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Niobium nitride (NbN) is a particularly promising material for quantum technology applications, as entails the degree of reproducibility necessary for large-scale of superconducting circuits. We demonstrate that resonators based on NbN thin…

Improving the performance of superconducting qubits and resonators generally results from a combination of materials and fabrication process improvements and design modifications that reduce device sensitivity to residual losses. One…

We present a system which allows to tune the coupling between a superconducting resonator and a transmission line. This storage resonator is addressed through a second, coupling resonator, which is frequency-tunable and controlled by a…

Mesoscale and Nanoscale Physics · Physics 2014-06-12 Mathieu Pierre , Ida-Maria Svensson , Sankar Raman Sathyamoorthy , Göran Johansson , Per Delsing

A two-dimensional photonic crystal microcavity design supporting a wavelength-scale volume resonant mode with a calculated quality factor (Q) insensitive to deviations in the cavity geometry at the level of Q~2x10^4 is presented. The…

Optics · Physics 2009-11-10 Kartik Srinivasan , Paul E. Barclay , Oskar Painter

The microwave cavity perturbation method is often used to determine material parameters (electric permittivity and magnetic permeability) at high frequencies and it relies on measurement of the resonator parameters. We present a method to…

Applied Physics · Physics 2018-12-03 B. Gyüre-Garami , O. Sági , B. G. Márkus , F. Simon

Suspending devices on thin SiN membranes can limit their interaction with the bulk substrate and reduce parasitic capacitance to ground. While suspending devices on membranes is used in many fields including radiation detection using…

Femtosecond Laser Micromachining (FLM) is a powerful technology for the fabrication of photonic devices. In this context, the integration of resonant elements within the platform represents a key advancement, enhancing both its versatility…

We present measurements and simulations of superconducting Nb co-planar waveguide resonators on sapphire substrate down to millikelvin temperature range with different readout powers. In the high temperature regime, we demonstrate that the…

Optical microresonators are characterized by a comb of resonances that preserve similar characteristics over a broad spectral interval. However, for many applications it is beneficial to selectively control of the quality factor (Q) of one…

Silica microresonators with an inverted-wedge shape were fabricated using conventional semiconductor fabrication methods. The measured quality factors of the resonators were greater than $10^6$ in 1550 nm band. Controllable coupling from…

We discuss experimental results obtained using a tunable cylindrical coaxial cavity constituted by an outer Cu cylinder and an inner Pb-BSCCO wire. We have used this device for investigating the microwave response of the superconducting…

Superconductivity · Physics 2015-03-17 A. Agliolo Gallitto , G. Bonsignore , M. Li Vigni , A. Maccarone

Freestanding Silicon nitride (SiN) devices are central to the field of nanomechanical resonators and for other technology applications such as transmission electron imaging and nanopore bioassays. The nanofabrication techniques used for…

Optics · Physics 2023-03-22 Roghayeh Nikbakht , Xitong Xie , Arnaud Weck , Raphael St-Gelais

Superconducting microresonators have been successfully utilized as detection elements for a wide variety of applications. With multiplexing factors exceeding 1,000 detectors per transmission line, they are the most scalable low-temperature…

We report the development of a reactive sputtering process for high $T_\mathrm{c}$ NbN films with high normal-state resistivity, tailored for kinetic inductance parametric amplifiers. The process includes precise control to ensure full…

Superconductivity · Physics 2025-08-26 Songyuan Zhao , Stafford Withington , Christopher Thomas

Material resonances are fundamentally important in the field of nano-photonics and optics. So it is of great interest to know what are the limits to which they can be tuned. The bandwidth of the resonances in materials is an important…

Optics · Physics 2023-04-20 Kshiteej J. Deshmukh , Graeme W. Milton

We report on the design, fabrication and characterization of superconducting coplanar waveguide resonators with nanoscopic constrictions. By reducing the size of the center line down to 50 nm, the radio frequency currents are concentrated…

Dielectric losses are one of the key factors limiting the coherence of superconducting qubits. The impact of materials and fabrication steps on dielectric losses can be evaluated using coplanar waveguide (CPW) microwave resonators. Here, we…

Ultra low-loss microwave materials are crucial for enhancing quantum coherence and scalability of superconducting qubits. Van der Waals (vdW) heterostructure is an attractive platform for quantum devices due to the single-crystal structure…

In this letter, we fabricated and characterized chalcogenide glass resonators monolithically integrated on mid-infrared transparent CaF2 substrates. The devices feature an intrinsic Q-factor of 4E5 at 5.2 micron wavelength, which represents…

Materials Science · Physics 2018-11-06 Hongtao Lin , Lan Li , Yi Zou , Spencer Novak , Kathleen Richardson , Juejun Hu

We demonstrate that a high kinetic inductance disordered superconductor can realize a low microwave loss, non-dissipative circuit element with an impedance greater than the quantum resistance ($R_Q = h/4e^2 \simeq 6.5k\Omega$). This…

Mesoscale and Nanoscale Physics · Physics 2019-04-10 David Niepce , Jonathan Burnett , Jonas Bylander
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