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Related papers: Roadmap for focused ion beam technologies

200 papers

In this work, we combine two previously-incompatible techniques for defining electronic devices: shaping three-dimensional crystals by focused ion beam (FIB), and two-dimensional electrostatic accumulation of charge carriers. The principal…

Materials Science · Physics 2022-06-08 Evgeny Mikheev , Tino Zimmerling , Amelia Estry , Philip J. W. Moll , David Goldhaber-Gordon

The rise of nanotechnology has created an ever-increasing need to probe structures on the atomic scale, to which transmission electron microscopy has largely been the answer. Currently, the only way to efficiently thin arbitrary bulk…

Materials Science · Physics 2015-03-19 Eero Holmström , Jani Kotakoski , Lorenz Lechner , Ute Kaiser , Kai Nordlund

Modern nanotechnology techniques offer new opportunities for fabricating structures and devices at the micron and sub-micron level. Here, we use focused ion beam techniques to realize drift tube Zernike phase plates for electrons, whose…

Ion traps are used for a wide range of applications from metrology to quantum simulations and quantum information processing. Microfabricated chip-based 3D ion traps are scalable to store many ions for the realization of a large number of…

We report on two novel ways for patterning Lithium Niobate (LN) at submicronic scale by means of focused ion beam (FIB) bombardment. The first method consists of direct FIB milling on LiNbO3 and the second one is a combination of FIB…

Optics · Physics 2008-01-29 F. Lacour , N. Courjal , M. P. Bernal , A. Sabac , C. Bainier , M. Spajer

Large-area nanopore drilling is a major bottleneck in state-of-the-art nanoporous 2D membrane fabrication protocols. In addition, high-quality structural and statistical descriptions of as-fabricated porous membranes are key to predicting…

In this Letter, we present the patterning, exfoliation and micromanipulation of thin graphitic discs which are subsequently connected and patterned into sub-100nm wide ribbons with a resist-free process using Focused Ion Beam (FIB)…

Electron beam lithography is a standard method for fabricating photonic nanostructures around semiconductor quantum dots (QDs), which are crucial for efficient single and indistinguishable photon sources in quantum information processing.…

We studied the influence of 30keV Ga$^+$-ions -- commonly used in focused ion beam (FIB) devices -- on the transport properties of thin crystalline graphite flake, La$_{0.7}$Ca$_{0.3}$MnO$_3$ and Co thin films. The changes of the electrical…

Materials Science · Physics 2015-05-18 J. Barzola-Quiquia , S. Dusari , G. Bridoux , F. Bern , A. Molle , P. Esquinazi

In the present work we report about a parallel-processing ion beam fabrication technique whereby high-density sub-superficial graphitic microstructures can be created in diamond. Ion beam implantation is an effective tool for the structural…

Electron beam-induced current (EBIC) imaging in the scanning transmission electron microscope (STEM), STEM-EBIC, provides direct access to carrier transport at the nanoscale. While well established in bulk SEM geometries, its application to…

Mesoscale and Nanoscale Physics · Physics 2025-11-17 Sebastian Schneider , Sebastian Beckert , René Hammer , Markus König , Grigore Moldovan , Darius Pohl

The focused helium ion beam microscope is a versatile imaging and nanofabrication instrument enabling direct-write lithography with sub-10-nm resolution. Subsurface damage and swelling of substrates due to helium ion implantation is…

Applied Physics · Physics 2024-10-08 Sherry Mo , Dana O. Byrne , Frances I. Allen

Two-dimensional (2D) transition metal dichalcogenides are pivotal for next-generation photonic devices due to their exceptional optical properties and strong light-matter interactions. However, their atomic thinness renders them susceptible…

Focused electron beam induced deposition (FEBID) is a powerful technique for 3D-printing of complex nanodevices. However, for resolutions below 10 nm, it struggles to control size, morphology and composition of the structures, due to a lack…

Intense Highly Charged Ion Beams (HCIB) from injector and charge-breeder ion sources at heavy ion accelerator facilities are in demand to expand research in particle and nuclear physics as well as for radiation effects testing. With current…

Accelerator Physics · Physics 2022-05-26 Alain Lapierre , Janilee Benitez , Masahiro Okamura , Damon Todd , Daniel Xie , Yine Sun

The long coherence times and strong Coulomb interactions afforded by trapped ion qubits have enabled realizations of the necessary primitives for quantum information processing (QIP), and indeed the highest-fidelity quantum operations in…

This handook is intended as a resource for scientists who use Ion Beam Analysis (IBA), to help them understand and minimise beam damage induced during the analysis. The basic physics of ion-matter interactions, from the perspectve of damage…

Materials Science · Physics 2013-03-14 D. Benzeggouta , I. Vickridge

We present the design and fabrication of nanobeam photonic crystal cavities in single crystal diamond for applications in cavity quantum electrodynamics. First, we describe three-dimensional finite-difference time-domain simulations of a…

Quantum Physics · Physics 2015-05-19 T. M. Babinec , J. T. Choy , K. J. M. Smith , M. Khan , M. Loncar

Ion traps offer the opportunity to study fundamental quantum systems with high level of accuracy highly decoupled from the environment. Individual atomic ions can be controlled and manipulated with electric fields, cooled to the ground…

Quantum Physics · Physics 2015-05-27 Marcus D. Hughes , Bjoern Lekitsch , Jiddu A. Broersma , Winfried K. Hensinger

The Ion Beam Induced Charge (IBIC) technique is widely used to characterize the electronic properties of semiconductor materials and devices. Its main advantage over other charge collection microscopies stems in the use of MeV ion probes,…