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This paper proposes a simple, four-mirror, in-line projector for high-NA EUV lithography that eliminates the most troublesome mask 3D effect. The design consists of a two-stage concave-convex pair, where optical aberrations are cancelled…

Optics · Physics 2025-08-04 Tsumoru Shintake

Micro/nano electro-mechanical systems (MEMS/NEMS) are constantly attracting an increasing attention for their relevant technological applications in fields ranging from biology, medicine, ecology, energy to industry. Most of the…

Materials Science · Physics 2021-03-10 Omar Tricinci , Marco Carlotti , Andrea Desii , Fabian Meder , Virgilio Mattoli

Photonic inverse design and, especially, topology optimization, enable dielectric cavities with deeply sub-diffraction mode volumes and high quality factors, thus offering a powerful platform for enhanced light-matter coupling. Here, we…

Advanced nanophotonics penetrates into other areas of science and technology, ranging from applied physics to biology and resulting in many fascinating cross-disciplinary applications. It has been recently demonstrated that suitably…

Cavity nonlinear optics enables intriguing physical phenomena to occur at micro- or nano-scales with modest input powers. While this enhances capabilities in applications such as comb generation, frequency conversion and quantum optics,…

Optics · Physics 2020-12-11 Joshua B. Surya , Juanjuan Lu , Yuntao Xu , Hong X. Tang

Ultrafast laser writing of single lattice defects in wide-bandgap semiconductors is shown to present a new physical setting in which deeply subwavelength laser-writing positioning precision is attainable, but where the whole notion of…

Optics · Physics 2026-03-06 Julia M. Mikhailova , Aleksei M. Zheltikov

Laser cutting of semiconductor wafers and transparent dielectrics has become a dominant process in manufacturing industries, encompassing a wide range of applications from flat display panels to microelectronic chips. Limited by the…

Deep learning-based low-light image enhancers have made significant progress in recent years, with a trend towards achieving satisfactory visual quality while gradually reducing the number of parameters and improving computational…

Computer Vision and Pattern Recognition · Computer Science 2025-02-28 Nan An , Long Ma , Guangchao Han , Xin Fan , RIsheng Liu

There has been much recent interest in quantum optical interferometry for applications to metrology, sub-wavelength imaging, and remote sensing, such as in quantum laser radar (LADAR). For quantum LADAR, atmospheric absorption rapidly…

Quantum Physics · Physics 2015-05-13 Yang Gao , Christoph F. Wildfeuer , Petr M. Anisimov , Hwang Lee , Jonathan P. Dowling

Ultra-thin two-dimensional (2D) materials have gained significant attention for making next-generation optoelectronic devices. Here, we report a large-area heterojunction photodetector fabricated using a liquid metal-printed 2D…

Micro- and nanoscale fabrication, which enables precise construction of intricate three-dimensional structures, is of foundational importance for advancing innovation in plasmonics, nanophotonics, and biomedical applications. However,…

The emergence of far-field super-resolution microscopy has rejuvenated the possibility for nanoscale imaging. Approaches to far-field super-resolution that utilize point scanning often depends on spatially reducing the size of the focused…

Optics · Physics 2022-06-17 Ning Xu , Guoxuan Liu , Qiaofeng Tan

Epsilon-near-zero (ENZ) metamaterials represent a powerful toolkit for selectively transmitting and localizing light through cavity resonances, enabling the study of mesoscopic phenomena and facilitating the design of photonic devices. In…

The ability to capture good quality images in the dark and near-zero lux conditions has been a long-standing pursuit of the computer vision community. The seminal work by Chen et al. [5] has especially caused renewed interest in this area,…

Computer Vision and Pattern Recognition · Computer Science 2020-12-01 Mohit Lamba , Atul Balaji , Kaushik Mitra

We present a double-layer dielectric metasurface obtained by stacking a silicon nanodisc array and a silicon photonic crystal slab with equal periodicity on top of each other. We focus on the investigation of electric near-field enhancement…

Optical materials with vanishing dielectric permittivity, known as epsilon-near-zero (ENZ) materials, have been shown to possess enhanced nonlinear optical responses in their ENZ region. These strong nonlinear optical properties have been…

The realization of lossless metasurfaces with true chirality crucially requires the fabrication of three-dimensional structures, constraining their feasibility for experiments and hampering practical implementations. Even though the…

Third harmonic generation microscopy has been used to analyze the morphology of photonic structures created using the femtosecond laser direct-write technique. Three dimensional waveguide arrays and waveguide-Bragg gratings written in…

Throughput and resolution are both of critical importance for modern manufacturing, however, they are usually contradictory with each other. Here, a high-throughput high-resolution three dimensional (3D) printing is demonstrated by…

Applied Physics · Physics 2018-12-05 Yuanxin Tan , Wei Chu , Peng Wang , Wenbo Li , Jia Qi , Jian Xu , Ya Cheng

Recent advances in three-dimensional laser writing have enabled direct nanostructuring deep within silicon, unlocking a volumetric design space previously inaccessible to surface-bound nanophotonic devices. Here, we introduce subwavelength…

Optics · Physics 2025-07-29 Mehmet Bütün , Alperen Saltik , Onur Tokel
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