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Related papers: MEMS Heat Flux Sensor

200 papers

Active microelectromechanical systems can couple the nanomechanical domain with the electronic domain by integrating electronic sensing and actuation mechanisms into the micromechanical device. This enables very fast and sensitive…

We report on a flow sensing approach based on deflection monitoring of micro beams buckled by the compressive thermal stress due to electrothermal Joules heating. The air stream convectively cooling the device affects both the critical…

Fluid Dynamics · Physics 2016-09-21 Yoav Kessler , Slava Krylov , Alex Liberzon

The ability to design the control of heat flow has innumerable benefits in the design of electronic systems such as thermoelectric energy harvesters, solid-state lighting, and thermal imagers, where the thermal design plays a key role in…

We suggest a new type of an ultrasensitive detector of electromagnetic fields exploiting the giant thermoelectric effect recently found in superconductor/ferromagnet hybrid structures. Compared to other types of superconducting detectors…

Superconductivity · Physics 2018-10-03 T. T. Heikkilä , R. Ojajärvi , I. J. Maasilta , E. Strambini , F. Giazotto , F. Bergeret

Thermal management is an important challenge in modern electronics, avionics, automotive, and energy storage systems. While passive thermal solutions (like heat sinks or heat spreaders) are often used, actively modulating heat flow (e.g.…

Soft sensors are crucial in bridging autonomous systems' physical and digital realms, enhancing sensor fusion and perception. Instead of deploying soft sensors on the Cloud, this study shift towards employing on-device soft sensors,…

Machine Learning · Computer Science 2024-10-15 Tianheng Ling , Chao Qian , Gregor Schiele

Thermoelectric devices are heat engines, which operate as generators or refrigerators using the conduction electrons as a working fluid. The thermoelectric heat-to-work conversion efficiency has always been typically quite low, but much…

Statistical Mechanics · Physics 2016-11-11 G. Benenti , H. Ouerdane , C. Goupil

A novel frequency modulated MEMS magnetometer is presented. The new device is inspired by the magnetic force microscopy technique, it combines standard MEMS technology with magnetic elements to obtain a magnetometer with potential for low…

Instrumentation and Detectors · Physics 2021-09-08 Federico Maspero , Gabriele Gatani , Simone Cuccurullo , Riccardo Bertacco

Active thermal control is crucial in achieving the required accuracy and throughput in many industrial applications, e.g., in the medical industry, high-power lighting industry, and semiconductor industry. Thermoelectric Modules (TEMs) can…

Systems and Control · Electrical Eng. & Systems 2020-06-19 Enzo Evers , Rens Slenders , Rob van Gils , Tom Oomen

Plasma diagnostics have a shortage of fast and sensitive calorimetric sensors that can track substrate temperature during plasma-assisted microfabrication. In this work, energy fluxes from argon and oxygen radiofrequency (RF) glow…

Plasma Physics · Physics 2026-01-14 Carles Corbella , Feng Yi , Andrei Kolmakov

We present the findings from an experimental study of a MEMS flow sensor in which an initially curved, double-clamped bistable microbeam is the primary sensing element. Our research explores how the overheat ratio, direct flow loading, and…

Applied Physics · Physics 2024-07-25 Ivan Litvinov , Dan Refaeli , Alex Liberzon , Slava Krylov

Motivated by the recent development of fast and ultra-sensitive thermometry in nanoscale systems, we investigate quantum calorimetric detection of individual heat pulses in the sub-meV energy range. We propose a hybrid superconducting…

Mesoscale and Nanoscale Physics · Physics 2018-11-28 F. Brange , P. Samuelsson , B. Karimi , J. P. Pekola

A novel direct approach to detect the resin flow front during the Liquid Resin Infusion process under industrial environment is proposed. To detect the resin front accurately and verify the results, which are deduced from indirect…

Instrumentation and Detectors · Physics 2012-04-24 Peng Wang , Jérôme Molimard , Sylvain Drapier , Alain Vautrin , Jean-Christophe Minni

A theory is presented to describe the heat-flux radiated in near-field regime by a set of interacting nanoemitters held at different temperatures in vacuum or above a solid surface. We show that this thermal energy can be focused and even…

Optics · Physics 2020-01-01 Philippe Ben-Abdallah

Electrostatic sensing technology is widely utilized in both military and civilian applications, including electrostatic prevention in gas stations and various electronic devices. The high sensitivity of electrostatic sensor is capable to…

Materials Science · Physics 2017-10-31 Wenhui Wang , Ruxia Du , Linping He , Weiwei Zhao , Yunfei Chen , Junpeng Lu , Zhenhua Ni

Devices enabling early detection of low concentrations of leaking hydrogen and precision measurements in a wide range of hydrogen concentrations in hydrogen storage systems are essential for the mass-production of fuel-cell vehicles and,…

Materials Science · Physics 2021-12-15 Ivan S. Maksymov , Mikhail Kostylev

Convenience and safeguarding our home appliances have become an important issue when dealing with an advancement and growth of an economy. This research focuses on the design and construction of a Dual Sensor heat-monitoring system. The…

Systems and Control · Computer Science 2012-11-07 A. M. Zungeru , M. S. Ahmed

Microelectromechanical systems (MEMS) can offer a competitive alternative for conventional technology in electrical precision measurements. This article summarises recent work in development of MEMS solutions for electrical metrology.…

Instrumentation and Detectors · Physics 2007-07-05 Antti Manninen , Anu Karkkainen , Nadine Pesonen , Aarne Oja , Heikki Seppa

This paper first reviews non-traditional heat exchanger geometry, laser welding, practical issues with microchannel heat exchangers, and high effectiveness heat exchangers. Existing microchannel heat exchangers have low material costs, but…

Instrumentation and Detectors · Physics 2012-05-31 David C. Denkenberger , Michael J. Brandemuehl , Joshua M. Pearce , John Zhai

Transition-edge sensors are a type of superconducting detector that offers high energy resolution based on their sharp resistance-temperature feature in the superconducting-to-normal transition. TES X-ray microcalorimeters have typically…

Instrumentation and Detectors · Physics 2019-03-26 Daikang Yan , Lisa M. Gades , Tejas Guruswamy , Umeshkumar M. Patel , Orlando Quaranta , Antonino Miceli