Related papers: Improving Josephson junction reproducibility for s…
We investigate a photolithography-only fabrication process for transmon Josephson junctions using a modified double-oblique evaporation geometry. Using a bilayer resist process and Al shadow evaporation, we fabricate junction structures and…
An application-specific Josephson generator is being developed as an on-chip calibration source for single-microwave-photon detectors operating below $T \sim $100 mK in the frequency range from 110 to 170 GHz. The targeted calibration power…
We have developed a fabrication technology for the development of large-scale superconducting integrated circuits with Nb-based Josephson junctions. The standard fabrication process with 10 mask levels uses four metal layers including 3 Nb…
Aluminum-based Josephson junctions are currently the main sources of nonlinearity for control and manipulation of superconducting qubits. A phase-slip junction, the dual of a Josephson junction, provides an alternative source of…
For high-performance superconducting quantum devices based on Josephson junctions (JJs) decreasing lateral sizes is of great importance. Fabrication of sub-\mu m JJs is challenging due to non-flat surfaces with step heights of up to several…
The microwave-driven dynamics of the superconducting phase difference across a Josephson junction is now widely employed in superconducting qubits and quantum circuits. With the typical energy level separation frequency of several GHz,…
In this work, we briefly overview various options for Josephson junctions which should be scalable down to nanometer range for utilization in nanoscale digital superconducting technology. Such junctions should possess high values of…
We introduce a novel method for fabricating all-aluminum Josephson junctions with highly transmitted conduction channels. Such properties are typically associated with structures requiring intricate fabrication processes, such as atomic…
As quantum processors scale to large qubit numbers, device-to-device variability emerges as a critical challenge. Superconducting qubits are commonly realized using Al/AlO$_{\text{x}}$/Al Josephson junctions operating in the tunneling…
Josephson junction transistors and 50-junction arrays with linear junction dimensions from 200 nm down to 70 nm were fabricated from standard Nb/AlOx/Nb trilayers. The fabrication process includes electron beam lithography, dry etching,…
We report the design and test of Reciprocal Quantum Logic shift-register yield vehicles consisting of up to 72,800 Josephson junction devices per die, the largest digital superconducting circuits ever reported. Multiple physical layout…
Josephson junctions (JJs) are the key element of many devices operating at cryogenic temperatures. Development of time-efficient wafer-scale JJ characterization for process optimization and control of JJ fabrication is essential. Such…
The performance of various superconducting devices operating at ultra-low temperatures is impaired by the presence of non-equilibrium quasiparticles. Inelastic quasiparticle (QP) tunneling across Josephson junctions in superconducting…
We characterize highly coherent transmon qubits fabricated with a direct-write photolithography system. Multi-layer evaporation and oxidation allows us to change the critical current density by reducing the effective tunneling area and…
We present measurements of 1/f frequency noise in both linear and Josephson-junction-embedded superconducting aluminum resonators in the low power, low temperature regime - typical operating conditions for superconducting qubits. The…
Designing the spatial profile of the superconducting gap -- gap engineering -- has long been recognized as an effective way of controlling quasiparticles in superconducting devices. In aluminum films, their thickness modulates the gap;…
We present a method for fabricating Josephson junctions and superconducting quantum interference devices (SQUIDs) which is based on the local anodization of niobium strip lines 3 to 6.5 nm-thick under the voltage-biased tip of an Atomic…
We investigated current-voltage characteristics of unshunted and externally shunted Josephson junctions (JJs) with high critical current densities, Jc, in order to extract their basic parameters and statistical characteristics for JJ…
Josephson tunnel junctions are widely used as nonlinear elements in superconducting circuits such as low noise amplifiers and quantum bits. However, microscopic defects in the oxide tunnel barrier can produce low and high frequency noise…
Establishment of phase-coherence and a non-dissipative (super)current between two weakly coupled superconductors, known as the Josephson effect, plays a foundational role in basic physics and applications to metrology, precision sensing,…