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The development of large-scale quantum systems increasingly relies on the close integration of heterogeneous components such as qubits, control electronics, and readout circuits, making thermal management at cryogenic temperatures a central…
Packages capable of supporting large arrays of high-coherence superconducting qubits are vital for the realisation of fault-tolerant quantum computers and the necessary high-throughput metrology required to optimise fabrication and…
We present a fabrication process for fully superconducting interconnects compatible with superconducting qubit technology. These interconnects allow for the 3D integration of quantum circuits without introducing lossy amorphous dielectrics.…
Current superconducting quantum computing platforms face significant scaling challenges, as individual signal lines are required for control of each qubit. This wiring overhead is a result of the low level of integration between control…
Quantum communications technologies require a network of quantum processors connected with low loss and low noise communication channels capable of distributing entangled states. Superconducting microwave qubits operating in cryogenic…
Increasing circuit complexity within quantum systems based on superconducting qubits necessitates high connectivity while retaining qubit coherence. Classical micro-electronic systems have addressed interconnect density challenges by using…
We propose superconducting-semiconducting (super-semi) qubit and coupler designs based on high-quality, compact through-silicon vias (TSVs). An interposer "probe" wafer containing TSVs is used to contact a sample wafer with, for example, a…
In this article, we present a technology development of a superconducting qubit device 3D-integrated by flip-chip-bonding and processed following CMOS fabrication standards and contamination rules on 200 mm wafers. We present the utilized…
Current state-of-the-art superconducting microwave qubits are cooled to extremely low temperatures to avoid sources of decoherence. Higher qubit operating temperatures would significantly increase the cooling power available, which is…
Large-scale quantum computers with more than $10^5$ qubits will likely be built within the next decade. Trapped ions, semiconductor devices, and superconducting qubits among other physical implementations are still confined in the realm of…
Superconducting quantum devices provide excellent connectivity and controllability while semiconductor spin qubits stand out with their long-lasting quantum coherence, fast control, and potential for miniaturization and scaling. In the last…
Superconducting circuits are a strong contender for realizing quantum computing systems, and are also successfully used to study quantum optics and hybrid quantum systems. However, their cryogenic operation temperatures and the current lack…
Superconducting circuit quantum electrodynamics experiments with propagating microwaves require devices acting as beam splitters. Using niobium thin films on silicon and sapphire substrates, we fabricated superconducting 180{\deg}…
A robust cryogenic infrastructure in form of a wired, thermally optimized dilution refrigerator is essential for present and future solid-state based quantum processors. Here, we engineer an extensible cryogenic setup, which minimizes…
Manipulating the electromagnetic spectrum at the single-photon level is fundamental for quantum experiments. In the visible and infrared range, this can be accomplished with atomic quantum emitters, and with superconducting qubits such…
As experimental quantum information processing (QIP) rapidly advances, an emerging challenge is to design a scalable architecture that combines various quantum elements into a complex device without compromising their performance. In…
As the field of superconducting quantum computing advances from the few-qubit stage to larger-scale processors, qubit addressability and extensibility will necessitate the use of 3D integration and packaging. While 3D integration is…
Today's hundred-qubit quantum computers require a dramatic scale up to millions of qubits to become practical for solving real-world problems. Although a variety of qubit technologies have been demonstrated, scalability remains a major…
Modular architectures are a promising approach to scale quantum devices to the point of fault tolerance and utility. Modularity is particularly appealing for superconducting qubits, as monolithically manufactured devices are limited in both…
In state-of-the-art superconducting quantum processors, each qubit is controlled by at least one control line that delivers control pulses generated at room temperature to qubits operating at millikelvin temperatures. While this strategy…