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Systems with low mechanical dissipation are extensively used in precision measurements such as gravitational wave detection, atomic force microscopy and quantum control of mechanical oscillators via opto- and electromechanics. The…

Nanomechanical resonators based on strained silicon nitride (Si$_3$N$_4$) have received a large amount of attention in fields such as sensing and quantum optomechanics due to their exceptionally high quality factors ($Q$s). Room-temperature…

Applied Physics · Physics 2020-01-08 Pedram Sadeghi , Manuel Tanzer , Simon L. Christensen , Silvan Schmid

High quality factor ($Q$) nanomechanical resonators have received a lot of attention for sensor applications with unprecedented sensitivity. Despite the large interest, few investigations into the frequency stability of high-$Q$ resonators…

Mesoscale and Nanoscale Physics · Physics 2021-01-04 Pedram Sadeghi , Alper Demir , Luis Guillermo Villanueva , Hendrik Kähler , Silvan Schmid

We report on low mechanical loss in a high-stress silicon nitride (Si_{3}N_{4}) membrane at temperatures below 100 mK. We isolate a membrane via a phononic shield formed within a supporting silicon frame, and measure the mechanical quality…

Mesoscale and Nanoscale Physics · Physics 2016-11-04 R. Fischer , N. S. Kampel , G. G. T. Assumpção , P. -L. Yu , K. Cicak , R. W. Peterson , R. W. Simmonds , C. A. Regal

The damping rates of high quality factor nanomechanical resonators are well beyond intrinsic limits. Here, we explore the underlying microscopic loss mechanisms by investigating the temperature-dependent damping of the fundamental and third…

Mesoscale and Nanoscale Physics · Physics 2014-03-13 Thomas Faust , Johannes Rieger , Maximilian J. Seitner , Jörg P. Kotthaus , Eva M. Weig

In strained mechanical resonators, the concurrence of tensile stress and geometric nonlinearity dramatically reduces dissipation. This phenomenon, dissipation dilution, is employed in mirror suspensions of gravitational wave interferometers…

We study mechanical dissipation of the fundamental mode of millimeter-sized, high quality-factor ($Q$) metalized silicon nitride membranes at temperatures down to 14 mK using a three-dimensional optomechanical cavity. Below 200 mK, high-$Q$…

Mesoscale and Nanoscale Physics · Physics 2016-01-12 Mingyun Yuan , Martijn A. Cohen , Gary Steele

The small mass and high coherence of nanomechanical resonators render them the ultimate force probe, with applications ranging from biosensing and magnetic resonance force microscopy, to quantum optomechanics. A notorious challenge in these…

Quantum Physics · Physics 2017-07-18 Yeghishe Tsaturyan , Andreas Barg , Eugene S. Polzik , Albert Schliesser

All quantum optomechanics experiments to date operate at cryogenic temperatures, imposing severe technical challenges and fundamental constraints. Here we present a novel design of on-chip mechanical resonators which exhibit fundamental…

Mesoscale and Nanoscale Physics · Physics 2016-04-07 Richard A. Norte , Joao P. Moura , Simon Gröblacher

Nano- and micromechanical oscillators with high quality (Q) factors have gained much attention for their potential application as ultrasensitive detectors. In contrast to micro-fabricated devices, optically trapped nanoparticles in vacuum…

Mesoscale and Nanoscale Physics · Physics 2013-12-10 Jan Gieseler , Lukas Novotny , Romain Quidant

An increasing number of experiments require the use of ultrasensitive nanomechanical resonators. Relevant examples are the investigation of quantum effects in mechanical systems [1] or the detection of exceedingly small forces as in…

Instrumentation and Detectors · Physics 2010-07-12 O. Usenko , A. Vinante , G. Wijts , T. H. Oosterkamp

Squeezing the quadrature noise of a harmonic oscillator used as a sensor can enhance its sensitivity in certain measurment schemes. The canonical approach, based on parametric modulation of the oscillation frequency, is usually limited to a…

Mechanical properties of a nanomechanical resonator have a significant impact on the performance of a resonant Nano-electromechanical system (NEMS) device. Here we study the mechanical properties of suspended membranes fabricated out of…

Applied Physics · Physics 2019-07-09 S. S. Jugade , A. Aggarwal , A. K. Naik

Optical measurement of the motion of a 940 kHz mechanical resonance of a silicon nitride nanostring resonator is demonstrated with a read out noise imprecision reaching 37 dB below that of the resonator's zero-point fluctuations. Via…

Optics · Physics 2015-06-04 Alex G. Krause , Tim D. Blasius , Oskar Painter

We report low-temperature measurements of dissipation in megahertz-range, suspended, single-crystal nanomechanical oscillators. At millikelvin temperatures, both dissipation (inverse quality factor) and shift in the resonance frequency…

Other Condensed Matter · Physics 2009-11-11 Guiti Zolfagharkhani , Alexei Gaidarzhy , Seung-Bo Shim , Robert L. Badzey , Pritiraj Mohanty

High-stress Si$_3$N$_4$ nanoresonators have become an attractive choice for electro- and optomechanical devices. Membrane resonators can achieve quality factor ($Q$) - frequency ($f$) products exceeding $10^{13}$ Hz, enabling (in principle)…

Mesoscale and Nanoscale Physics · Physics 2016-03-07 A. H. Ghadimi , D. J. Wilson , T. J. Kippenberg

Soft-clamped silicon nitride membrane resonators reach coherence times tau in excess of 100 ms at milliKelvin bath temperatures. However, harnessing strong optomechanical coupling in dry dilution refrigerators remains challenging due to…

Quantum Physics · Physics 2023-12-05 Eric Planz , Xiang Xi , Thibault Capelle , Eric C. Langman , Albert Schliesser

Silicon nitride (SiN) mechanical resonators with high quality mechanical properties are attractive for fundamental research and applications. However, it is challenging to maintain these mechanical properties while achieving strong coupling…

The availability of compact, low-cost magnetic resonance imaging instruments would further broaden the substantial impact of this technology. We report highly sensitive detection of magnetic resonance using low-stress silicon nitride…

This paper demonstrates cooling of the center-of-mass motion of 10 $\mu$m-diameter optically levitated silica spheres to an effective temperature of $50\pm22 \mu$K, achieved by minimizing the technical pointing noise of the trapping laser.…

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