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Photonic integrated circuits are heavily researched devices for telecommunication, biosensing, and quantum technologies. Wafer-scale fabrication and testing are crucial for reducing costs and enabling large-scale deployment. Grating…
Controlled and precise fabrication of structures with heights in the range of single digit nanometres is one of the challenges for diffraction gratings operating near-normal incidence in the extreme ultraviolet (EUV) and soft X-ray range.…
We demonstrate first- and second-order spatial differentiation of an optical beam transverse profile using thin suspended subwavelength gratings. Highly reflective one-dimensional gratings are patterned on suspended 200 nm-thick silicon…
The spectral gradient method is known to be a powerful low-cost tool for solving large-scale optimization problems. In this paper, our goal is to exploit its advantages in the stochastic optimization framework, especially in the case of…
In this paper we present a methodology for increasing the accuracy and accelerating the convergence of numerical methods for solution of Maxwell's equations in the frequency domain by taking into account the be-havior of the electromagnetic…
In the past decade, Resonant Inelastic X-ray Scattering (RIXS) has made remarkable progress as a spectroscopic technique. This is a direct result of the availability of high-brilliance synchrotron X-ray radiation sources and of advanced…
A new method for estimation of intragranular strain fields in polycrystalline materials based on scanning three-dimensional X-ray diffraction data (scanning-3DXRD) is presented and evaluated. Given an apriori known anisotropic compliance,…
3D Gaussian Splatting is a novel method for 3D view synthesis, which can gain an implicit neural learning rendering result than the traditional neural rendering technology but keep the more high-definition fast rendering speed. But it is…
The characterization of nanostructured surfaces with sensitivity in the sub-nm range is of high importance for the development of current and next generation integrated electronic circuits. Modern transistor architectures for e.g. FinFETs…
In this chapter, we demonstrate a general formulation of the Finite Element Method allowing to calculate the diffraction efficiencies from the electromagnetic field diffracted by arbitrarily shaped gratings embedded in a multilayered stack…
Despite its significant achievements in large-scale scene reconstruction, 3D Gaussian Splatting still faces substantial challenges, including slow processing, high computational costs, and limited geometric accuracy. These core issues arise…
We propose a novel x-ray imaging system, Multi-Image X-ray Interferometer Module (MIXIM), with which a very high angular resolution can be achieved even with a small system size. MIXIM is composed of equally-spaced multiple slits and an…
Resonant inelastic x-ray scattering (RIXS) is a widely used spectroscopic technique, providing access to the electronic structure and dynamics of atoms, molecules, and solids. However, RIXS requires a narrow bandwidth x-ray probe to achieve…
We developed a setup using a two dimensional camera for Grazing Incidence x-ray Diffraction (GIXD) on Langmuir monolayers and more generally for surface diffraction on two dimensional powders. Compared to the classical setup using a linear…
Grazing-Incidence X-ray fluorescence (GIXRF) analysis, which is closely related to total-reflection XRF, is a very powerful technique for the in-depth analysis of many types of technologically relevant samples, e.g. nanoparticle…
Self-seeding is a promising approach to significantly narrow the SASE bandwidth of XFELs to produce nearly transform-limited pulses. The implementation of this method in the soft X-ray wavelength range necessarily involves gratings as…
Future observatories utilizing reflection grating spectrometers for extreme ultraviolet (EUV) and soft X-ray (SXR) spectroscopy require high-fidelity gratings with both blazed groove facets and custom groove layouts that are often fanned or…
Immersed reflection gratings improve spectral resolving power by enabling diffraction within a high refractive index medium. This principle has been widely adopted to make grating spectrometers more compact. Conventional immersed gratings…
Miniaturized spectrometers are widely used for non-destructive and on-field spectral analysis. Here we report a tunable grating-based MEMS spectrometer for visible to near-infrared (VIS-NIR) spectroscopy. The MEMS spectrometer consists of a…
McSAS3 is the refactored successor to the original McSAS Monte Carlo small-angle scattering analysis software. It is intended to be integrated in automated data processing pipelines, but can also be used to process individual (batches of)…