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Related papers: Atomistic simulation of the FEBID-driven growth of…

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This paper presents a detailed computational protocol for atomistic simulation of the formation and growth of metal-containing nanostructures during the Focused Electron Beam Induced Deposition (FEBID) process. The protocol is based upon…

Chemical Physics · Physics 2023-09-06 Alexey Prosvetov , Alexey V. Verkhovtsev , Gennady B. Sushko , Andrey V. Solov'yov

Irradiation-driven fragmentation and chemical transformations of organometallic molecules play a central role in nanofabrication techniques based on the use of focused charged-particle beams. In this paper, the electron irradiation-induced…

Atomic and Molecular Clusters · Physics 2026-03-27 Soumyo Kheto , Alexey Verkhovtsev , Bobby Antony , Andrey V. Solov'yov

Focused electron beam induced deposition (FEBID) is a powerful technique for 3D-printing of complex nanodevices. However, for resolutions below 10 nm, it struggles to control size, morphology and composition of the structures, due to a lack…

Focused electron beam induced deposition (FEBID) is an additive manufacturing technique uniquely suited for fabricating nanoscale 3D prototypes for a range of applications, including spintronic devices. However, the variation of growth…

Mesoscale and Nanoscale Physics · Physics 2026-05-15 Aurys Silinga , Keir Edgar , Stephen McVitie , Kayla Fallon , András Kovács , Rafal E. Dunin-Borkowski , Trevor P. Almeida

Recent advances in nanotechnology have created the need to manufacture three-dimensional nanostructures with controlled material composition. Focused Electron Beam Induced Deposition (FEBID) is a nanoprinting technique offering highest…

Mesoscale and Nanoscale Physics · Physics 2025-09-30 Jakub Jurczyk , Leo Brockhuis , Amalio Fernández-Pacheco , Ivo Utke

This work reports on the development of a new approach to the multiscale computational modelling of the focused electron beam-induced deposition (FEBID), realised using the advanced software packages: MBN Explorer and MBN Studio. Our…

Computational Physics · Physics 2025-06-24 Ilia A. Solov'yov , Alexey Prosvetov , Gennady Sushko , Andrey V. Solov'yov

The role of thermal effects in the focused electron beam induced deposition (FEBID) process of Me$_2$Au(tfac) is studied by means of irradiation-driven molecular dynamics simulations. The FEBID of Me$_2$Au(tfac), a commonly used precursor…

Materials Science · Physics 2023-09-06 Alexey Prosvetov , Alexey V. Verkhovtsev , Gennady Sushko , Andrey V. Solov'yov

Nanogranular material systems are promising for a variety of applications in research and development. Their physical properties are often determined by grain sizes, shapes, mutual distances and by the chemistry of the embedding matrix With…

Materials Science · Physics 2021-01-11 Cornelia Trummer , Robert Winkler , Harald Plank , Gerald Kothleitner , Georg Haberfehlner

Focused electron beam induced deposition (FEBID) is a direct-write method for the fabrication of nanostructures whose lateral resolution rivals that of advanced electron lithography but is in addition capable of creating complex…

Mesoscale and Nanoscale Physics · Physics 2020-02-24 Michael Huth , Fabrizio Porrati , Oleksandr V. Dobrovolskiy

In the majority of cases nanostructures prepared by focused electron beam induced deposition (FEBID) employing an organometallic precursor contain predominantly carbon-based ligand dissociation products. This is unfortunate with regard to…

Mesoscale and Nanoscale Physics · Physics 2017-05-01 Evgeniya Begun , Oleksandr V. Dobrovolskiy , Maksym Kompaniiets , Roland Sachser , Christian Gspan , Harald Plank , Michael Huth

The fabrication of three-dimensional (3D) nanostructures is of great interest to many areas of nanotechnology currently challenged by fundamental limitations of conventional lithography. One of the most promising direct-write methods for 3D…

Mesoscale and Nanoscale Physics · Physics 2020-01-07 L. Skoric , D. Sanz-Hernández , F. Meng , C. Donnelly , S. Merino-Aceituno , A. Fernández-Pacheco

The development of modern metal deposition techniques like Focused Ion/Electron Beam Induced Deposition FIBID/FEBID relies heavily on the availability of metal-organic precursors of particular properties. To create a new precursor,…

Mesoscale and Nanoscale Physics · Physics 2025-11-06 Benedykt R. Jany , Katarzyna Madajska , Aleksandra Butrymowicz-Kubiak , Franciszek Krok , Iwona B. Szymańska

The present paper intends to be a new study of a widely used precursor in nanostructure deposition and FEBID processes with a focus on its fragmentation at collisions with low-energy electrons. Newer developments in nanotechnology with…

Materials Science · Physics 2022-09-28 Maria Pintea , Nigel Mason , Maria Tudorovskaya

We report on a nanomechanical engineering method to monitor matter growth in real time via e-beam electromechanical coupling. This method relies on the exceptional mass sensing capabilities of nanomechanical resonators. Focused electron…

Field emission coupled with molecular dynamics simulation (FEcMD) software package is a computational tool for studying atomic structure evolution, structural deformation, phase transitions, recrystallization as well as electron emission…

Computational Physics · Physics 2026-01-22 Bing Xiao , Nan Li , Wenqian Kong , Rui Chu , Hongyu Zhang , Guodong Meng , Kai Wu , Yonghong Cheng

Irradiation-driven fragmentation and chemical transformations of molecular systems play a key role in nanofabrication processes where organometallic compounds break up due to the irradiation with focused particle beams. In this study,…

Chemical Physics · Physics 2023-09-06 Benjamin Andreides , Alexey V. Verkhovtsev , Juraj Fedor , Andrey V. Solov'yov

Nanocrystalline materials have been proposed for use in future fusion reactors due to their high grain boundary density that may act as a sink for irradiation-induced defects. We use molecular dynamics to model collision cascades in…

Electron Beam-Induced Deposition (EBID) enables site-specific nanofabrication but suffers from significant carbon contamination, limiting its applicability in plasmonics, nanoelectronics, and sensing. In this study, we investigate the…

Applied Physics · Physics 2026-05-19 Marianna D'Amato , Linda Piscopo , Hanna Le Jeannic , Alberto Bramati , Antonio Balena

The shape of metal nanoparticles embedded in dielectric matrices influences the optical properties of the composite material. Swift heavy ion irradiation can induce a controllable shape transformation in gold and other metals embedded in…

Materials Science · Physics 2022-04-22 Aleksi A. Leino , Ville E. Jantunen , Flyura Djurabekova

Field emission coupled with molecular dynamics simulation (FEcMD) software package is a computational tool for studying the electron emission characteristics and the atomic structure evolution of micro- and nano-protrusions made of pure…

Computational Physics · Physics 2023-10-10 Nan Li , Xinyu Gao , Xianghui Feng , Kai Wu , Yonghong Cheng , Bing Xiao
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