Related papers: Design, fabrication and characterization of kineti…
When heated, micro-resonators present a shift of their resonance frequencies. We study specifically silicon cantilevers heated locally by laser absorption, and evaluate theoretically and experimentally their temperature profile and its…
We report on the design, fabrication, and implementation of ultrasensitive micromechanical oscillators. Our ultrathin single-crystal silicon cantilevers with integrated magnetic structures are the first of their kind: They are fabricated…
This paper presents a novel six-axis force/torque (F/T) sensor based on inductive sensing technology. Unlike conventional strain gauge-based sensors that require direct contact and external amplification, the proposed sensor utilizes…
A new technique was developed for studying the mechanical behavior of nano-scale thin metal films on substrate is presented. The test structure was designed on a novel "paddle" cantilever beam specimens with dimensions as few hundred…
We study the microwave impedance of extremely high aspect ratio (length/width ~ 5,000) superconducting niobium nitride nanowires. The nanowires are fabricated in a compact meander geometry that is in series with the center conductor of a 50…
We describe sensitive magnetometry using lumped-element resonators fabricated from a superconducting thin film of NbTiN. Taking advantage of the large kinetic inductance of the superconductor, we demonstrate a continuous resonance frequency…
An electro-mechanical setup for the measurement of AC-forces in a low-temperature tunnelling microscope has been developed, which enables extremely high force resolution. The crosstalk of vibrations onto the tunnelling current is used to…
Photo-induced forces can be used to manipulate and cool the mechanical motion of oscillators. When the oscillator is used as a force sensor, such as in atomic force microscopy, active feedback is an enticing route to enhancing measurement…
The discovery of van der Waals superconductors in recent years has generated a lot of excitement for their potentially novel pairing mechanisms. However, their typical atomic-scale thickness and micrometer-scale lateral dimensions impose…
We address, using concepts of the microscopic theory of superconductivity, parametric amplifiers and kinetic inductance detectors focusing on the interaction of microwave radiation with the superconducting condensate. This interaction was…
We propose a novel ultrasonic sensor structure composed of Cantilever arm structure slot dual-micro-ring resonators(DMRR).We present a theoretical analysis of transmission by using the coupled mode theory.The mode field distributions and…
A high sensitivity force sensor based on dielectric microspheres in vacuum, optically trapped by a single, upward-propagating laser beam, is described. Off-axis parabolic mirrors are used both to focus the 1064~nm trapping beam and to…
Properties of typical MEMS materials have been widely investigated. Mechanical properties of MEMS structures depend not only on the bulk material properties, but also structural factors. A measurement system has been made to measure…
Superconducting microresonators have been successfully utilized as detection elements for a wide variety of applications. With multiplexing factors exceeding 1,000 detectors per transmission line, they are the most scalable low-temperature…
We describe here the implementation of an interferometer-based microwave impedance microscope on a home-built tuning-fork based scanning probe microscope (SPM). Tuning-fork based SPMs, requiring only two electrical contacts for…
The small mass and high coherence of nanomechanical resonators render them the ultimate force probe, with applications ranging from biosensing and magnetic resonance force microscopy, to quantum optomechanics. A notorious challenge in these…
In recent years, self-assembled semiconductor nanowires have been successfully used as ultra-sensitive cantilevers in a number of unique scanning probe microscopy (SPM) settings. We describe the fabrication of ultra-low dissipation…
Superconducting nanowire single-photon detectors are central to applications across quantum information science. Yet, their performance is limited by the effects of disorder and electrodynamic inhomogeneities that are not well understood.…
The sensitivity of a mechanical transducer is ultimately limited by its inherent quantum fluctuations. Here, we use an optically levitated nanoparticle to measure impulsive forces smaller than the particle's zero-point momentum uncertainty.…
Electromechanical transduction gain of 21 dB is realized in a micro-cantilever resonant force sensor operated in the unresolved-sideband regime. Strain-dependent kinetic inductance weakly couples cantilever motion to a superconducting…