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The presence of amorphous oxide layers can significantly affect the coherent time of superconducting qubits due to their high dielectric loss. Typically, the surface oxides of superconductor films exhibit lossy and unstable behavior when…

Materials Science · Physics 2024-05-08 Zengqian Ding , Boyi zhou , Tao Wang , Lina Yang , Yanfu Wu , Xiao Cai , Kanglin Xiong , Jiagui Feng

The lifetime of superconducting qubits is limited by dielectric loss, and a major source of dielectric loss is the native oxide present at the surface of the superconducting metal. Specifically, tantalum-based superconducting qubits have…

Over the past decades, superconducting qubits have emerged as one of the leading hardware platforms for realizing a quantum processor. Consequently, researchers have made significant effort to understand the loss channels that limit the…

$\alpha$-Tantalum ($\alpha$-Ta) is an emerging material for superconducting qubit fabrication due to the low microwave loss of its stable native oxide. However, hydrogen absorption during fabrication, particularly when removing the native…

Tantalum (Ta) has emerged as a promising low-loss material, enabling record coherence times in superconducting qubits. This enhanced performance is largely attributed to its stable native oxide, which may host fewer two-level system (TLS)…

Tantalum-based transmon qubits are a promising platform for building large-scale quantum processors. So far, these qubits have been made from tantalum films grown exclusively in the alpha phase ({\alpha}-Ta). The beta phase of tantalum…

Superconducting qubits are a promising platform for large-scale quantum computing. Besides the Josephson junction, most parts of a superconducting qubit are made of planar, patterned superconducting thin films. In the past, most qubit…

Materials Science · Physics 2025-08-05 Moritz Singer , Benedikt Schoof , Harsh Gupta , Daniela Zahn , Johannes Weber , Marc Tornow

Utilizing tantalum (Ta) in superconducting circuits has led to significant improvements, such as high qubit lifetimes and quality factors in both qubits and resonators, underscoring the importance of material optimization in quantum device…

The unique property of tantalum (Ta), particularly its long coherent lifetime in superconducting qubits and its exceptional resistance to both acid and alkali, makes it promising for superconducting quantum processors. It is a notable…

Superconducting coplanar waveguide resonators are essential components in quantum processors, where their internal quality factor (Qi) constrains qubit coherence and readout fidelity. In niobium devices, microwave losses at millikelvin…

Quantum Physics · Physics 2026-04-13 Anas Alkhazaleh , Juan Villegas , Florent Ravaux , Alexey Zharinov

Tantalum is a promising platform for superconducting quantum circuits, yet coherence times remain limited by dielectric losses from interfacial two-level systems (TLS), exacerbated by native oxide regrowth. Here, we implement molecular…

We demonstrate a substantial reduction in two-level system loss in tantalum coplanar waveguide resonators fabricated on high-resistivity silicon substrates through the use of an ultrathin titanium sacrificial layer. A 0.2nm titanium film,…

We report the successful fabrication of superconducting tantalum nitride (TaN) thin films using a pulsed laser deposition technique with 1064 nm radiation. Films with thickness $ \sim $ 100 nm deposited on MgO (100) single crystals and on…

Superconductivity · Physics 2013-09-27 Saumyadip Chaudhuri , Lucie Chandernagor , Manu Lahtinen , Marion Ging , Ilari Maasilta

In the fabrication of superconducting devices, both in situ and ex situ processes are utilized, making the removal of unwanted oxide layers and impurities under vacuum conditions crucial. Oxygen descumming and argon milling are standard in…

Superconductivity · Physics 2025-04-15 Soroush Arabi , Qili Li , Ritika Dhundhwal , Dirk Fuchs , Thomas Reisinger , Ioan M. Pop , Wulf Wulfhekel

The growth of high-quality superconducting thin film on silicon substrates is essential for quantum computing, and low signal interconnects with industrial compatibility. Recently, the growth of $\alpha$-Ta (alpha-phase tantalum) thin films…

Developing new material platforms for use in superconductor-semiconductor hybrid structures is desirable due to limitations caused by intrinsic microwave losses present in commonly used III/V material systems. With the recent reports on…

Dielectric loss is one of the major decoherence sources of superconducting qubits. Contemporary high-coherence superconducting qubits are formed by material systems mostly consisting of superconducting films on substrate with low dielectric…

Dielectric loss at the interfaces of superconducting films has long been recognized as limiting the performance of state-of-the-art superconducting circuits. Notably, the presence of a native oxide layer on the film is hypothesized to…

Quantum Physics · Physics 2026-03-13 Yanhao Wang , Suhas Ganjam , Ishan Narra , Luigi Frunzio , Robert J. Schoelkopf

Tantalum (Ta) has recently received considerable attention in manufacturing robust superconducting quantum circuits. Ta offers low microwave loss, high kinetic inductance compared to aluminium (Al) and niobium (Nb), and good compatibility…

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