Related papers: Piezoresistive snap-through detection for bifurcat…
We report on a flow velocity measurement technique based on snap-through detection of an electrostatically actuated, bistable micromechanical beam. We show that induced elecro-thermal Joule heating and the convective air cooling change the…
We present the findings from an experimental study of a MEMS flow sensor in which an initially curved, double-clamped bistable microbeam is the primary sensing element. Our research explores how the overheat ratio, direct flow loading, and…
This article presents a comprehensive study and design methodology of co-integrated oscillators for nano mass sensing application based on resonant Nano-Electro-Mechanical-System (NEMS). In particular, it reports the capacitive with the…
Piezoelectric micro-electro-mechanical systems have significant market potential owing to their superior capabilities of transduction to those of standard capacitive and piezoresistive devices. However, piezoelectric films are often lossy,…
The influence of temperature is a major problem in Structural Health Monitoring diagnosis using guided waves. In this article, two methods for temperature compensation are used to evaluate the temperature of a structure monitored by…
Accurate temperature measurement at the nanoscale is crucial for thermal management in next-generation microelectronic devices. Existing optical and scanning-probe thermometry techniques face limitations in spatial resolution, accuracy, or…
Membrane-based sensors are an important market for microelectromechanical systems (MEMS). Two-dimensional (2D) materials, with their low mass, are excellent candidates for suspended membranes to provide high sensitivity, small footprint…
We present an example of the practical implementation of a protocol for experimental bifurcation detection based on on-line identification and feedback control ideas. The idea is to couple the experiment with an on-line computer-assisted…
Scanning tunneling microscopy (STM) and micro-electromechanical systems (MEMS) have traditionally addressed vastly different length scales - one resolving atoms, the other engineering macroscopic motion. Here we unite these two fields to…
Momentum-resolved scanning transmission electron microscopy (MRSTEM) is a powerful phase-contrast technique that can map lateral magnetic and electric fields ranging from the micrometer to the subatomic scale. Resolving fields ranging from…
We report an actuation/detection scheme with a top-down nano-electromechanical system for frequency shift-based sensing applications with outstanding performance. It relies on electrostatic actuation and piezoresistive nanowire gauges for…
A photon-number resolving transition edge sensor (TES) is used to measure the photon-number distribution of two microcavity lasers. The investigated devices are bimodal microlasers with similar emission intensity and photon statistics with…
We describe and demonstrate a method by which the nonlinear piezoelectric properties of a piezoelectric material may be measured by detecting the force that it applies on a suspended micromechanical resonator at one of its mechanical…
The requirements pertaining to the reliability and accuracy of micro-electromechanical gyroscopic sensors are increasing,as systems for vehicle localization emerge as an enabling factor for autonomous driving. Since micro-electromechanical…
Online and real-time sensing and monitoring of the health state of complex structures, such as aircraft and critical components of power stations, are essential aspects of research in dynamics. Several types of sensors are used to capture…
Unveiling the driving force for a phase transition is normally difficult when multiple degrees of freedom are strongly coupled. One example is the nematic phase transition in iron-based superconductors. Its mechanism remains controversial…
We report on a flow sensing approach based on deflection monitoring of micro beams buckled by the compressive thermal stress due to electrothermal Joules heating. The air stream convectively cooling the device affects both the critical…
A multimode microcavity sensor based on a self-interference microring resonator is demonstrated experimentally. The proposed multimode sensing method is implemented by recording wideband transmission spectra that consist of multiple…
An extremely sensitive temperature measurement MEMS device is developed based on the principle of structural deflection in a bi-material cantilever caused by a difference in thermal expansion coefficients. A dual-beam asymmetrical geometry…
We have used a photothermal technique, in which chopped light heats the front surface of a small ( ~ 1 mm2) sample and the chopping frequency dependence of thermal radiation from the back surface is measured with a liquid nitrogen cooled…