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Nowadays, modern electron microscopes deliver images at atomic scale. The precise atomic structure encodes information about material properties. Thus, an important ingredient in the image analysis is to locate the centers of the atoms…

Computer Vision and Pattern Recognition · Computer Science 2017-09-13 Benjamin Berkels , Benedikt Wirth

Transmission electron microscope (TEM) images are often corrupted by noise, hindering their interpretation. To address this issue, we propose a deep learning-based approach using simulated images. Using density functional theory…

Materials Science · Physics 2025-01-22 Jinwoong Chae , Sungwook Hong , Sungkyu Kim , Sungroh Yoon , Gunn Kim

Scanning transmission electron microscopy (STEM) has become the technique of choice for quantitative characterization of atomic structure of materials, where the minute displacements of atomic columns from high-symmetry positions can be…

Materials Science · Physics 2021-10-05 Kevin M. Roccapriore , Nicole Creange , Maxim Ziatdinov , Sergei V. Kalinin

Recording atomic-resolution transmission electron microscopy (TEM) images is becoming increasingly routine. A new bottleneck is then analyzing this information, which often involves time-consuming manual structural identification. We have…

Low-electron-dose observation is indispensable for observing various samples using a transmission electron microscope; consequently, image processing has been used to improve transmission electron microscopy (TEM) images. To apply such…

Image and Video Processing · Electrical Eng. & Systems 2022-03-02 Hiroyasu Katsuno , Yuki Kimura , Tomoya Yamazaki , Ichigaku Takigawa

Motivation: Serial section microscopy is an established method for detailed anatomy reconstruction of biological specimen. During the last decade, high resolution electron microscopy (EM) of serial sections has become the de-facto standard…

Computer Vision and Pattern Recognition · Computer Science 2016-06-20 Philipp Hanslovsky , John A. Bogovic , Stephan Saalfeld

We report resolution enhancement in scanning electron microscopy (SEM) images using a generative adversarial network. We demonstrate the veracity of this deep learning-based super-resolution technique by inferring unresolved features in…

Computer Vision and Pattern Recognition · Computer Science 2019-08-21 Kevin de Haan , Zachary S. Ballard , Yair Rivenson , Yichen Wu , Aydogan Ozcan

Deep learning has demonstrated superb efficacy in processing imaging data, yet its suitability in solving challenging inverse problems in scientific imaging has not been fully explored. Of immense interest is the determination of local…

Materials Science · Physics 2019-02-20 Nouamane Laanait , Qian He , Albina Y. Borisevich

We demonstrate a multi-beam scanning transmission electron microscopy (STEM) imaging that integrates down-sampling with super-resolution image reconstruction via a compressive sensing framework. A custom condenser aperture with six randomly…

Instrumentation and Detectors · Physics 2026-03-19 Akira Yasuhara , Takumi Sannomiya , Ryoichi Horisaki

Atomic resolution imaging in transmission electron microscopy (TEM) and scanning TEM (STEM) of light elements in electron-transparent materials has long been a challenge. Biomolecular materials, for example, are rapidly altered when…

Instrumentation and Detectors · Physics 2018-12-05 Fehmi S. Yasin , Tyler R. Harvey , Jordan J. Chess , Jordan S. Pierce , Colin Ophus , Peter Ercius , Benjamin J. McMorran

A deep convolutional neural network has been developed to denoise atomic-resolution TEM image datasets of nanoparticles acquired using direct electron counting detectors, for applications where the image signal is severely limited by shot…

A growing need exists for efficient and accurate methods for detecting defects in semiconductor materials and devices. These defects can have a detrimental impact on the efficiency of the manufacturing process, because they cause critical…

Computer Vision and Pattern Recognition · Computer Science 2023-08-21 Thibault Lechien , Enrique Dehaerne , Bappaditya Dey , Victor Blanco , Sandip Halder , Stefan De Gendt , Wannes Meert

Scanning electron microscopy (SEM) is indispensable in diverse applications ranging from microelectronics to food processing because it provides large depth-of-field images with a resolution beyond the optical diffraction limit. However,…

Curvilinear structures frequently appear in microscopy imaging as the object of interest. Crystallographic defects, i.e., dislocations, are one of the curvilinear structures that have been repeatedly investigated under transmission electron…

Image and Video Processing · Electrical Eng. & Systems 2021-10-19 Okan Altingövde , Anastasiia Mishchuk , Gulnaz Ganeeva , Emad Oveisi , Cecile Hebert , Pascal Fua

Over the last decade, scanning transmission electron microscopy (STEM) has emerged as a powerful tool for probing atomic structures of complex materials with picometer precision, opening the pathway toward exploring ferroelectric,…

Data Analysis, Statistics and Probability · Physics 2021-12-23 Ayana Ghosh , Christopher T. Nelson , Mark Oxley , Xiaohang Zhang , Maxim Ziatdinov , Ichiro Takeuchi , Sergei V. Kalinin

With the rapid growth in the semiconductor industry, it is becoming critical to detect and classify increasingly smaller patterned defects. Recently machine learning, including deep learning, has come to aid in this endeavor in a big way.…

Mesoscale and Nanoscale Physics · Physics 2022-11-24 Ravikiran Attota

In this article, a new scanning electron microscopy (SEM) image composition technique is described, which can significantly reduce drift related image corruptions. Drift-distortion commonly causes blur and distortions in the SEM images.…

Instrumentation and Detectors · Physics 2010-08-09 Petr Cizmar , Andras E. Vladar , Michael T. Postek

Denoising is a fundamental challenge in scientific imaging. Deep convolutional neural networks (CNNs) provide the current state of the art in denoising natural images, where they produce impressive results. However, their potential has…

Computer Vision and Pattern Recognition · Computer Science 2024-11-05 Sreyas Mohan , Ramon Manzorro , Joshua L. Vincent , Binh Tang , Dev Yashpal Sheth , Eero P. Simoncelli , David S. Matteson , Peter A. Crozier , Carlos Fernandez-Granda

Understanding the relationship between atomic structure (order) and chemical composition (chemistry) is critical for advancing materials science, yet traditional spectroscopic techniques can be slow and damaging to sensitive samples.…

Materials Science · Physics 2025-08-29 Mridul Kumar , Yevgeny Rakita

Atom segmentation and localization, noise reduction and deblurring of atomic-resolution scanning transmission electron microscopy (STEM) images with high precision and robustness is a challenging task. Although several conventional…

Materials Science · Physics 2021-02-23 Ruoqian Lin , Rui Zhang , Chunyang Wang , Xiao-Qing Yang , Huolin L. Xin
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