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Related papers: Oxygen-based digital etching of AlGaN/GaN structur…

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We report N-polar AlN-based high-electron mobility transistors (HEMTs) with a GaN channel thickness of 5.2 nm on N-polar AlN on sapphire. The threshold voltage is around -2.4 to -3.0 V with saturation currents over 240 mA/mm and on/off…

Materials Science · Physics 2026-05-15 Xu Yang , Sheng Zhang , Ke Wei , Xinhua Wang , Xinyu Liu , Itsuki Furuhashi , Markus Pristovsek

Precise control of tensile stress and intrinsic damping is crucial for the optimal design of nanomechanical systems for sensor applications and quantum optomechanics in particular. In this letter we study the in uence of oxygen plasma on…

Mesoscale and Nanoscale Physics · Physics 2017-10-17 Niklas Luhmann , Artur Jachimowicz , Johannes Schalko , Pedram Sadeghi , Markus Sauer , Annette Foelske-Schmitz , Silvan Schmid

To optimize the adhesion of layers presenting strong barrier properties on low-density polyethylene (LDPE) surfaces, we investigated the influence of argon and argon-oxygen atmospheric pressure post-discharges. This study was performed…

Plasma Physics · Physics 2016-05-02 Sami Abou Rich , Thierry Dufour , P Leroy , Laurent Nittler , Jean Jacques Pireaux , F Reniers

X-ray photoemission spectroscopy (XPS) depth profiling using monoatomic Ar+ ion etching sources is a common technique that allows for the probing of the vertical compositional profiles of a wide range of materials. In polymer-based organic…

Applied Physics · Physics 2019-04-29 Yvonne J. Hofstetter , Yana Vaynzof

Short-term reliability and robustness of 110 nm AlN/GaN HEMTs has been evaluated by means of off-state, semi-on state and on-state step stress tests on devices having different gate-drain distance, LGD. While breakdown voltages and critical…

We demonstrate the first optically pumped sub-300 nm UV laser structures grown by plasma-assisted molecular beam epitaxy on single-crystal bulk AlN. The edge-emitting laser structures fabricated with the AlN/AlGaN heterostructures exhibit…

Optics · Physics 2021-09-23 Len van Deurzen , Ryan Page , Vladimir Protasenko , Huili , Xing , Debdeep Jena

The prospect of GeSn semiconductors for silicon-integrated infrared optoelectronics brings new challenges related to the metastability of this class of materials. As a matter of fact, maintaining a reduced thermal budget throughout all…

Near-surface nitrogen-vacancy ({NV}) centers in diamond have been successfully employed as atomic-sized magnetic field sensors for external spins over the last years. A key challenge is still to develop a method to bring NV centers at…

We report on thin-film processing improvements in the fabrication of superconducting quasiparticle-trap-assisted electrothermal-feedback transition-edge sensors (QETs) used in the design of Cryogenic Dark Matter Search (CDMS) detectors. The…

Materials Science · Physics 2014-10-13 John Mark Kreikebaum , Blas Cabrera , Jeff Yen , Paul Brink , Astrid Tomada , Matt Cherry , Betty Young

We report on the design and demonstration of ultra-wide bandgap AlGaN polarization-graded field effect transistors with ultra-thin channels to enable excellent current density and high-frequency performance while significantly reducing…

In this work, we investigate the use of nanoscale polarization engineering to achieve efficient hole injection from metals to ultra-wide band gap AlGaN, and we show that UV-reflective aluminum (Al) layers can be used for hole injection into…

Motivated by a recent experiment that reported the successful synthesis of hexagonal (h) AlN [Tsipas et al. Appl. Phys. Lett. 103, 251605 (2013)] we investigate structural, electronic and vibrational properties of bulk, bilayer and…

Materials Science · Physics 2015-03-03 C. Bacaksiz , H. Sahin , H. D. Ozaydin , S. Horzum , R. T. Senger , F. M. Peeters

The characterization of deep levels in AlGaN/GaN heterostructures is one of the most important problems in GaN high electron mobility transistors (HEMTs) technology. This work reports on a technique for determination of deep level…

Materials Science · Physics 2025-06-06 Maciej Matys , Atsushi Yamada , Yoichi Kamada , Toshihiro Ohki

We present large-scale molecular dynamics (MD) simulations based on a machine-learning interatomic potential to investigate the wet etching behavior of various GaN facets in alkaline solution-a process critical to the fabrication of…

Materials Science · Physics 2025-05-14 Purun-hanul Kim , Jeong Min Choi , Seungwu Han , Youngho Kang

We report the design and demonstration of ultra-wide-bandgap (UWBG) AlGaN polarization-graded field-effect transistors (PolFETs) that achieve a current-gain cutoff frequency above 85 GHz and a current density exceeding 1.3 A/mm. Ultra-thin…

Transitioning to solid-state ultraviolet (UV) lighting is critical for reducing global energy utilization to meet net-zero targets. AlGaN-based far-UVC LEDs offer a mercury-free, energy-efficient alternative to conventional mercury lamps,…

Materials Science · Physics 2026-03-18 Ling Zhang , Miao Zhou , Alex M. Ganose

Despite considerable advancements, high electron mobility transistors (HEMTs) based on gallium nitride (GaN) channels remain largely limited to power applications below 650 V. For higher power demands, the ultra-wide bandgap semiconductor…

A thorough investigation of local structure, influencing macroscopic properties of the solid is of potential interest. We investigated the local structure of GaN nanowires (NWs) with different native defect concentration synthesized by the…

Patterned graphene shows substantial potential for applications in future molecular-scale integrated electronics. Environmental effects are a critical issue in a single layer material where every atom is on the surface. Especially…

Plasma etching is an important tool in nano-device fabrication. We report a study on argon plasma etching of topological insulator materials Bi2Se3, Bi2Te3, Sb2Te3 and Bi2Te2Se using exfoliated flakes (with starting thicknesses of ~100 nm)…

Materials Science · Physics 2012-09-20 Isaac Childres , Jifa Tian , Ireneusz Miotkowski , Yong Chen