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The performance of superconducting circuits for quantum computing is limited by materials losses. In particular, coherence times are typically bounded by two-level system (TLS) losses at single photon powers and millikelvin temperatures.…

Millimeter-wave superconducting resonators are a useful tool for studying quantum device coherence in a new frequency domain. However, improving resonators is difficult without a robust and reliable method for coupling millimeter-wave…

We systematically investigate the influence of the fabrication process on dielectric loss in aluminum-on-silicon superconducting coplanar waveguide resonators with internal quality factors ($Q_i$) of about one million at the single-photon…

Superconducting qubits are a leading system for realizing large scale quantum processors, but overall gate fidelities suffer from coherence times limited by microwave dielectric loss. Recently discovered tantalum-based qubits exhibit record…

The loss in superconducting microwave resonators at low-photon number and low temperatures is not well understood but has implications for achievable coherence times in superconducting qubits. We have fabricated single-layer resonators with…

Superconductivity · Physics 2015-05-19 Moe S. Khalil , F. C. Wellstood , Kevin D. Osborn

Improving the performance of superconducting qubits and resonators generally results from a combination of materials and fabrication process improvements and design modifications that reduce device sensitivity to residual losses. One…

A semi-analytical study of the acoustic radiation losses associated with various transverse vibration modes of a micromechanical (MEMS) annular resonator is presented. The quality factor, Q, of such resonators is of interest in many…

Fluid Dynamics · Physics 2012-06-04 Santhosh D. Vishwakarma , A. K. Pandey , J. M. Parpia , R. Pratap

Scalable architectures characterized by quantum bits (qubits) with low error rates are essential to the development of a practical quantum computer. In the superconducting quantum computing implementation, understanding and minimizing…

Research on diamond has intensified due to its exceptional thermal, optical, and mechanical properties, making it a key material in quantum technologies and high-power applications. Diamonds with engineered nitrogen-vacancy (NV) centers…

Materials Science · Physics 2025-12-04 Francesco Mazzocchi , Martin Neidig , Hideaki Yamada , Sebastian Kempf , Dirk Strauss , Theo Scherer

The need for semiconductor technology for crystalline silicon of the highest purity and homogeneity has provided samples exhibiting low optical absorption in the infrared range. Such silicon has become the basis for photonic elements in the…

Dielectric losses are one of the key factors limiting the coherence of superconducting qubits. The impact of materials and fabrication steps on dielectric losses can be evaluated using coplanar waveguide (CPW) microwave resonators. Here, we…

We present microwave-frequency NbTiN resonators on silicon, systematically achieving internal quality factors above 1 M in the quantum regime. We use two techniques to reduce losses associated with two-level systems: an additional substrate…

Superconductivity · Physics 2015-07-15 A. Bruno , G. de Lange , S. Asaad , K. L. van der Enden , N. K. Langford , L. DiCarlo

Low-loss waveguides are required for quantum communication at distances beyond the chip-scale for any low-temperature solid-state implementation of quantum information processors. We measure and analyze the attenuation constant of…

Mesoscale and Nanoscale Physics · Physics 2018-03-30 P. Kurpiers , T. Walter , P. Magnard , Y. Salathe , A. Wallraff

We have investigated the correlation between the microwave loss and patterning method for coplanar waveguide titanium nitride resonators fabricated on Si wafers. Three different methods were investigated: fluorine- and chlorine-based…

We perform an experimental and numerical study of dielectric loss in superconducting microwave resonators at low temperature. Dielectric loss, due to two-level systems, is a limiting factor in several applications, e.g. superconducting…

Applied Physics · Physics 2020-01-29 David Niepce , Jonathan Burnett , Martí Gutierrez Latorre , Jonas Bylander

Superconducting microwave cavities have found applications in many areas including quantum computing, particle accelerators, and dark matter searches. Their extremely high quality factors translate to very narrow bandwidth, which makes them…

Superconductivity · Physics 2025-05-01 J. C. Esmenda , E. A. Laird , I. Bailey , N. Du , S. Durham , G. Carosi , T. Gamble , P. Smith , E. Daw , Y. A. Pashkin

We present a lab-on-chip experiment to accurately measure losses of superconducting microstrip lines at microwave and sub-mm wavelengths. The microstrips are fabricated from NbTiN, which is deposited using reactive magnetron sputtering, and…

Instrumentation and Detectors · Physics 2021-08-26 S. Hähnle , K. Kouwenhoven , B. Buijtendorp , A. Endo , K. Karatsu , D. J. Thoen , V. Murugesan , J. J. A. Baselmans

The investigation of two-level-state (TLS) loss in dielectric materials and interfaces remains at the forefront of materials research in superconducting quantum circuits. We demonstrate a method of TLS loss extraction of a thin film…

Quantum Physics · Physics 2020-06-24 C. R. H. McRae , R. E. Lake , J. L. Long , M. Bal , X. Wu , B. Jugdersuren , T. H. Metcalf , X. Liu , D. P. Pappas

We report on the characterization of microwave loss of thin aluminum oxide films at low temperatures using superconducting lumped resonators. The oxide films are fabricated using plasma oxidation of aluminum and have a thickness of 5 nm. We…

Mesoscale and Nanoscale Physics · Physics 2014-02-24 Chunqing Deng , Martin Otto , Adrian Lupascu

Material research is a key frontier in advancing superconducting qubit and circuit performance. In this work, we develop a simple and broadly applicable framework for accurately characterizing two-level system (TLS) loss using internal…

Superconductivity · Physics 2025-07-17 Guy Moshel , Sergei Masis , Moshe Schechter , Shay Hacohen-Gourgy
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