Related papers: Two-step MEMS microfabrication via 3D direct laser…
Multilayer metasurfaces (MLMs) represent a versatile type of three-dimensional optical metamaterials that could enable ultra-thin and multi-functional photonic components. Herein we demonstrate an approach to readily fabricate MLMs…
Multifocal laser direct writing (LDW) based on phase-only spatial light modulator (SLM) can realize flexible and parallel nanofabrication with high throughput potential. In this investigation, a novel approach of combining two-photon…
Integrated micro-nanochannel networks in fluidic devices are desirable in a number of applications ranging from self-healing/cooling materials to bioengineering. The conventional micro-manufacturing techniques are capable of either…
Three-dimensional (3D) nano-printing via two-photon polymerization offers unparalleled design flexibility and precision, thereby enabling rapid prototyping of advanced micro-optical elements and systems, including hybrid achromats,…
Two-dimensional (2D) Transition Metal Dichalcogenide semiconductor (TMDs) nanocircuits are deterministically engineered over large-scale substrates. The original approach combines large-area physical growth of 2D TMDs layer with high…
Conventional lithography methods involving pattern transfer through resist templating face challenges of material compatibility with various process solvents. Other approaches of direct material writing often compromise pattern complexity…
It may be possible to reinvent how microelectronics are made using a two step process: (1) Synthesizing modular, nanometer-scale components -- transistors, sensors, and other devices -- and suspending them in a liquid "ink" for storage or…
A powerful fabrication strategy based on three-dimensional direct laser writing for the rapid prototyping of opto-mechanical components with critical features ranging from several hundred nm to a few mm is demonstrated here. As an example,…
We have demonstrated the fabrication and characterization of 2D liquid-based multimode optical waveguide structures over a Polydimethylsiloxane (PDMS) material-based chip. Fabrication of two separate microstructures, one with a width of 14…
Directed atomic fabrication using an aberration-corrected scanning transmission electron microscope (STEM) opens new pathways for atomic engineering of functional materials. In this approach, the electron beam is used to actively alter the…
Resonators based on two-dimensional (2D) materials have exceptional properties for application as nanomechanical sensors, which allows them to operate at high frequencies with high sensitivity. However, their performance as nanomechanical…
To develop active materials that can efficiently respond to external stimuli with designed mechanical motions is one of the major obstacles that have hindered the realization of nanomachines and nanorobots. Here, we propose an innovative…
Constructing precise micro-nano metal patterns on complex three-dimensional (3D) plastic parts allows the fabrication of functional devices for advanced applications. However, this patterning is currently expensive and requires complex…
The fabrication of three-dimensional (3D) nanostructures is of great interest to many areas of nanotechnology currently challenged by fundamental limitations of conventional lithography. One of the most promising direct-write methods for 3D…
Two-dimensional materials (2DM) and their derived heterostructures have electrical and optical properties that are widely tunable via several approaches, most notably electrostatic gating and interfacial engineering such as twisting. While…
We present a micro-electromechanical system (MEMS) based method for the resist free patterning of nano-structures. Using a focused ion beam (FIB) to customize larger MEMS machines, we fabricate apertures as small as 50 nm on plates that can…
Dielectrophoresis is an electric field-based technique for moving neutral particles through a fluid. When used for particle separation, dielectrophoresis has many advantages compared to other methods, providing label-free operation with…
This article presents several design techniques to fabricate micro-electro-mechanical systems (MEMS) using standard complementary metal-oxide semiconductor (CMOS) processes. They were applied to fabricate high yield CMOS-MEMS shielded…
Additive manufacturing using 2-Photon Polymerization (2PP, aka direct laser writing DLW) enables the fabrication of almost arbitrary complex 3D structures from the meso to the submicron scale. However, deviations between the anticipated…
Scanning micro-mirror actuators are silicon-based oscillatory micro-electro-mechanical systems (MEMS). They enable laser distance measurements for automotive LIDAR applications as well as projection modules for the consumer market. For MEMS…