Related papers: Wavelength-multiplexed Multi-mode EUV Reflection P…
We employ ptychography, a phase-retrieval imaging technique, to show experimentally for the first time that a partially coherent high-energy matter (electron) wave emanating from an extended source can be decomposed into a set of mutually…
Coherent microscopy techniques provide an unparalleled multi-scale view of materials across scientific and technological fields, from structural materials to quantum devices, from integrated circuits to biological cells. Driven by the…
Fourier ptychographic microscopy (FPM) is a powerful computational imaging modality that achieves high space-bandwidth product imaging for biomedical samples. However, its adoption is limited by slow data acquisition due to the need for…
Electron ptychography enables dose-efficient atomic-resolution imaging, but conventional reconstruction algorithms suffer from noise sensitivity, slow convergence, and extensive manual hyperparameter tuning for regularization, especially in…
Empowered by deep learning, recent methods for material capture can estimate a spatially-varying reflectance from a single photograph. Such lightweight capture is in stark contrast with the tens or hundreds of pictures required by…
Ptychography is a popular imaging technique that combines diffractive imaging with scanning microscopy. The technique consists of a coherent beam that is scanned across an object in a series of overlapping positions, leading to reliable and…
Using the illuminator for high numerical aperture (NA) extreme ultraviolet (EUV) exposure tool in EUV lithography can lead to support volume production of sub-2 nm logic nodes and leading-edge DRAM nodes. However, the typical design method…
Ptychography spans from sub-angstrom to meter scales yet suffers from convergence instability and excessive data redundancy. Here we introduce self-correcting residual neural fields as a dose-efficient framework for electron, X-ray, and…
X-ray Ptychography is an advanced computational microscopy technique which is delivering exceptionally detailed quantitative imaging of biological and nanotechnology specimens. However coarse parametrisation in propagation distance,…
We present rigorous simulations of EUV masks with technological imperfections like side-wall angles and corner roundings. We perform an optimization of two different geometrical parameters in order to fit the numerical results to results…
Ptychography is a popular technique to achieve diffraction limited resolution images of a two or three dimensional sample using high frame rate detectors. We introduce a relaxation of common projection algorithms to account for…
We report a new coherent imaging technique, termed ptychographic structured modulation (PSM), for quantitative super-resolution microscopy. In this technique, we place a thin diffuser (i.e., a scattering lens) in between the sample and the…
Metasurfaces have attracted extensive interests due to their ability to locally manipulate optical parameters of light and easy integration to complex optical systems. Particularly, metasurfaces can provide a novel platform for splitting…
In this paper, a method for solving the initial structure of an off-axis multi-mirror system applied to extreme ultraviolet (EUV) lithography using a paraxial ray-tracing algorithm based on Seidel aberration theory is proposed. By tracing…
Metasurfaces with spatially varying subwavelength structures enable full control of electromagnetic waves over a wide spectrum. High-efficiency metasurfaces, especially in a transmission mode, are of practical significance in optical…
The recently proposed concept of metagrating enables wavefront manipulation of electromagnetic (EM) waves with unitary efficiency and relatively simple fabrication requirements. Herein, two-dimensional (2D) metagratings composed of a 2D…
We introduce a wavelength-multiplexed massively parallel diffractive information storage platform composed of dielectric surfaces that are structurally optimized at the wavelength scale using deep learning to store and project thousands of…
Ptychography is a powerful imaging technique that is used in a variety of fields, including materials science, biology, and nanotechnology. However, the accuracy of the reconstructed ptychography image is highly dependent on the accuracy of…
Ptychography is a computational imaging technique that has risen in popularity in the x-ray and electron microscopy communities in the past half decade. One of the reasons for this success is the development of new high performance electron…
Mask-based pattern generation is a crucial step in microchip production. The next-generation extreme-ultraviolet- (EUV) lithography instruments with a wavelength of \SI{13.5}{\nano\meter} is currently under development. In principle, this…