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We demonstrate a multi-beam scanning transmission electron microscopy (STEM) imaging that integrates down-sampling with super-resolution image reconstruction via a compressive sensing framework. A custom condenser aperture with six randomly…

Instrumentation and Detectors · Physics 2026-03-19 Akira Yasuhara , Takumi Sannomiya , Ryoichi Horisaki

Extracting high-fidelity 2D contours from Scanning Electron Microscope (SEM) images is critical for calibrating Optical Proximity Correction (OPC) models. While foundation models like Segment Anything 2 (SAM2) are promising, adapting them…

Hardware Architecture · Computer Science 2026-04-21 Da Chen , Guangyu Hu , Kaihong Xu , Kaichao Liang , Songjiang Li , Wei Yang , XiangYu Wen , Mingxuan Yuan

The achievable instrumental performance of a scanning transmission electron microscope (STEM) is determined by the size and shape of the incident electron probe. The most important optical factor in achieving the optimum probe profile is…

Materials Science · Physics 2020-09-01 Matthew Weyland , David A. Muller

Electron tomography has been studied in various fields. Various methods have been developed to align projection sets to construct ideally focused reconstruction. In this paper, we present how to align the projection set to distinguish…

Medical Physics · Physics 2017-06-14 Dongwook Kim , Kyungtaek Jun

Image-level weakly supervised semantic segmentation is a challenging problem that has been deeply studied in recent years. Most of advanced solutions exploit class activation map (CAM). However, CAMs can hardly serve as the object mask due…

Computer Vision and Pattern Recognition · Computer Science 2020-04-10 Yude Wang , Jie Zhang , Meina Kan , Shiguang Shan , Xilin Chen

Scanning electron microscopy (SEM), a century-old technique, is today a ubiquitous method of imaging the surface of nanostructures. However, most SEM detectors simply count the number of secondary electrons from a material of interest, and…

We develop new efficient online algorithms for detecting transient sparse signals in TEM video sequences, by adopting the recently developed framework for sequential detection jointly with online convex optimization [1]. We cast the problem…

Applications · Statistics 2017-11-01 Y. Cao , S. Zhu , Y. Xie , J. Key , J. Kacher , R. R. Unocic , C. M. Rouleau

The scanning electron microscope (SEM) produces an image of a sample by scanning it with a focused beam of electrons. The electrons interact with the atoms in the sample, which emit secondary electrons that contain information about the…

Computer Vision and Pattern Recognition · Computer Science 2017-09-08 Shahar Tsiper , Or Dicker , Idan Kaizerman , Zeev Zohar , Mordechai Segev , Yonina C. Eldar

Scanning Transmission Electron Microscopy (STEM) offers high-resolution images that are used to quantify the nanoscale atomic structure and composition of materials and biological specimens. In many cases, however, the resolution is limited…

Signal Processing · Electrical Eng. & Systems 2021-12-23 Daniel Nicholls , Alex Robinson , Jack Wells , Amirafshar Moshtaghpour , Mounib Bahri , Angus Kirkland , Nigel Browning

Predicting the pose of objects from a single image is an important but difficult computer vision problem. Methods that predict a single point estimate do not predict the pose of objects with symmetries well and cannot represent uncertainty.…

Computer Vision and Pattern Recognition · Computer Science 2023-02-28 David M. Klee , Ondrej Biza , Robert Platt , Robin Walters

Integrated silicon photonic devices, which manipulate light to transmit and process information on a silicon-on-insulator chip, are highly sensitive to structural variations. Minor deviations during nanofabrication-the precise process of…

Computer Vision and Pattern Recognition · Computer Science 2024-11-27 Rambod Azimi , Yijian Kong , Dusan Gostimirovic , James J. Clark , Odile Liboiron-Ladouceur

Scanning Electron Microscopy (SEM) is pivotal in revealing intricate micro- and nanoscale features across various research fields. However, obtaining high-resolution SEM images presents challenges, including prolonged scanning durations and…

Image and Video Processing · Electrical Eng. & Systems 2024-10-08 Tom Reclik , Setareh Medghalchi , Philipp Schumacher , Maximilian Wollenweber , Talal Al-Samman , Sandra Korte-Kerzel , Ulrich Kerzel

The desire to image specimens in liquids has led to the development of open-cell and closed-cell techniques in transmission electron microscopy (TEM). The closed-cell approach is currently more common in TEM and has yielded new insights…

Applied Physics · Physics 2023-08-22 Barnaby D. A. Levin , Diane Haiber , Qianlang Liu , Peter A. Crozier

Plan-view transmission electron microscopy (TEM) samples are key to understand the atomic structure and associated properties of materials along their growth orientation, especially for thin films that are stain-engineered onto different…

Applied Physics · Physics 2024-01-08 Supriya Ghosh , Fengdeng Liu , Sreejith Nair , Bharat Jalan , K. Andre Mkhoyan

Arbitrary-oriented object detection is a relatively emerging but challenging task. Although remarkable progress has been made, there still remain many unsolved issues due to the large diversity of patterns in orientation, scale, aspect…

Computer Vision and Pattern Recognition · Computer Science 2023-07-11 Peng Sun , Yongbin Zheng , Wenqi Wu , Wanying Xu , Shengjian Bai

Four-dimensional Scanning Transmission Electron Microscopy (4D-STEM) is a powerful technique for high-resolution and high-precision materials characterization at multiple length scales, including the characterization of beam-sensitive…

Applied Physics · Physics 2023-08-11 Hsu-Chih Ni , Renliang Yuan , Jiong Zhang , Jian-Min Zuo

The recent development of electron sensitive and pixelated detectors has attracted the use of four-dimensional scanning transmission electron microscopy (4D-STEM). Here, we present a precession electron diffraction assisted 4D-STEM…

Instrumentation and Detectors · Physics 2021-10-04 Jiwon Jeong , Niels Cautaerts , Gerhard Dehm , Christian H. Liebscher

Recently it has been shown that precise dose control and an increase in the overall acquisition speed of atomic resolution scanning transmission electron microscope (STEM) images can be achieved by acquiring only a small fraction of the…

In situ synchrotron X-ray computed tomography enables dynamic material studies. However, automated segmentation remains challenging due to complex imaging artefacts - like ring and cupping effects - and limited training data. We present a…

Semantic segmentation is an important branch of image processing and computer vision. With the popularity of deep learning, various convolutional neural networks have been proposed for pixel-level classification and segmentation tasks. In…

Computer Vision and Pattern Recognition · Computer Science 2025-05-01 Xinyu Xu , Huazhen Liu , Tao Zhang , Huilin Xiong , Wenxian Yu