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One significant drawback of a spectroscopic ellipsometry (SE) technique is its time-consuming and often complicated analysis procedure necessary to assess the optical functions of thin-film and bulk samples. Here, to solve this inherent…

Spectroscopic ellipsometry is a powerful method with high surface sensitivity that can be used to monitor the growth of even sub-monolayer film. However, the analysis of ultrathin films is complicated by the correlation of the dielectric…

Optical spectroscopy is indispensable for research and development in nanoscience and nanotechnology, microelectronics, energy, and advanced manufacturing. Advanced optical spectroscopy tools often require both specifically designed…

Optics · Physics 2022-10-12 Ziyang Wang , Yuxuan Cosmi Lin , Kunyan Zhang , Wenjing Wu , Shengxi Huang

Spectroscopic ellipsometry is a potent method that is widely adopted for the measurement of thin film thickness and refractive index. However, a conventional ellipsometer, which utilizes a mechanically rotating polarizer and grating-based…

Optics · Physics 2023-07-14 Shun Wen , Xinyuan Xue , Liqun Sun , Yuanmu Yang

Spectroscopic ellipsometry (SE) has emerged as a powerful and non-destructive optical characterization technique for probing the complex dielectric properties of two-dimensional (2D) materials. This review provides a comprehensive overview…

Spectroscopic ellipsometry is a widely used optical technique both in industry and research for determining the optical properties and thickness of thin films. The effective use of spectroscopic ellipsometry on micro-structures is inhibited…

Optics · Physics 2023-02-28 Ralfy Kenaz , Ronen Rapaport

Spectroscopic ellipsometry is a means to investigate optical and dielectric material responses. Conventional spectroscopic ellipsometry has trade-offs between spectral accuracy, resolution, and measurement time. Polarization modulation has…

Micromechanically exfoliated mono- and multilayers of molybdenum disulfide (MoS2) are investigated by spectroscopic imaging ellipsometry. In combination with knife edge illumination, MoS2 flakes can be detected and classified on arbitrary…

Mesoscale and Nanoscale Physics · Physics 2016-11-17 S. Funke , B. Miller , E. Parzinger , P. Thiesen , A. W. Holleitner , U. Wurstbauer

This article aims to provide a brief overview of both established and novel ellipsometry techniques, as well as their applications. Ellipsometry is an indirect optical technique in that information about the physical properties of a sample…

The possibility of spatially resolving the optical properties of atomically thin materials is especially appealing as they can be modulated at the micro- and nanoscale by reducing their thickness, changing the doping level or applying a…

Mesoscale and Nanoscale Physics · Physics 2016-03-23 Andres Castellanos-Gomez , Jorge Quereda , Herko P. van der Meulen , Nicolás Agraït , Gabino Rubio-Bollinger

Microscopic Imaging Ellipsometry is an optical technique that uses an objective and sensing procedure to measure the ellipsometric parameters {\Psi} and {\Delta} in the form of microscopic maps. This technique is well known for being…

Biological Physics · Physics 2017-06-07 Mai Ibrahim Khaleel , Yu-Da Chen , Ching-Hang Chien , Yia-Chung Chang

In this technical review we give an introduction to optical spectroscopy for layered materials as a powerful, non-invasive tool to access details of the electronic band structure and crystal quality. Potential applications in photonics and…

Materials Science · Physics 2020-12-18 Shivangi Shree , Ioannis Paradisanos , Xavier Marie , Cedric Robert , Bernhard Urbaszek

Autonomous synthesis and characterization of inorganic materials requires the automatic and accurate analysis of X-ray diffraction spectra. For this task, we designed a probabilistic deep learning algorithm to identify complex multi-phase…

Materials Science · Physics 2021-05-27 Nathan J. Szymanski , Christopher J. Bartel , Yan Zeng , Qingsong Tu , Gerbrand Ceder

Over the recent years, there has been an extensive adoption of Machine Learning (ML) in a plethora of real-world applications, ranging from computer vision to data mining and drug discovery. In this paper, we utilize ML to facilitate…

Materials Science · Physics 2022-02-10 Ayush Arunachalam , S. Novia Berriel , Parag Banerjee , Kanad Basu

We show how to correctly extract from the ellipsometric data the surface susceptibility and the surface conductivity that describe the optical properties of monolayer $\rm MoS_2$. Theoretically, these parameters stem from modelling a…

The electronic properties of two-dimensional (2D) materials depend sensitively on the underlying atomic arrangement down to the monolayer level. Here we present a novel strategy for the determination of the band gap and complex dielectric…

Electron energy loss spectroscopy is consolidating as a powerful tool to explore electronic (as well as vibrational) excitations of matter, including molecules. Performed in a scanning transmission electron microscope, this technique is…

Chemical Physics · Physics 2021-03-05 Ciro A. Guido , Enzo Rotunno , Matteo Zanfrognini , Stefano Corni , Vincenzo Grillo

Inverse ellipsometry, i.e., reconstructing optical constants and film thickness from the measured phase difference $\Delta$ and amplitude ratio $\Psi$, is a fundamentally ill-posed problem. Traditional solutions rely on slow, expert-driven…

Machine Learning · Computer Science 2026-03-20 Yiming Ma , Jianzhi Teng , Xinjie Li , Xin Sun , Zhiyong Wang , Yuzhou Song , Lionel Z. Wang , Bin Chen

Imaging ellipsometry studies of graphene on SiO2/Si and crystalline GaAs are presented. We demonstrate that imaging ellipsometry is a powerful tool to detect and characterize graphene on any flat substrate. Variable angle spectroscopic…

Diffusing wave spectroscopy (DWS) can be employed as an optical rheology tool with numerous applications for studying the structure, dynamics and linear viscoelastic properties of complex fluids, foams, glasses and gels. To carry out DWS…

Soft Condensed Matter · Physics 2018-11-06 Chi Zhang , Mathias Reufer , Danila Gaudino , Frank Scheffold
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