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Silicon nitride (SiN) drumhead resonators offer a promising platform for thermal sensing due to their high mechanical quality factor and the high temperature sensitivity of their resonance frequency. As such, gaining an understanding of…

Applied Physics · Physics 2021-11-12 Nikaya Snell , Chang Zhang , Gengyang Mu , Alexandre Bouchard , Raphael St-Gelais

Free-standing silicon nitride (SiN) mechanical resonators are of central interests in applications such as temperature and mass sensing, and for fundamental optomechanical reasearch. Understanding thermal coupling between a membrane…

Applied Physics · Physics 2021-07-08 Chang Zhang , Mathieu Giroux , Thea Abdul Nour , Raphael St-Gelais

Near-field radiative heat transfer (NFHT) research currently suffers from an imbalance between numerous theoretical studies, as opposed to experimental reports that remain, in proportion, relatively scarce. Existing experimental platforms…

Classical Physics · Physics 2021-11-10 Mathieu Giroux , Chang Zhang , Nikaya Snell , Gengyang Mu , Michel Stephan , Raphael St-Gelais

Silicon nitride (SiN) mechanical resonators with high quality mechanical properties are attractive for fundamental research and applications. However, it is challenging to maintain these mechanical properties while achieving strong coupling…

SiC is a robust semiconductor material considered ideal for high-power application due to its material stability and large bulk thermal conductivity defined by the very fast phonons. In this paper, however, we show that both…

Materials Science · Physics 2007-05-23 Eleni Ziambaras , Per Hyldgaard

Nanoelectromechanical (NEMS) resonators are promising uncooled thermal infrared (IR) detectors to overcome existing sensitivity limits. Here, we investigated nanoelectromechanical trampoline resonators made of silicon nitride (SiN) as…

The frequency stability of nanomechanical resonators (NMR) dictates the performance level of many state-of-the-art sensors (e.g., mass, force, temperature, radiation) that relate an external physical perturbation to a resonance frequency…

Applied Physics · Physics 2023-05-24 Chang Zhang , Raphael St-Gelais

This paper introduces a thermal infrared detector utilizing a nano-optomechanical silicon nitride (SiN) resonator, equipped with a free-space impedance-matched (FSIM) absorber composed of a platinum (Pt) thin film, offering a broadband…

Instrumentation and Detectors · Physics 2025-05-12 Paolo Martini , Stefan Emminger , Kostas Kanellopulos , Niklas Luhmann , Markus Piller , Robert Greyson West , Silvan Schmid

Thermomechanical infrared (IR) detectors have emerged as promising alternatives to traditional photon and thermoelectric sensors, offering broadband sensitivity and low noise without the need for cryogenic cooling. Despite recent advances,…

Instrumentation and Detectors · Physics 2025-12-22 Paolo Martini , Kostas Kanellopulos , Silvan Schmid

The thermal transport in partially trenched silicon nitride membranes has been studied in the temperature range from 0.3 to 0.6 K, with the transition edge sensor (TES), the sole source of membrane heating. The test configuration consisted…

Instrumentation and Detectors · Physics 2010-11-02 V. Yefremenko , G. Wang , V. Novosad , A. Datesman , J. Pearson , R. Divan , C. Chang , T. Downes , J. McMahon , L. Bleem , A. Crites , S. S. Meyer , J. E. Carlstrom

High-stress silicon nitride nanostrings are a promising system for sensing applications because of their ultra-high mechanical quality factors (Qs). By performing thermomechanical calibration across multiple vibrational modes, we are able…

Mesoscale and Nanoscale Physics · Physics 2012-04-26 A. Suhel , B. D. Hauer , T. S. Biswas , K. S. D. Beach , J. P. Davis

Studying thermal transport at the nanoscale poses formidable experimental challenges due both to the physics of the measurement process and to the issues of accuracy and reproducibility. The laser-induced transient thermal grating (TTG)…

Thermodynamic noise places a fundamental limit on the frequency stability of dielectric optical resonators. Here, we present the characterization of thermo-refractive noise in photonic-chip-based silicon nitride microresonators and show…

Nanomechanical photothermal sensing has significantly advanced single-molecule/particle microscopy and spectroscopy, and infrared detection through the use of nanomechanical resonators that detect shifts in resonant frequency due to…

The damping rates of high quality factor nanomechanical resonators are well beyond intrinsic limits. Here, we explore the underlying microscopic loss mechanisms by investigating the temperature-dependent damping of the fundamental and third…

Mesoscale and Nanoscale Physics · Physics 2014-03-13 Thomas Faust , Johannes Rieger , Maximilian J. Seitner , Jörg P. Kotthaus , Eva M. Weig

On-chip actuation and readout of mechanical motion is key to characterize mechanical resonators and exploit them for new applications. We capacitively couple a silicon nitride membrane to an off resonant radio-frequency cavity formed by a…

Mesoscale and Nanoscale Physics · Physics 2020-07-21 A. N. Pearson , K. E. Khosla , M. Mergenthaler , G. A. D. Briggs , E. A. Laird , N. Ares

Short-term changes in the resonance frequency of silicon nitride (SiN) nanomechanical resonators can be measured very precisely due to low thermomechanical fluctuations resulting from large mechanical quality factors. These properties…

Small scale renewable energy harvesting is an attractive solution to the growing need for power in remote technological applications. For this purpose, localized thermal gradients on-chip--created via radiative cooling--could be exploited…

Utilizing atomistic lattice dynamics and scattering theory, we study thermal transport in nanodevices made of 10 nm thick silicon nanowires, from 10 to 100 nm long, sandwiched between two bulk reservoirs. We find that thermal transport in…

Materials Science · Physics 2013-05-08 Ivan Duchemin , Davide Donadio

In the context of a recoil damping analysis, we have designed and produced a membrane resonator equipped with a specific on-chip structure working as a "loss shield" for a circular membrane. In this device the vibrations of the membrane,…

Mesoscale and Nanoscale Physics · Physics 2016-09-14 A. Borrielli , L. Marconi , F. Marin , F. Marino , B. Morana , G. Pandraud , A. Pontin , G. A. Prodi , P. M. Sarro , E. Serra , M. Bonaldi
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