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Two-dimensional, resonant scanners have been utilized in a large variety of imaging modules due to their compact form, low power consumption, large angular range, and high speed. However, resonant scanners have problems with non-optimal and…

Image and Video Processing · Electrical Eng. & Systems 2023-05-05 Zhanghao Sun , Ronald Quan , Olav Solgaard

This work presents the design, simulation, fabrication, and characterization of a novel architectural compact two-dimensional (2D) resonant MEMS scanning mirror actuated by thin-film lead zirconate titanate (PZT). The device employs an…

Systems and Control · Electrical Eng. & Systems 2025-06-02 Mehrdad Khodapanahandeh , Parviz Zolfaghari , Hakan Urey

The development and characterisation of a piezoelectric actuated high-frequency MEMS scanning mirror with on-chip frequency tuning capability is reported. The resonant scanner operates at frequencies in excess of 140 kHz, generating scan…

Applied Physics · Physics 2022-06-15 Paul Janin , Deepak Uttamchandani , Ralf Bauer

Scanning micro-mirror actuators are silicon-based oscillatory micro-electro-mechanical systems (MEMS). They enable laser distance measurements for automotive LIDAR applications as well as projection modules for the consumer market. For MEMS…

Mesoscale and Nanoscale Physics · Physics 2019-03-21 Ulrike Nabholz , Frank Schatz , Jan E. Mehner , Peter Degenfeld-Schonburg

Scanning tunneling microscopy (STM) and micro-electromechanical systems (MEMS) have traditionally addressed vastly different length scales - one resolving atoms, the other engineering macroscopic motion. Here we unite these two fields to…

Mesoscale and Nanoscale Physics · Physics 2026-01-09 R. J. G. Elbertse , M. Xu , A. Keşkekler , S. Otte , R. A. Norte

Optical scanning is a prevalent technique for optical neural interfaces where light delivery with high spatial and temporal precision is desired. However, due to the sequential nature of point-scanning techniques, the settling time of…

Sensors and actuators based on resonant micro-electro-mechanical systems (MEMS), such as scanning micro mirrors, are well-established in automotive and consumer products. As the areas of application broaden, the requirements for the MEMS…

Applied Physics · Physics 2020-02-07 Ulrike Nabholz , Florian Stockmar , Jan E. Mehner , Peter Degenfeld-Schonburg

This paper discusses a logical operation of multi-memories that consist of coupled nonlinear micro-electro-mechanical systems (MEMS) resonators. A MEMS resonator shows two coexisting stable states when nonlinear responses appear. Previous…

Mesoscale and Nanoscale Physics · Physics 2013-09-17 Atsushi Yao , Takashi Hikihara

The aim of this paper is to deal with multi-physics simulation of micro-electro-mechanical systems (MEMS) based on an advanced numerical methodology. MEMS are very small devices in which electric as well as mechanical and fluid phenomena…

Other Computer Science · Computer Science 2007-11-29 V. Rochus , J. -C. Golinval , C. Louis , C. Mendez , I. Klapka

The use of electron mirrors in aberration correction and surface-sensitive microscopy techniques such as low-energy electron microscopy has been established. However, in this work, by implementing an easy to construct, fully electrostatic…

We present a widefield two-dimensional electronic spectroscopy microscope (2DESM) that integrates multidimensional coherent spectroscopy with optical imaging, enabling femtosecond temporal and micrometer spatial resolution. The broadband…

The Scanning electron microscope (SEM) and Electron-Dispersive Spectroscope (EDS) are two highly effective instruments in the field of nanoscience and nanotechnology. The quality of these instruments is determined by various factors, with…

Applied Physics · Physics 2023-10-24 Hamidreza Moradi , Fatemeh Mehradnia

Varifocal lenses, conventionally implemented by changing the axial distance between multiple optical elements, have a wide range of applications in imaging and optical beam scanning. The use of conventional bulky refractive elements makes…

Scanning Transmission Electron Microscopy (STEM) has become the main stay for materials characterization on atomic level, with applications ranging from visualization of localized and extended defects to mapping order parameter fields. In…

Instrumentation and Detectors · Physics 2019-01-15 Xin Li , Ondrej Dyck , Sergei V. Kalinin , Stephen Jesse

A multi-level tunable reflection array wide-angle beam scanning method is proposed to address the limited bandwidth and small scanning angle issues of current terahertz beam scanning technology. In this method, a focusing lens and its array…

Optics · Physics 2024-09-09 Weihua Yu , Hong Peng , Mingze Li , Haolin Li , Yuan Xue , Huikai Xie

Over the past few years, microelectromechanical system (MEMS) based on-chip resonators have shown significant potential for sensing and high frequency signal processing applications. This is due to their excellent features like small size,…

Other Computer Science · Computer Science 2013-01-15 Joydeep Basu , Tarun Kanti Bhattacharyya

In the recent years, metasurfaces, being flat and lightweight, have been designed to replace bulky optical components with various functions. We demonstrate a monolithic Micro-Electro-Mechanical System (MEMS) integrated with a…

Applied Physics · Physics 2018-05-18 Tapashree Roy , Shuyan Zhang , Il Woong Jung , Mariano Troccoli , Federico Capasso , Daniel Lopez

We demonstrate the integration of micro-electro-mechanical-systems (MEMS) scanning mirrors as active elements for the local optical pumping of ultra-cold atoms in a magneto-optical trap. A pair of MEMS mirrors steer a focused resonant beam…

This paper demonstrates a vibration test for a resonant MEMS scanning system in operation to evaluate the vibration immunity for automotive lidar applications. The MEMS mirror has a reinforcement structure on the backside of the mirror,…

Systems and Control · Electrical Eng. & Systems 2021-04-14 Han Woong Yoo , Rene Riegler , David Brunner , Stephan Albert , Thomas Thurner , Georg Schitter

In Environmental Scanning Electron Microscopy (ESEM) experiments, the acquisition parameters are generally kept constant throughout the collection of a data set. This limits data collection to one data set at a time, and frequent human…

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