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Lithography, transferring chip design masks to the silicon wafer, is the most important phase in modern semiconductor manufacturing flow. Due to the limitations of lithography systems, Extensive design optimizations are required to tackle…

Machine Learning · Computer Science 2024-05-07 Haoyu Yang , Haoxing Ren

We introduce neural lithography to address the 'design-to-manufacturing' gap in computational optics. Computational optics with large design degrees of freedom enable advanced functionalities and performance beyond traditional optics.…

Optics · Physics 2023-10-02 Cheng Zheng , Guangyuan Zhao , Peter T. C. So

Precise nanofabrication represents a critical challenge to developing semiconductor quantum-dot qubits for practical quantum computation. Here, we design and train a convolutional neural network to interpret in-line scanning electron…

Inverse design in nanophotonics, the computational discovery of structures achieving targeted electromagnetic (EM) responses, has become a key tool for recent optical advances. Traditional intuition-driven or iterative optimization methods…

Applied Physics · Physics 2025-10-15 Reza Marzban , Ali Adibi , Raphael Pestourie

The increasing size and complexity of machine learning (ML) models have driven the growing need for custom hardware accelerators capable of efficiently supporting ML workloads. However, the design of such accelerators remains a…

Machine Learning · Computer Science 2025-04-15 Raymond Baartmans , Andrew Ensinger , Victor Agostinelli , Lizhong Chen

Machine learning (ML) has emerged as a powerful tool for accelerating the computational design and production of materials. In materials science, ML has primarily supported large-scale discovery of novel compounds using first-principles…

The stagnation of EDA technologies roots from insufficient knowledge reuse. In practice, very similar simulation or optimization results may need to be repeatedly constructed from scratch. This motivates my research on introducing more…

Machine Learning · Computer Science 2022-06-08 Zhiyao Xie

Machine learning (ML) based interatomic potentials are emerging tools for materials simulations but require a trade-off between accuracy and speed. Here we show how one can use one ML potential model to train another: we use an existing,…

Materials Science · Physics 2022-09-20 Joe D. Morrow , Volker L. Deringer

In manufacturing, rework refers to an optional step of a production process which aims to eliminate errors or remedy products that do not meet the desired quality standards. Reworking a production lot involves repeating a previous…

Machine Learning · Statistics 2023-06-08 Oliver Schacht , Sven Klaassen , Philipp Schwarz , Martin Spindler , Daniel Grünbaum , Sebastian Imhof

End-to-end learning has become a widely applicable and studied problem in training predictive ML models to be aware of their impact on downstream decision-making tasks. These end-to-end models often outperform traditional methods that…

Machine Learning · Computer Science 2025-05-19 Rares Cristian , Pavithra Harsha , Georgia Perakis , Brian Quanz

Machine learning (ML) provides a broad spectrum of tools and architectures that enable the transformation of data from simulations and experiments into useful and explainable science, thereby augmenting domain knowledge. Furthermore,…

Plasma Physics · Physics 2024-09-05 Farbod Faraji , Maryam Reza

First-principles computations are the driving force behind numerous discoveries of hydride-based superconductors, mostly at high pressures, during the last decade. Machine-learning (ML) approaches can further accelerate the future…

Superconductivity · Physics 2023-06-01 Huan Tran , Tuoc N. Vu

Lithography is fundamental to integrated circuit fabrication, necessitating large computation overhead. The advancement of machine learning (ML)-based lithography models alleviates the trade-offs between manufacturing process expense and…

Computer Vision and Pattern Recognition · Computer Science 2023-04-11 Guojin Chen , Zehua Pei , Haoyu Yang , Yuzhe Ma , Bei Yu , Martin D. F. Wong

The development and deployment of machine learning (ML) systems can be executed easily with modern tools, but the process is typically rushed and means-to-an-end. The lack of diligence can lead to technical debt, scope creep and misaligned…

Machine-learning (ML) techniques have revolutionized a host of research fields of chemical and materials science with accelerated, high-efficiency discoveries in design, synthesis, manufacturing, characterization and application of novel…

Materials Science · Physics 2021-08-31 Zhexu Xi

The rapid evolution of the electronics industry, driven by Moore's law and the proliferation of integrated circuits, has led to significant advancements in modern society, including the Internet, wireless communication, and artificial…

Applied Physics · Physics 2024-09-25 Guojin Chen , Hao Geng , Bei Yu , David Z. Pan

Lithography simulation is a critical step in VLSI design and optimization for manufacturability. Existing solutions for highly accurate lithography simulation with rigorous models are computationally expensive and slow, even when equipped…

Other Computer Science · Computer Science 2022-03-17 Haoyu Yang , Zongyi Li , Kumara Sastry , Saumyadip Mukhopadhyay , Mark Kilgard , Anima Anandkumar , Brucek Khailany , Vivek Singh , Haoxing Ren

Microelectronic design verification remains a critical bottleneck in device development, traditionally mitigated by expanding verification teams and computational resources. Since the late 1990s, machine learning (ML) has been proposed to…

Hardware Architecture · Computer Science 2025-03-18 Christopher Bennett , Kerstin Eder

Iterative Learning Control (ILC) can achieve perfect tracking performance for mechatronic systems. The aim of this paper is to present an ILC design tutorial for industrial mechatronic systems. First, a preliminary analysis reveals the…

Systems and Control · Electrical Eng. & Systems 2020-05-05 Tom Oomen

Machine Learning (ML) is an expressive framework for turning data into computer programs. Across many problem domains -- both in industry and policy settings -- the types of computer programs needed for accurate prediction or optimal…

Machine Learning · Computer Science 2023-12-21 Elliot Creager
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