Related papers: High Density Fabrication Process for Single Flux Q…
We have developed a fabrication technology for the development of large-scale superconducting integrated circuits with Nb-based Josephson junctions. The standard fabrication process with 10 mask levels uses four metal layers including 3 Nb…
The most commonly used physical realization of superconducting qubits for quantum circuits is a transmon. There are a number of superconducting quantum circuits applications, where Josephson junction critical current reproducibility over a…
We introduce a simplified fabrication technique for Josephson junctions and demonstrate superconducting Xmon qubits with $T_1$ relaxation times averaging above 50$~\mu$s ($Q>$1.5$\times$ 10$^6$). Current shadow-evaporation techniques for…
Single-Flux Quantum (SFQ) digital logic is typically energy efficient and fast, and logic that uses ballistic and reversible principles provides a new platform to improve efficiency. We are studying long Josephson junctions (long JJs), SFQs…
Fluxonium qubits are recognized for their high coherence times and high operation fidelities, attributed to their unique design incorporating a superinductor, which is typically implemented using an array of over 100 Josephson junctions.…
Recent progress in superconductor electronics fabrication has enabled single-flux-quantum (SFQ) digital circuits with close to one million Josephson junctions (JJs) on 1-cm$^2$ chips. Increasing the integration scale further is challenging…
As the superconducting qubit platform matures towards ever-larger scales in the race towards a practical quantum computer, limitations due to qubit inhomogeneity through lack of process control become apparent. To benefit from the advanced…
In order to integrate superconducting qubits with rapid-single-flux-quantum (RSFQ) control circuitry, it is necessary to develop a fabrication process that fulfills at the same time the requirements of both elements: low critical current…
We review the salient features of two advanced nodes of an 8-Nb-layer fully planarized process developed recently at MIT Lincoln Laboratory for fabricating Single Flux Quantum(SFQ) digital circuits with very large scale integration on…
For high-performance superconducting quantum devices based on Josephson junctions (JJs) decreasing lateral sizes is of great importance. Fabrication of sub-\mu m JJs is challenging due to non-flat surfaces with step heights of up to several…
Josephson superconducting qubits and parametric amplifiers are prominent examples of superconducting quantum circuits that have shown rapid progress in recent years. With the growing complexity of such devices, the requirements for…
A new fabrication process for superconducting integrated digital circuits is reported. We have developed the "SIMIT Nb04" fabrication technique for superconducting integrated circuits with Nb-based Josephson junctions based on the validated…
Superconductor digital electronics using Josephson junctions as ultrafast switches and magnetic-flux encoding of information was proposed over 30 years ago as a sub-terahertz clock frequency alternative to semiconductor electronics based on…
Josephson junctions form the essential non-linearity for almost all superconducting qubits. The junction is formed when two superconducting electrodes come within $\sim$1 nm of each other. Although the capacitance of these electrodes is a…
Josephson junction circuits, such as superconducting quantum interference devices (SQUIDs) and single-flux-quantum (SFQ) circuits, have been applied in both analog and digital systems for their ultralow-noise, high-speed, and…
It has been suggested that Rapid Single Flux Quantum (RSFQ) devices could be used as the classical interface of superconducting qubit systems. One problem is that the interface acts as a dissipative environment for a qubit. Recently ways to…
Josephson junctions form the core circuit element in superconducting quantum computing circuits, single flux quantum digital logic circuits, and sensing devices such as SQUIDs. Aluminum oxide has typically been used as the tunnel barrier.…
Compared to traditional semiconductor control electronics (TSCE) located at room temperature, cryogenic single flux quantum (SFQ) electronics can provide qubit measurement and control alternatives that address critical issues related to…
Quantum bits, or qubits, are an example of coherent circuits envisioned for next-generation computers and detectors. A robust superconducting qubit with a coherent lifetime of $O$(100 $\mu$s) is the transmon: a Josephson junction…
As quantum computing processors increase in size, there is growing interest in developing cryogenic electronics to overcome significant challenges to system scaling. Single flux-quantum (SFQ) circuits offer a promising alternative to…