based on an advanced numerical methodology. MEMS are very small devices in which electric as well as mechanical and fluid phenomena…
The study of collective nonlinear dynamics of coupled mechanical resonators is regaining attention in recent years thanks to rapid developments in the fields of microelectromechanical and nanoelectromechanical systems (MEMS and NEMS). We…
We present simulations of the dynamic and temperature dependent behavior of Micro-Electro-Mechanical Systems (MEMS) by utilizing recently developed parallel codes which enable a coupling of length scales. The novel techniques used in this…
Nonlinear micro-electro-mechanical systems (MEMS) resonators open new opportunities in sensing and signal manipulation compared to their linear counterparts by enabling frequency tuning and increased bandwidth. Here, we design, fabricate…
Nonlinear nanostructured surfaces provide a paradigm shift in nonlinear optics with new ways to control and manipulate frequency conversion processes at the nanoscale, also offering novel opportunities for applications in photonics,…
We report on a giant enhancement in the thermal responsivity of the doubly-clamped GaAs microelectromechanical (MEMS) beam resonators by using the internal mode coupling effect. This is achieved by coupling the fundamental bending mode with…
Nanoelectromechanical systems (NEMS) are nano-to-micrometer scale mechanical resonators coupled to electronic devices of similar dimensions. NEMS show promise for fast, ultrasensitive force microscopy and for deepening our understanding of…
Sensors and actuators based on resonant micro-electro-mechanical systems (MEMS), such as scanning micro mirrors, are well-established in automotive and consumer products. As the areas of application broaden, the requirements for the MEMS…
We apply the well-established theoretical method developed for geometrical nonlinearities of micro/nano-mechanical clamped beams to circular drums. The calculation is performed under the same hypotheses, the extra difficulty being to…
Nonlinear metasurfaces offer a new paradigm to realize optical nonlinear devices with new and unparalleled behavior compared to nonlinear crystals, due to the interplay between photonic resonances and materials properties. The complicated…
Micro-Electro-Mechanical Systems (MEMS) normally have fixed or moving structures (plates or array of thin beams) with cross-sections of the order of microns and lengths of the order of tens or hundreds of microns. Electrostatic forces play…
Silicon-based micro-electromechanical systems (MEMS) can be fabricated using bulk and surface micromachining technology. A micro mirror designed as an oscillatory MEMS constitutes a prominent example. Typically, in order to minimize energy…