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Increasing the density of superconducting circuits requires compact components, however, superconductor-based capacitors typically perform worse as dimensions are reduced due to loss at surfaces and interfaces. Here, parallel plate…

The large physical size of superconducting qubits and their associated on-chip control structures presents a practical challenge towards building a large-scale quantum computer. In particular, transmons require a high-quality-factor…

We have fabricated superconducting microwave resonators in a lumped element geometry using single crystal silicon dielectric parallel plate capacitors with C >2 pF. Aluminum devices with resonant frequencies between 4.0 and 6.5 GHz…

Mesoscale and Nanoscale Physics · Physics 2011-06-21 S. Weber , K. W. Murch , D. H. Slichter , R. Vijay , I. Siddiqi

Fabrication processes involving anhydrous hydrofluoric vapor etching are developed to create high-$Q$ aluminum superconducting microwave resonators on free-standing silicon membranes formed from a silicon-on-insulator wafer. Using this…

Quantum Physics · Physics 2016-01-18 Paul B. Dieterle , Mahmoud Kalaee , Johannes Fink , Oskar Painter

We present a method to systematically locate and extract capacitive and inductive losses in superconducting resonators at microwave frequencies by use of mixed-material, lumped element devices. In these devices, ultra-low loss titanium…

Characterizing superconducting microwave resonators with highly dissipative elements is a technical challenge, but a requirement for implementing and understanding the operation of hybrid quantum devices involving dissipative elements, e.g.…

We have designed, fabricated and characterized microwave resonators made out of thin films of granular aluminium (grAl) with different oxygen content. We extract the contribution of the large kinetic-inductance of this disordered…

We demonstrate control and readout of a superconducting artificial atom based on a transmon qubit using a compact lumped-element resonator. The resonator consists of a parallel-plate capacitor (PPC) with a wire geometric inductor. The…

Quantum Physics · Physics 2024-03-08 Julia Zotova , Shtefan Sanduleanu , Gleb Fedorov , Rui Wang , Jaw Shen Tsai , Oleg Astafiev

Superconducting resonators play a crucial role in the development of quantum technologies such as quantum computing or high performance detectors. Yet, one of their main limitations regarding to noise and sensitivity is the interaction with…

Lumped-element inductors are an integral component in the circuit QED toolbox. However, it is challenging to build inductors that are simultaneously compact, linear and low-loss with standard approaches that either rely on the geometric…

Superconducting thin-film metamaterial resonators can provide a dense microwave mode spectrum with potential applications in quantum information science. We report on the fabrication and low-temperature measurement of metamaterial…

Superconductivity · Physics 2015-05-06 B. L. T. Plourde , Haozhi Wang , Francisco Rouxinol , M. D. LaHaye

We have produced high-quality complex microwave circuits, such as multiplexed resonators and superconducting phase qubits, using a "vacuum-gap" technology that eliminates lossy dielectric materials. We have improved our design and…

The recent realization of millisecond-scale coherence with tantalum-on-silicon transmon qubits showed that depositing the Al/AlOx/Al Josephson junction in a high purity, ultrahigh vacuum environment was critical for achieving…

We propose a novel architecture for superconducting circuits to improve the efficiency of a quantum annealing system. To increase the capability of a circuit, it is desirable for a qubit to be coupled not only with adjacent qubits but also…

Quantum Physics · Physics 2019-04-22 Hiroto Mukai , Akiyoshi Tomonaga , Jaw-Shen Tsai

Quantum bits (qubits) with long coherence times are an important element for the implementation of medium- and large-scale quantum computers. In the case of superconducting planar qubits, understanding and improving qubits' quality can be…

Superconductivity · Physics 2018-11-14 C. T. Earnest , J. H. Béjanin , T. G. McConkey , E. A. Peters , A. Korinek , H. Yuan , M. Mariantoni

Low-frequency superconducting lumped-element resonators have recently attracted significant attention in the context of axion dark matter searches. Here we present the design and implementation of a fixed-frequency superconducting resonator…

Instrumentation and Detectors · Physics 2026-04-02 Roman Kolevatov , Saptarshi Chaudhuri , Lyman Page

Dielectric losses are one of the key factors limiting the coherence of superconducting qubits. The impact of materials and fabrication steps on dielectric losses can be evaluated using coplanar waveguide (CPW) microwave resonators. Here, we…

High kinetic inductance materials constitute a valuable resource for superconducting quantum circuits and hybrid architectures. Superconducting granular aluminum (grAl) reaches kinetic sheet inductances in the nH/$\square$ range, with…

Quantum computers are close to become a practical technology. Solid-state implementations based, for example, on superconducting devices strongly rely on the quality of the constituent materials. In this work, we fabricate and characterize…

Applied Physics · Physics 2021-12-08 M. S. Moeed , C. T. Earnest , J. H. Béjanin , A. S. Sharafeldin , M. Mariantoni

We have studied superconducting coplanar-waveguide (CPW) resonators fabricated from disordered (granular) films of Aluminum. Very high kinetic inductance of these films, inherent to disordered materials, allows us to implement ultra-short…

Superconductivity · Physics 2019-01-16 Wenyuan Zhang , K. Kalashnikov , Wen-Sen Lu , P. Kamenov , T. DiNapoli , M. E. Gershenson
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