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This work reports on the development of a new approach to the multiscale computational modelling of the focused electron beam-induced deposition (FEBID), realised using the advanced software packages: MBN Explorer and MBN Studio. Our…

Computational Physics · Physics 2025-06-24 Ilia A. Solov'yov , Alexey Prosvetov , Gennady Sushko , Andrey V. Solov'yov

Focused electron beam induced deposition (FEBID) is a direct-write method for the fabrication of nanostructures whose lateral resolution rivals that of advanced electron lithography but is in addition capable of creating complex…

Mesoscale and Nanoscale Physics · Physics 2020-02-24 Michael Huth , Fabrizio Porrati , Oleksandr V. Dobrovolskiy

This paper presents a detailed computational protocol for atomistic simulation of the formation and growth of metal-containing nanostructures during the Focused Electron Beam Induced Deposition (FEBID) process. The protocol is based upon…

Chemical Physics · Physics 2023-09-06 Alexey Prosvetov , Alexey V. Verkhovtsev , Gennady B. Sushko , Andrey V. Solov'yov

Recent advances in nanotechnology have created the need to manufacture three-dimensional nanostructures with controlled material composition. Focused Electron Beam Induced Deposition (FEBID) is a nanoprinting technique offering highest…

Mesoscale and Nanoscale Physics · Physics 2025-09-30 Jakub Jurczyk , Leo Brockhuis , Amalio Fernández-Pacheco , Ivo Utke

The growth of iron-containing nanostructures in the process of focused electron beam-induced deposition (FEBID) of Fe(CO)$_5$ is studied by means of atomistic irradiation-driven molecular dynamics (IDMD) simulations. The geometrical…

Materials Science · Physics 2023-09-06 Alexey Prosvetov , Alexey V. Verkhovtsev , Gennady Sushko , Andrey V. Solov'yov

The fabrication of three-dimensional (3D) nanostructures is of great interest to many areas of nanotechnology currently challenged by fundamental limitations of conventional lithography. One of the most promising direct-write methods for 3D…

Mesoscale and Nanoscale Physics · Physics 2020-01-07 L. Skoric , D. Sanz-Hernández , F. Meng , C. Donnelly , S. Merino-Aceituno , A. Fernández-Pacheco

The focused ion beam (FIB) microscope is well established as a high-resolution machining instrument capable of site-selectively removing material down to the nanoscale. Beyond subtractive processing, however, the FIB can also add material…

Materials Science · Physics 2025-10-07 Frances Isabel Allen

Focused electron beam induced deposition (FEBID) is an additive manufacturing technique uniquely suited for fabricating nanoscale 3D prototypes for a range of applications, including spintronic devices. However, the variation of growth…

Mesoscale and Nanoscale Physics · Physics 2026-05-15 Aurys Silinga , Keir Edgar , Stephen McVitie , Kayla Fallon , András Kovács , Rafal E. Dunin-Borkowski , Trevor P. Almeida

Irradiation-driven fragmentation and chemical transformations of organometallic molecules play a central role in nanofabrication techniques based on the use of focused charged-particle beams. In this paper, the electron irradiation-induced…

Atomic and Molecular Clusters · Physics 2026-03-27 Soumyo Kheto , Alexey Verkhovtsev , Bobby Antony , Andrey V. Solov'yov

Focused electron beam induced deposition (FEBID) is a direct write technique for depositing materials on a support substrate akin to 3D printing with an electron beam (e-beam). Opportunities exist for merging this existing technique with…

Materials Science · Physics 2023-07-13 Ondrej Dyck , Andrew R. Lupini , Philip D. Rack , Jason Fowlkes , Stephen Jesse

The development of modern metal deposition techniques like Focused Ion/Electron Beam Induced Deposition FIBID/FEBID relies heavily on the availability of metal-organic precursors of particular properties. To create a new precursor,…

Mesoscale and Nanoscale Physics · Physics 2025-11-06 Benedykt R. Jany , Katarzyna Madajska , Aleksandra Butrymowicz-Kubiak , Franciszek Krok , Iwona B. Szymańska

The present paper intends to be a new study of a widely used precursor in nanostructure deposition and FEBID processes with a focus on its fragmentation at collisions with low-energy electrons. Newer developments in nanotechnology with…

Materials Science · Physics 2022-09-28 Maria Pintea , Nigel Mason , Maria Tudorovskaya

Nanogranular material systems are promising for a variety of applications in research and development. Their physical properties are often determined by grain sizes, shapes, mutual distances and by the chemistry of the embedding matrix With…

Materials Science · Physics 2021-01-11 Cornelia Trummer , Robert Winkler , Harald Plank , Gerald Kothleitner , Georg Haberfehlner

We report on a nanomechanical engineering method to monitor matter growth in real time via e-beam electromechanical coupling. This method relies on the exceptional mass sensing capabilities of nanomechanical resonators. Focused electron…

In the majority of cases nanostructures prepared by focused electron beam induced deposition (FEBID) employing an organometallic precursor contain predominantly carbon-based ligand dissociation products. This is unfortunate with regard to…

Mesoscale and Nanoscale Physics · Physics 2017-05-01 Evgeniya Begun , Oleksandr V. Dobrovolskiy , Maksym Kompaniiets , Roland Sachser , Christian Gspan , Harald Plank , Michael Huth

The role of thermal effects in the focused electron beam induced deposition (FEBID) process of Me$_2$Au(tfac) is studied by means of irradiation-driven molecular dynamics simulations. The FEBID of Me$_2$Au(tfac), a commonly used precursor…

Materials Science · Physics 2023-09-06 Alexey Prosvetov , Alexey V. Verkhovtsev , Gennady Sushko , Andrey V. Solov'yov

Direct electron beam writing is a powerful tool for fabricating complex nanostructures in a single step. The electron beam locally cleaves the molecules of an adsorbed gaseous precursor to form a deposit, similar to 3D printing but without…

Materials Science · Physics 2024-05-14 Katja Höflich , Krzysztof Mackosz , Chinmai S. Jureddy , Aleksei Tsarapkin , Ivo Utke

Insight in the structure of nanoparticle assemblies up to a single particle level is key to understand the collective properties of these assemblies, which critically depend on the individual particle positions and orientations. However,…

Nanoscale fabrication and characterisation techniques critically underpin a vast range of fields, including materials science, nanoelectronics and nanobiotechnology. Focused ion beam (FIB) techniques are particularly appealing due to their…

Quantum simulations of metal surfaces are critical for catalytic innovation. Yet existing methods face a cost-accuracy dilemma: density functional theory is efficient but system-dependent in accuracy, while wavefunction-based theories are…

Chemical Physics · Physics 2026-04-10 Changsu Cao , Hung Q. Pham , Zhen Guo , Yutan Zhang , Zigeng Huang , Xuelan Wen , Ji Chen , Dingshun Lv
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