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A minimal method to fabricate Al/AlO$_x$/Al Josephson junctions (JJs) using photolithography and argon etching, before metallization and oxidation, is demonstrated. JJs with areas ranging from 1 to 6 $\mu$m$^2$ can be fabricated and, with…

Quantum Physics · Physics 2026-04-30 Imran Mahboob , Satoshi Sasaki , Takaaki Takenaka

As low-loss non-linear elements, Josephson junctions are the building blocks of superconducting qubits. The interaction of the qubit degree of freedom with the quasiparticles tunneling through the junction represent an intrinsic relaxation…

Mesoscale and Nanoscale Physics · Physics 2011-08-25 G. Catelani , R. J. Schoelkopf , M. H. Devoret , L. I. Glazman

We have fabricated and characterized asymmetric gap-engineered junctions and transmon devices. To create Josephson junctions with asymmetric gaps, Ti was used to proximitize and lower the superconducting gap of the Al counter-electrode. DC…

Josephson Junctions are important components in superconducting qubits. It introduces anharmonicity to the energy level spacings of the qubit which allow us to identify two unique quantum energy states for computing. It is difficult to…

Quantum Physics · Physics 2023-10-03 Haochen Li , Soe Gon Yee Thant , Rainer Dumke

Quantum processors using superconducting qubits suffer from dielectric loss leading to noise and dissipation. Qubits are usually designed as large capacitor pads connected to a non-linear Josephson junction (or SQUID) by a superconducting…

Josephson junctions form the core circuit element in superconducting quantum computing circuits, single flux quantum digital logic circuits, and sensing devices such as SQUIDs. Aluminum oxide has typically been used as the tunnel barrier.…

Josephson junctions supply the nonlinear inductance element in superconducting qubits. In the widely used transmon configuration, where the junction is shunted by a large capacitor, the low charging energy minimizes the sensitivity of the…

Mesoscale and Nanoscale Physics · Physics 2024-12-17 Maxwell Wisne , Yanpei Deng , Hilal Cansizoglu , Cameron Kopas , Josh Mutus , Venkat Chandrasekhar

Qubit information processors are increasing in footprint but currently rely on e-beam lithography for patterning the required Josephson junctions (JJs). Advanced optical lithography is an alternative patterning method, and we report on the…

The narrow bandgap of semiconductors allows for thick, uniform Josephson junction barriers, potentially enabling reproducible, stable, and compact superconducting qubits. We study vertically stacked van der Waals Josephson junctions with…

We have demonstrated a novel type of superconducting transmon qubit in which a Josephson junction has been engineered to act as its own parallel shunt capacitor. This merged-element transmon (MET) potentially offers a smaller footprint and…

Tantalum and aluminum on sapphire are widely used platforms for qubits of long coherent time. As quantum chips scale up, the number of Josephson junctions on Sapphire increases. Thus, both the uniformity and stability of the junctions are…

Superconductivity · Physics 2024-05-08 Yuzhen Zheng , Shuming Li , Zengqian Ding , Kanglin Xiong , Jiagui Feng , Hui Yang

We present the fabrication and characterization of transmon qubits formed from aluminum Josephson junctions on two different silicon-based substrates: (i) high-resistivity silicon (Si) and (ii) silicon-on-insulator (SOI). Key to the qubit…

In this work, we briefly overview various options for Josephson junctions which should be scalable down to nanometer range for utilization in nanoscale digital superconducting technology. Such junctions should possess high values of…

We have developed a combined photolithography and electron-beam lithography fabrication process for sub-\mum to \mum-size Nb/Al-AlOx/Nb Josephson junctions. In order to define the junction size and protect its top electrode during anodic…

Superconductivity · Physics 2011-02-14 Christoph Kaiser , J. M. Meckbach , K. Ilin , J. Lisenfeld , R. Schäfer , A. V. Ustinov , M. Siegel

Reproducible High Tc Josephson junctions have been made in a rather simple two-step process using ion irradiation. A microbridge 1 to 5 micrometers wide is firstly designed by ion irradiating a c-axis-oriented YBa2Cu3O7 film through a gold…

For high-performance superconducting quantum devices based on Josephson junctions (JJs) decreasing lateral sizes is of great importance. Fabrication of sub-\mu m JJs is challenging due to non-flat surfaces with step heights of up to several…

Superconductivity · Physics 2013-03-28 J. M. Meckbach , M. Merker , S. J. Buehler , K. Ilin , B. Neumeier , U. Kienzle , E. Goldobin , R. Kleiner , D. Koelle , M. Siegel

We investigate a photolithography-only fabrication process for transmon Josephson junctions using a modified double-oblique evaporation geometry. Using a bilayer resist process and Al shadow evaporation, we fabricate junction structures and…

Quantum Physics · Physics 2026-05-20 K. Aoyanagi , S. Abe , S. Chen , T. Inada , C. Kawai , Y. Mino , K. Nakamura , K. Nakazono , T. Nitta , K. Watanabe

Aluminum-based Josephson junctions are currently the main sources of nonlinearity for control and manipulation of superconducting qubits. A phase-slip junction, the dual of a Josephson junction, provides an alternative source of…

Superconductivity · Physics 2026-02-09 Cheeranjeev Purmessur , Kaicheung Chow , Bernard van Heck , Angela Kou

Josephson junctions (JJs) with Josephson energy $E_J \lesssim 1K$ are widely employed as non-linear elements in superconducting circuits for quantum computing, operating at milli-Kelvin temperatures. Here we experimentally study incoherent…

Superconducting integrated circuits have demonstrated a tremendous potential to realize integrated quantum computing processors. However, the downside of the solid-state approach is that superconducting qubits suffer strongly from energy…