Related papers: Experimental Evaluation of Vibration Influence on …
Sensors and actuators based on resonant micro-electro-mechanical systems (MEMS), such as scanning micro mirrors, are well-established in automotive and consumer products. As the areas of application broaden, the requirements for the MEMS…
Scanning micro-mirror actuators are silicon-based oscillatory micro-electro-mechanical systems (MEMS). They enable laser distance measurements for automotive LIDAR applications as well as projection modules for the consumer market. For MEMS…
Scanning Laser Doppler Vibrometer (SLDV) measurements are affected by sensor head vibrations as if they are vibrations of the target surface itself. This paper presents practical correction schemes to solve this important problem. The study…
Silicon-based micro-electromechanical systems (MEMS) can be fabricated using bulk and surface micromachining technology. A micro mirror designed as an oscillatory MEMS constitutes a prominent example. Typically, in order to minimize energy…
In order to evaluate the potential of MEMS deformable mirrors for open-loop applications, a complete calibration process was performed on a 1024-actuator mirror. The mirror must be perfectly calibrated to obtain deterministic membrane…
The development and characterisation of a piezoelectric actuated high-frequency MEMS scanning mirror with on-chip frequency tuning capability is reported. The resonant scanner operates at frequencies in excess of 140 kHz, generating scan…
We present simulations of the dynamic and temperature dependent behavior of Micro-Electro-Mechanical Systems (MEMS) by utilizing recently developed parallel codes which enable a coupling of length scales. The novel techniques used in this…
Miniaturized two-dimensional scanning mirror based on microelectromechanical systems (MEMS) technology has great potential in automotive industry, consumer electronics, and biomedicine, etc. Due to its high frequency and large angle,…
The Scanning electron microscope (SEM) and Electron-Dispersive Spectroscope (EDS) are two highly effective instruments in the field of nanoscience and nanotechnology. The quality of these instruments is determined by various factors, with…
A mirrored bilayer structure incorporating layers of Graphene and MoS2 is proposed here for Surface Plasmon Resonance (SPR) biosensing and its performance is evaluated numerically. Starting from the basic configuration, the structure with…
This paper proposes a simple self-calibration method for the internal time synchronization of MEMS(Micro-electromechanical systems) LiDAR during research and development. Firstly, we introduced the problem of internal time misalignment in…
A fundamental challenge in robot perception is the coupling of the sensor pose and robot pose. This has led to research in active vision where robot pose is changed to reorient the sensor to areas of interest for perception. Further,…
We theoretically investigate the coupling of an ultracold three-level atomic gas and a nano-mechanical mirror via classical electromagnetic radiation. The radiation pressure on the mirror is modulated by absorption of a probe light field,…
Optical scanning is a prevalent technique for optical neural interfaces where light delivery with high spatial and temporal precision is desired. However, due to the sequential nature of point-scanning techniques, the settling time of…
Self-injection locking is a dynamic phenomenon which provides passive stabilization of a lasers emission frequency via resonant optical feedback. The stabilization coefficient depends on the level of resonant feedback and quality factor of…
Using optical diffraction, we study the mechanical vibrations of an array of micromechanical resonators. Implementing tunable electrostatic coupling between the suspended, doubly-clamped Au beams leads to the formation of a band of…
The aim of the experiment series was to test the influence of acceleration on time dilation by measuring the relative spectral shift between the resonance spectra of a rotating Mossbauer absorber with acceleration anti-parallel and parallel…
We present an experimental study of the internal mechanical vibration modes of a mirror. We determine the frequency repartition of acoustic resonances via a spectral analysis of the Brownian motion of the mirror, and the spatial profile of…
This work presents the design, simulation, fabrication, and characterization of a novel architectural compact two-dimensional (2D) resonant MEMS scanning mirror actuated by thin-film lead zirconate titanate (PZT). The device employs an…
The dynamical behavior of a nonlinear micromechanical resonator acting as one of the mirrors in an optical resonance cavity is investigated. The mechanical motion is coupled to the optical power circulating inside the cavity both directly…