Related papers: Applied Nanofabrication for X-ray Grating Spectros…
Future observatories utilizing reflection grating spectrometers for extreme ultraviolet (EUV) and soft X-ray (SXR) spectroscopy require high-fidelity gratings with both blazed groove facets and custom groove layouts that are often fanned or…
Future NASA X-ray spectroscopy missions will require high throughput, high resolution grating spectrometers. Off-plane reflection gratings are capable of meeting the performance requirements needed to realize the scientific goals of these…
Thermally activated selective topography equilibration (TASTE) enables the creation of 3D structures in resist using grayscale electron-beam lithography followed by a thermal treatment to induce a selective polymer reflow. A blazed grating…
Surface-relief gratings fabricated through nanoimprint lithography (NIL) are prone to topographic distortion induced by resist shrinkage. Characterizing the impact of this effect on blazed diffraction efficiency is particularly important…
Diffractive optical elements such as periodic gratings are fundamental devices in X-ray imaging - a technique that medical, material science and security scans rely upon. Fabrication of such structures with high aspect ratios at the…
High-resolution ($R = \lambda /\Delta \lambda > 2000$) x-ray absorption and emission line spectroscopy in the soft x-ray band is a crucial diagnostic for the exploration of the properties of ubiquitous warm and hot plasmas and their…
X-ray diffraction gratings play an essential role in high-resolution spectroscopy of astrophysical phenomena. We present some scientific highlights from the X-ray grating spectrometers (XGS) on board of the Chandra and XMM/Newton missions,…
Gratings enable dispersive spectroscopy from the X-ray to the optical, and feature prominently in proposed flagships and SmallSats alike. The exacting performance requirements of these future missions necessitate assessing whether the…
The increasing importance of well-controlled ordered nanostructures on surfaces represents a challenge for existing metrology techniques. To develop such nanostructures and monitor complex processing constraints fabrication, both a…
We present the fabrication and optical testing of a fine grating on a ZnS substrate to be used as a wideband infrared spectral disperser and for which the primary application is measurement of the composition of the atmospheres of…
A novel fabrication method for soft x-ray transmission grating and other optical elements is presented. The method uses Focused-Ion-Beam (FIB) technology to fabricate high-quality free standing grating bars on Transmission Electron…
For the reliable fabrication of the current and next generation of nanostructures it is essential to be able to determine their material composition and dimensional parameters. Using the grazing incidence X-ray fluoresence technique, which…
The characterization of nanostructured surfaces with sensitivity in the sub-nm range is of high importance for the development of current and next generation integrated electronic circuits. Modern transistor architectures for e.g. FinFETs…
Laterally periodic nanostructures were investigated with grazing incidence small angle X-ray scattering (GISAXS) by using the diffraction patterns to reconstruct the surface shape. To model visible light scattering, rigorous calculations of…
This study explores the use of synchrotron measurements as a nanometrology tool for blazed gratings. In grazing incidence geometry, one can measure both the conical diffraction and the diffuse scattering on the grating simultaneously in a…
Efficient imaging of biomolecules, 2D materials and electromagnetic fields depends on retrieval of the phase of transmitted electrons. We demonstrate a method to measure phase in a scanning transmission electron microscope using a…
The demands on optical components to tolerate high radiation dose and manipulate hard x-ray beams that can fit the experiment requirements, are constantly increasing due to the advancements in the available x-ray sources. Here we have…
Future soft X-ray (10 - 50 Angstrom) spectroscopy missions require higher effective areas and resolutions to perform critical science that cannot be done by instruments on current missions. An X-ray grating spectrometer employing off-plane…
Diffraction gratings with large angular dispersion rates are central to obtaining high spectral resolution in grating spectrometers operating over a broad spectral range from infrared to soft-x-ray domains. The greatest challenge is of…
Future NASA X-ray Observatories will shed light on a variety of high-energy astrophysical phenomena. Off-plane reflection gratings can be used to provide high throughput and spectral resolution in the 0.3--1.5 keV band, allowing for…