Related papers: Virtual IED sensor for df rf CCP discharges
Three-dimensional (3D) etching of materials by plasmas is an ultimate challenge in microstructuring applications. A method is proposed to reach a controllable 3D structure by using masks in front of the surface in a plasma etch reactor in…
We report on the first feedback cooling of a single trapped ion below the Doppler limit of $\hbar\Gamma/2 k_\mathrm{B}$. The motion of a single ion is monitored in real-time and cooled up to 9-times below the Doppler cooling temperature by…
Trapped-ion applications, such as in quantum information, precision measurements, optical clocks, and mass spectrometry, rely on specialized high-performance ion traps. The latter applications typically employ traditional machining to…
We present the concept of a new type of silicon tracking sensor called Enhanced Lateral Drift (ELAD) sensor. In ELAD sensors the spatial resolution of the impact position of ionising particles is improved by a dedicated charge sharing…
We present a method to measure the kinetic energy of electrons emitted upon ion impact via their time-of-flight. Pulsed beams of H$^{+}$, D$_2^{+}$, He$^{+}$ and Ne$^{+}$ ions with velocities between 0.4 and 3.5 a.u. are transmitted through…
Low-pressure multi-frequency capacitively coupled plasmas are used for numerous etch and deposition applications in the semiconductor industry. Pulsing of the radio-frequency (RF) sources enables control of neutral and charged species in…
Photoelectron angular distributions (PADs) obtained from ionization of potassium atoms using moderately intense femtosecond IR fields ($\sim$10$^{12}$Wcm$^{-2}$) of various polarization states are shown to provide a route to "complete"…
Self-trapping and acceleration of ions in laser-driven relativistically transparent plasma are investigated with the help of particle-in-cell simulations. A theoretical model based on ion wave breaking is established in describing ion…
In this article, we present a detailed characterisation of a multicusp-assisted inductively coupled RF plasma source for plasma immersion ion implantation (PIII). Using laser-induced fluorescence (LIF) and RF-compensated Langmuir probe…
The next generation of lithography machines uses extreme ultraviolet (EUV) light originating from laser-produced plasma (LPP) sources, where a small tin droplet is ionized by an intense laser pulse to emit the requested light at 13.5 nm.…
A fast-reading current integrator is developed for high time-resolution and low-noise ion beam diagnostics under both continuous-wave and pulsed operating conditions. The system combines a low-leakage transimpedance front-end with a hybrid…
Analysis of ion-kinetic instabilities in solar wind plasmas is crucial for understanding energetics and dynamics throughout the heliosphere, as evident from spacecraft observations of complex ion velocity distribution functions (VDFs) and…
Solid-state nanopores have received substantial attention in the past years owing to their simplicity and potential applications expected in genomics, sensing, archival information storage, and computing. The underlying sensing technique of…
This paper presents a new resolution strategy for multi-scale streamer discharge simulations based on a second order time adaptive integration and space adaptive multiresolution. A classical fluid model is used to describe plasma…
The visible camera system EDICAM (Event Detection Intelligent Camera), recently installed on JT-60SA, is simulated to assess whether it can be used for measuring synchrotron radiation from relativistic runaway electrons. In this simulation,…
While magnetic confinement fusion (MCF) and inertial confinement fusion (ICF) remain the primary routes toward controlled fusion, progress is still constrained by energy loss, plasma instabilities, and the cost and complexity of large-scale…
Energy analyzers are important plasma diagnostic tools with applications in a broad range of disciplines including molecular spectroscopy, electron microscopy, basic plasma physics, plasma etching, plasma processing, and ion sputtering…
The electron density close to the extraction grids and the co-extracted electrons represent a crucial issue when operating negative ion sources for fusion reactors. An excessive electron density in the plasma expansion region can indeed…
We have used a combination of numerical modeling and experiments to study carbon etching in the presence of a hydrogen plasma. We model the evolution of a low density EUV-induced plasma during and after the EUV pulse to obtain the energy…
Ion computed tomography (iCT) is an imaging modality for the direct determination of the relative stopping power (RSP) distribution within a patient's body. Usually, this is done by estimating the path and energy loss of ions traversing the…