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Micro/Nano-positioning stages are of great importance in a wide range of manufacturing machines and instruments. In recent years, the drastically growing demand for higher throughput and reduced power consumption in various IC manufacturing…
Precision motion stages are an essential part of a wide range of manufacturing equipment, and their motion performance are critical to the quality and throughput of the systems. The drastically increasing demand for higher manufacturing…
Precision motion stages play a critical role in various manufacturing and inspection equipment, for example, the wafer/reticle scanning in photolithography scanners and positioning stages in wafer inspection systems. To meet the growing…
Growing demands in the semiconductor industry necessitate increasingly stringent requirements on throughput and positioning accuracy of lithographic equipment. Meeting these demands involves employing highly aggressive motion profiles,…
Motion systems are a vital part of many industrial processes. However, meeting the increasingly stringent demands of these systems, especially concerning precision and throughput, requires novel control design methods that can go beyond the…
A new method for the design of linear-phase robust far-field broadband beamformers using constrained optimization is proposed. In the method, the maximum passband ripple and minimum stopband attenuation are ensured to be within prescribed…
Increasingly stringent throughput requirements in the industry necessitate the need for lightweight design of high-precision motion systems to allow for high accelerations, while still achieving accurate positioning of the moving-body. The…
Precision motion systems are at the core of various manufacturing equipment. The rapidly increasing demand for higher productivity necessitates higher control bandwidth in the motion systems to effectively reject disturbances while…
Variable impedance control is advantageous for physical human-robot interaction to improve safety, adaptability and many other aspects. This paper presents a gain-scheduled variable stiffness control approach under strict frequency-domain…
Current-mode control is one of the most popular controller strategies for power converters. With the advent of wide bandgap devices including GaN and SiC, higher switching frequencies have become more viable at higher power because of lower…
Despite the success of model predictive control (MPC), its application to high-dimensional systems, such as flexible structures and coupled fluid/rigid-body systems, remains a largely open challenge due to excessive computational…
We present a real-time-capable set-based framework for closed-loop predictive control of autonomous systems using tools from computational geometry, dynamic programming, and convex optimization. The control architecture relies on the…
To obtain precise motion control of wafer stages, an adaptive neural network and fractional-order super-twisting control strategy is proposed. Based on sliding mode control (SMC), the proposed controller aims to address two challenges in…
Control Co-Design (CCD) considers the coupled effects of both the plant and control parameters to optimize a system's closed-loop transient performance during the design stage. This paper presents a new method for CCD with guarantees on…
Large amplitude vibrations can cause hazards and failure to engineering structures. Active control has been an effective strategy to suppress vibrations, but it faces great challenges in the real-time control of nonlinear flexible…
This study presents a shaped reset feedback control strategy to enhance the performance of precision motion systems. The approach utilizes a phase-lead compensator as a shaping filter to tune the phase of reset instants, thereby shaping the…
In controlling systems with large operating envelopes, it is often necessary to adjust the desired dynamics according to operating conditions. This paper presents a robust adaptive control architecture for linear parameter-varying (LPV)…
Impedance control and specifically stiffness control are widely applied for physical human-robot interaction. The series elastic actuator (SEA) provides inherent compliance, safety and further benefits. This paper aims to improve the…
We develop an adaptive control architecture to achieve stabilization and command following of uncertain dynamical systems with improved transient performance. Our framework consists of a new reference system and an adaptive controller. The…
Modern cyber-physical systems, such as automotive control, rely on feedback controllers that regulate the system towards desired a setpoint. In practice, however, the controller must also be scheduled efficiently on resource-constrained…