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Focused electron beam induced deposition (FEBID) is a direct-write method for the fabrication of nanostructures whose lateral resolution rivals that of advanced electron lithography but is in addition capable of creating complex…

Mesoscale and Nanoscale Physics · Physics 2020-02-24 Michael Huth , Fabrizio Porrati , Oleksandr V. Dobrovolskiy

Recent advances in nanotechnology have created the need to manufacture three-dimensional nanostructures with controlled material composition. Focused Electron Beam Induced Deposition (FEBID) is a nanoprinting technique offering highest…

Mesoscale and Nanoscale Physics · Physics 2025-09-30 Jakub Jurczyk , Leo Brockhuis , Amalio Fernández-Pacheco , Ivo Utke

The focused ion beam (FIB) microscope is well established as a high-resolution machining instrument capable of site-selectively removing material down to the nanoscale. Beyond subtractive processing, however, the FIB can also add material…

Materials Science · Physics 2025-10-07 Frances Isabel Allen

Focused electron beam induced deposition (FEBID) is a powerful technique for 3D-printing of complex nanodevices. However, for resolutions below 10 nm, it struggles to control size, morphology and composition of the structures, due to a lack…

Focused electron beam induced deposition (FEBID) is an additive manufacturing technique uniquely suited for fabricating nanoscale 3D prototypes for a range of applications, including spintronic devices. However, the variation of growth…

Mesoscale and Nanoscale Physics · Physics 2026-05-15 Aurys Silinga , Keir Edgar , Stephen McVitie , Kayla Fallon , András Kovács , Rafal E. Dunin-Borkowski , Trevor P. Almeida

Three-dimensional (3D) nanomagnetism is a rapidly developing field within magnetic materials research, where exploiting the third dimension unlocks opportunities for innovative applications in areas such as sensing, data storage, and…

Mesoscale and Nanoscale Physics · Physics 2025-06-18 Sabri Koraltan , Fabrizio Porrati , Robert Kraft , Sven Barth , Markus Weigand , Claas Abert , Dieter Suess , Michael Huth , Sebastian Wintz

The shift from two- to three-dimensional structures is not only a prominent trend in nanomagnetism but also reflects a broader movement across nanotechnology as a whole. Fields such as nanoelectronics, nanophotonics, data storage are poised…

Mesoscale and Nanoscale Physics · Physics 2025-08-13 Sameh Okasha , Trevor P. Almeida

A powerful and flexible method of 3D nano-printing, based on focusing charged aerosol, has been developed. The self-consistent electric field configuration, created with a holey floating mask and used as the scaffold for printing…

Applied Physics · Physics 2018-12-14 Wooik Jung , Yoon-ho Jung , Peter V. Pikhitsa , Jooyeon Shin , Kijoon Bang , Jicheng Feng , Mansoo Choi

We report on a nanomechanical engineering method to monitor matter growth in real time via e-beam electromechanical coupling. This method relies on the exceptional mass sensing capabilities of nanomechanical resonators. Focused electron…

This study introduces a novel method for the deterministic fabrication of metallic nanostructures with controlled geometry and composition on suspended, single mode tapered optical nanofibers (TNFs) using a tailored Blurred Electron Beam…

Direct electron beam writing is a powerful tool for fabricating complex nanostructures in a single step. The electron beam locally cleaves the molecules of an adsorbed gaseous precursor to form a deposit, similar to 3D printing but without…

Materials Science · Physics 2024-05-14 Katja Höflich , Krzysztof Mackosz , Chinmai S. Jureddy , Aleksei Tsarapkin , Ivo Utke

Integration of complex photonic structures onto optical fiber facets enables powerful platforms with unprecedented optical functionalities. Conventional nanofabrication technologies, however, do not permit viable integration of complex…

In the majority of cases nanostructures prepared by focused electron beam induced deposition (FEBID) employing an organometallic precursor contain predominantly carbon-based ligand dissociation products. This is unfortunate with regard to…

Mesoscale and Nanoscale Physics · Physics 2017-05-01 Evgeniya Begun , Oleksandr V. Dobrovolskiy , Maksym Kompaniiets , Roland Sachser , Christian Gspan , Harald Plank , Michael Huth

This paper presents a detailed computational protocol for atomistic simulation of the formation and growth of metal-containing nanostructures during the Focused Electron Beam Induced Deposition (FEBID) process. The protocol is based upon…

Chemical Physics · Physics 2023-09-06 Alexey Prosvetov , Alexey V. Verkhovtsev , Gennady B. Sushko , Andrey V. Solov'yov

Focused electron beam induced deposition (FEBID) is a direct write technique for depositing materials on a support substrate akin to 3D printing with an electron beam (e-beam). Opportunities exist for merging this existing technique with…

Materials Science · Physics 2023-07-13 Ondrej Dyck , Andrew R. Lupini , Philip D. Rack , Jason Fowlkes , Stephen Jesse

The advancement of liquid phase electron beam induced deposition has enabled an effective direct-write approach for functional nanostructure synthesis with the possibility of three-dimensional control of morphology. For formation of a…

Atomic and Molecular Clusters · Physics 2024-03-12 Auwais Ahmed , Peter A. Kottke , Andrei G. Fedorov

The growth of iron-containing nanostructures in the process of focused electron beam-induced deposition (FEBID) of Fe(CO)$_5$ is studied by means of atomistic irradiation-driven molecular dynamics (IDMD) simulations. The geometrical…

Materials Science · Physics 2023-09-06 Alexey Prosvetov , Alexey V. Verkhovtsev , Gennady Sushko , Andrey V. Solov'yov

Nanogranular material systems are promising for a variety of applications in research and development. Their physical properties are often determined by grain sizes, shapes, mutual distances and by the chemistry of the embedding matrix With…

Materials Science · Physics 2021-01-11 Cornelia Trummer , Robert Winkler , Harald Plank , Gerald Kothleitner , Georg Haberfehlner

Fabricating brightly fluorescent layers with nanometric thickness and digitally controlled lateral structuration remains a challenge for next-generation photonic devices, optical calibration standards, and biocompatible interfaces. Here, we…

We demonstrate the use of individual magnetic nanowires (NWs), grown by focused electron beam induced deposition (FEBID), as scanning magnetic force sensors. Measurements of their mechanical susceptibility, thermal motion, and magnetic…

Mesoscale and Nanoscale Physics · Physics 2020-04-22 H. Mattiat , N. Rossi , B. Gross , J. Pablo-Navarro , C. Magén , R. Badea , J. Berezovsky , J. M. De Teresa , M. Poggio
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