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One of the challenges of nanoelectromechanical systems (NEMS) is the effective transduction of the tiny resonators. Vertical structures, such as nanomechanical pillar resonators, which are exploited in a wide range of fields, such as…

We describe the application of nanoelectromechanical systems (NEMS) to ultrasensitive mass detection. In these experiments, a modulated flux of atoms was adsorbed upon the surface of a 32.8 MHz NEMS resonator within an ultrahigh vacuum…

Other Condensed Matter · Physics 2009-11-10 K. L. Ekinci , X. M. H. Huang , M. L. Roukes

One of the main challenges to overcome to perform nanomechanical Mass Spectrometry (NEMS-MS) analysis in a practical time frame stems from the size mismatch between the analyte beam and the extremely small nanomechanical detector area. We…

Weighing particles above MegaDalton mass range has been a persistent challenge in commercial mass spectrometry. Recently, nanoelectromechanical systems-based mass spectrometry (NEMS-MS) has shown remarkable performance in this mass range,…

Applied Physics · Physics 2023-06-26 Batuhan E. Kaynak , Mohammed Alkhaled , Enise Kartal , Cenk Yanik , M. Selim Hanay

Nanoelectromechanical Systems (NEMS) have emerged as a promising technology for performing the mass spectrometry of large biomolecules and nanoparticles. As nanoscale objects land on NEMS sensor one by one, they induce resolvable shifts in…

Mesoscale and Nanoscale Physics · Physics 2019-07-24 Mert Yuksel , Ezgi Orhan , Cenk Yanik , Atakan B. Ari , Alper Demir , M. Selim Hanay

Nanoelectromechanical systems (NEMS) have generated considerable interest as inertial mass sensors. NEMS resonators have been used to weigh cells, biomolecules, and gas molecules, creating many new possibilities for biological and chemical…

Mesoscale and Nanoscale Physics · Physics 2012-04-13 J. Chaste , A. Eichler , J. Moser , G. Ceballos , R. Rurali , A. Bachtold

Nanomechanical spectroscopy (NMS) is a recently developed approach to determine optical absorption spectra of nanoscale materials via mechanical measurements. It is based on measuring changes in the resonance frequency of a membrane…

Nanomechanical resonators with increasingly high quality factors are enabled following recent insights into energy storage and loss mechanisms in nanoelectromechanical systems (NEMS). Consequently, efficient, non-dissipative transduction…

Mesoscale and Nanoscale Physics · Physics 2012-04-11 Thomas Faust , Peter Krenn , Stephan Manus , Jörg P. Kotthaus , Eva M. Weig

Surface acoustic waves (SAWs) coupled to magnons have attracted much attention because they allow for the long-range transport of magnetic information which cannot be achieved by magnon alone. We employed pulsed laser interferometry to…

Materials Science · Physics 2024-04-30 Kazuki Maezawa , Shun Fujii , Kazuto Yamanoi , Yukio Nozaki , Shinichi Watanabe

Mass spectrometry of intact nanoparticles and viruses can serve as a potent characterization tool for material science and biophysics. Inaccessible by widespread commercial techniques, the mass of single nanoparticles and viruses (>10MDa)…

Surface acoustic waves (SAWs), with their five orders-of-magnitude slower propagation velocity, allow for considerably shorter wavelengths at the same frequency compared to electromagnetic waves. The short wavelengths allow for device…

Nanoelectromechanical systems, or NEMS, are MEMS scaled to submicron dimensions. In this size regime, it is possible to attain extremely high fundamental frequencies while simultaneously preserving very high mechanical responsivity (small…

Mesoscale and Nanoscale Physics · Physics 2007-05-23 M. L. Roukes

The coupling of micro- or nanomechanical resonators via a shared substrate is intensively exploited to built systems for fundamental studies and practical applications. So far, the focus has been on devices operating in the kHz regime with…

Applied Physics · Physics 2021-08-30 Hendrik Kähler , Daniel Platz , Silvan Schmid

Established techniques for characterizing a layer on a substrate system via surface acoustic wave (SAW) dispersion measurement are often slow due to the need for scanning excitation or detection positions. We present a method for…

Surface acoustic waves (SAWs) are a versatile tool for coherently interfacing with a variety of solid-state quantum systems spanning microwave to optical frequencies, including superconducting qubits, spins, and quantum emitters. Here, we…

Nanoelectromechanical systems (NEMS) are nano-to-micrometer scale mechanical resonators coupled to electronic devices of similar dimensions. NEMS show promise for fast, ultrasensitive force microscopy and for deepening our understanding of…

Mesoscale and Nanoscale Physics · Physics 2015-06-25 M. P. Blencowe

The rising need for hybrid physical platforms has triggered a renewed interest for the development of agile radio-frequency phononic circuits with complex functionalities. The combination of travelling waves with resonant mechanical…

Implementing microelectromechanical system (MEMS) resonators calls for detailed microscopic understanding of the devices, such as energy dissipation channels, spurious modes, and imperfections from microfabrication. Here, we report the…

Applied Physics · Physics 2023-03-22 Daehun Lee , Shahin Jahanbani , Jack Kramer , Ruochen Lu , Keji Lai

In the same way that micro-mechanical resonators resemble guitar strings and drums, Surface Acoustic Waves (SAW) resemble the sound these instruments produce, but moving over a solid surface rather than through air. In contrast with…

Mesoscale and Nanoscale Physics · Physics 2013-03-19 Martin Gustafsson , Paulo V. Santos , Göran Johansson , Per Delsing

Elastic waves propagating in piezoelectric materials are accompanied by a time-varying electric potential, which is of critical importance for acousto-electronic applications. The spatial mapping of such a potential at microwave frequencies…

Mesoscale and Nanoscale Physics · Physics 2018-06-25 Lu Zheng , Di Wu , Xiaoyu Wu , Keji Lai
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