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The high critical magnetic field and relatively high critical temperature of niobium nitride (NbN) make it a promising material candidate for applications in superconducting quantum technology. However, NbN-based devices and circuits are…

Lithium Niobate is an electro-optic material with many applications in microwave signal processing, communication, quantum sensing, and quantum computing. In this letter, we present findings on evaluating the complex electromagnetic…

This work proposes a double-layer thin-film lithium niobate (LiNbO3) longitudinally excited shear wave resonator with a theoretical electromechanical coupling coefficient exceeding 60%, RaR close to 28%, and no spurious modes. This…

Applied Physics · Physics 2025-10-14 Zhen-Hui Qin , Shu-Mao Wu , Chen-Bei Hao , Hua-Yang Chen , Sheng-Nan Liang , Si-Yuan Yu , Yan-Feng Chen

In this work, we demonstrate a C-band shear-horizontal surface acoustic wave (SH-SAW) resonator with high electromechanical coupling (kt2) of 22% and a quality factor (Q) of 565 based on a thin-film lithium niobate (LN) on silicon carbide…

Signal Processing · Electrical Eng. & Systems 2024-08-06 Tzu-Hsuan Hsu , Joshua Campbell , Jack Kramer , Sinwoo Cho , Ming-Huang Li , Ruochen Lu

Advancing electromechanical resonators towards terahertz frequencies opens vast bandwidths for phononic signal processing. In quantum phononics, mechanical resonators at these frequencies can remain in their quantum ground state even at…

Applied Physics · Physics 2025-08-07 Jiacheng Xie , Weifeng Wu , Mohan Shen , Patrick Fay , Hong X. Tang

This work reports a 50.74 GHz lithium niobate (LiNbO3) acoustic resonator with a high quality factor (Q) of 237 and an electromechanical coupling (k2) of 5.17% resulting in a figure of merit (FoM, Q x k2) of 12.2. The LiNbO3 resonator…

Signal Processing · Electrical Eng. & Systems 2023-11-07 Jack Kramer , Vakhtang Chulukhadze , Kenny Huynh , Omar Barrera , Michael Liao , Sinwoo Cho , Lezli Matto , Mark S. Goorsky , Ruochen Lu

A hybrid device comprising a (Al)GaAs quantum dot heterostructure and a LiNbO$_3$ surface acoustic wave resonator is fabricated by heterointegration. High acoustic quality factors $Q>4000$ are demonstrated for an operation frequency…

Optics · Physics 2020-10-02 Emeline D. S. Nysten , Armando Rastelli , Hubert J. Krenner

Surface acoustic wave (SAW) resonators provide a compact platform for confining microwave-frequency phonons and are widely used in radio-frequency technologies, but their operation at gigahertz frequencies and cryogenic temperatures remains…

Mesoscale and Nanoscale Physics · Physics 2026-05-05 Aldo Tarascio , Oliver Wicki , Dominik M. Zumbühl

This paper reports a suspended thin-film lithium niobate (LN) piezoelectric resonator platform surviving high annealing temperatures of 550 {\deg}C, among the highest temperature at which the thermal resilience of suspended LN resonators is…

The need for high-temperature piezoelectric microelectromechanical systems (MEMS) requires pushing piezoelectric platforms to their thermal limits. In harsh thermal environments, piezoelectric MEMS devices are expected to sustain severe…

Lithium niobate (LN) exhibits unique material characteristics that have found many important applications. Scaling LN devices down to a nanoscopic scale can dramatically enhance light-matter interaction that would enable nonlinear and…

Optics · Physics 2017-06-29 Hanxiao Liang , Rui Luo , Yang He , Haowei Jiang , Qiang Lin

Wireless surface acoustic wave (SAW) sensors constitute a promising solution to some unsolved industrial sensing issues taking place at high temperatures. Currently, this technology enables wireless measurements up to 600-700$^\circ$C at…

The quantum excitations of macroscopic surface acoustic waves (SAWs) have been tailored to control, communicate and transduce stationary and flying quantum states. However, the limited lifetime of this hybrid quantum systems remains…

Quantum Physics · Physics 2023-07-26 Wenbing Jiang , Junfeng Chen , Xiaoyu Liu , Zhengqi Niu , Kuang Liu , Wei Peng , Zhen Wang , Zhi-Rong Lin

This paper is the first report of the high-temperature characteristics of a laterally vibrating piezoelectric lithium niobate (LiNbO$_{3}$) MEMS resonator array up to 500{\deg}C in air. After a high-temperature burn-in treatment, device…

We report the development of a superconducting acousto-optic phase modulator fabricated on a lithium niobate substrate. A titanium-diffused optical waveguide is placed in a surface acoustic wave resonator, where the electrodes for mirrors…

A major roadblock to scalable quantum computing is phase decoherence and energy relaxation caused by qubits interacting with defect-related two-level systems (TLS). Native oxides present on the surfaces of superconducting metals used in…

We report on fabrication of crystalline lithium niobate microresonators with quality factors above 10^7 as measured around 770 nm wavelength. Our technique relies on femtosecond laser micromachining for patterning a mask coated on the…

Applied Physics · Physics 2018-08-29 Rongbo Wu , Jianhao Zhang , Ni Yao , Wei Fang , Lingling Qiao , Zhifang Chai , Jintian Lin , Ya Cheng

Surface acoustic waves (SAWs), with their five orders-of-magnitude slower propagation velocity, allow for considerably shorter wavelengths at the same frequency compared to electromagnetic waves. The short wavelengths allow for device…

Lithium niobate is a multi-functional material, which has been regarded as one of the most promising platform for the multi-purpose optical components and photonic circuits. Targeting at the miniature optical components and systems, lithium…

Optics · Physics 2018-10-30 Bofeng Gao , Mengxin Ren , Wei Wu , Wei Cai , Hui Hu , Jingjun Xu

High-performance piezoelectric resonators are promising energy storage elements for piezoelectric power conversion due to their compact footprint and low loss at frequencies where conventional magnetic components become bulky and…

Systems and Control · Electrical Eng. & Systems 2026-04-13 Vakhtang Chulukhadze , Kristi Nguyen , Eric Stolt , Kilian Shambaugh , Weston Braun , Tzu-Hsuan Hsu , Osama Jameel , Juan Rivas-Davila , Ruochen Lu