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Nanomechanical resonators with high quality factors (\Qm{}) enable mechanics-based quantum technologies, in particular quantum sensing and quantum transduction. High-\Qm{} nanomechanical resonators in the kHz to MHz frequency range can be…

In strained mechanical resonators, the concurrence of tensile stress and geometric nonlinearity dramatically reduces dissipation. This phenomenon, dissipation dilution, is employed in mirror suspensions of gravitational wave interferometers…

Elastic strain engineering utilizes stress to realize unusual material properties. For instance, strain can be used to enhance the electron mobility of a semiconductor, enabling more efficient solar cells and smaller, faster transistors. In…

Nanomechanical resonators with exceptionally low dissipation are advancing mechanics-based sensors and quantum technologies. The key for these advances is the engineering of localized phononic modes that are well-isolated from the…

Tensile-strained materials have been used to fabricate nano- and micromechanical resonators with ultra-low mechanical dissipation in the kHz to MHz frequency range. These mechanical resonators are of particular interest for force sensing…

Nanomechanical resonators have applications in a wide variety of technologies ranging from biochemical sensors to mobile communications, quantum computing, inertial sensing, and precision navigation. The quality factor of the mechanical…

Applied Physics · Physics 2022-01-19 Leo Sementilli , Erick Romero , Warwick P. Bowen

High-quality-factor ($Q$) mechanical resonators are essential components for precise sensing and control of mechanical motion at a quantum level. While amorphous materials such as SiN have been widely used in high-$Q$ mechanical resonators…

The small mass and high coherence of nanomechanical resonators render them the ultimate force probe, with applications ranging from biosensing and magnetic resonance force microscopy, to quantum optomechanics. A notorious challenge in these…

Quantum Physics · Physics 2017-07-18 Yeghishe Tsaturyan , Andreas Barg , Eugene S. Polzik , Albert Schliesser

High-stress Si$_3$N$_4$ nanoresonators have become an attractive choice for electro- and optomechanical devices. Membrane resonators can achieve quality factor ($Q$) - frequency ($f$) products exceeding $10^{13}$ Hz, enabling (in principle)…

Mesoscale and Nanoscale Physics · Physics 2016-03-07 A. H. Ghadimi , D. J. Wilson , T. J. Kippenberg

High-aspect-ratio mechanical resonators are pivotal in precision sensing, from macroscopic gravitational wave detectors to nanoscale acoustics. However, fabrication challenges and high computational costs have limited the…

Mesoscale and Nanoscale Physics · Physics 2024-06-17 Andrea Cupertino , Dongil Shin , Leo Guo , Peter G. Steeneken , Miguel A. Bessa , Richard A. Norte

All quantum optomechanics experiments to date operate at cryogenic temperatures, imposing severe technical challenges and fundamental constraints. Here we present a novel design of on-chip mechanical resonators which exhibit fundamental…

Mesoscale and Nanoscale Physics · Physics 2016-04-07 Richard A. Norte , Joao P. Moura , Simon Gröblacher

Systems with low mechanical dissipation are extensively used in precision measurements such as gravitational wave detection, atomic force microscopy and quantum control of mechanical oscillators via opto- and electromechanics. The…

We report on a systematic study of nanomechanical dissipation in high-frequency (approximatively 300 MHz) gallium arsenide optomechanical disk resonators, in conditions where clamping and fluidic losses are negligible. Phonon-phonon…

Micro- and nanomechanical systems with exceptionally low dissipation rates are enabling the next-generation technologies of ultra-sensitive detectors and quantum information systems. New techniques and methods for lowering the dissipation…

Mesoscale and Nanoscale Physics · Physics 2022-07-15 Dennis Høj , Ulrich Busk Hoff , Ulrik Lund Andersen

Nanomechanical resonators based on strained silicon nitride (Si$_3$N$_4$) have received a large amount of attention in fields such as sensing and quantum optomechanics due to their exceptionally high quality factors ($Q$s). Room-temperature…

Applied Physics · Physics 2020-01-08 Pedram Sadeghi , Manuel Tanzer , Simon L. Christensen , Silvan Schmid

Engineered micro- and nanomechanical resonators with ultra-low dissipation constitute the ideal systems for applications ranging from high-precision sensing such as magnetic resonance force microscopy, to quantum transduction between…

Mesoscale and Nanoscale Physics · Physics 2021-10-27 Dennis Høj , Fengwen Wang , Wenjun Gao , Ulrich Busk Hoff , Ole Sigmund , Ulrik Lund Andersen

High quality micro- and nano-mechanical resonators are widely used in sensing, communications and timing, and have future applications in quantum technologies and fundamental studies of quantum physics. Crystalline thin-films are…

Nanocrystalline materials exhibit properties that can differ substantially from those of their single crystal counterparts. As such, they provide ways to enhance and optimise their functionality for devices and applications. Here we report…

The applications of nanomechanical resonators range from biomolecule mass sensing to hybrid quantum interfaces. Their performance is often limited by internal material damping, which can be greatly reduced by using crystalline materials.…

Mesoscale and Nanoscale Physics · Physics 2025-04-24 Leo Sementilli , Daniil M. Lukin , Hope Lee , Joshua Yang , Erick Romero , Jelena Vučković , Warwick P. Bowen

Aluminum nitride (AlN) has been widely used in microeletromechanical resonators for its excellent electromechanical properties. Here we demonstrate the use of AlN as an optomechanical material that simultaneously offer low optical and…

Mesoscale and Nanoscale Physics · Physics 2012-06-11 Chi Xiong , Xiankai Sun , King Y. Fong , Hong X. Tang
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