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Compressed sensing can increase resolution, and decrease electron dose and scan time of electron microscope point-scan systems with minimal information loss. Building on a history of successful deep learning applications in compressed…

Image and Video Processing · Electrical Eng. & Systems 2019-10-28 Jeffrey M. Ede

Compressed sensing can decrease scanning transmission electron microscopy electron dose and scan time with minimal information loss. Traditionally, sparse scans used in compressed sensing sample a static set of probing locations. However,…

Machine Learning · Computer Science 2021-03-12 Jeffrey M. Ede

Scanning Transmission Electron Microscopy (STEM) offers high-resolution images that are used to quantify the nanoscale atomic structure and composition of materials and biological specimens. In many cases, however, the resolution is limited…

Signal Processing · Electrical Eng. & Systems 2021-12-23 Daniel Nicholls , Alex Robinson , Jack Wells , Amirafshar Moshtaghpour , Mounib Bahri , Angus Kirkland , Nigel Browning

Scanning Transmission Electron Microscopy (STEM) has become the main stay for materials characterization on atomic level, with applications ranging from visualization of localized and extended defects to mapping order parameter fields. In…

Instrumentation and Detectors · Physics 2019-01-15 Xin Li , Ondrej Dyck , Sergei V. Kalinin , Stephen Jesse

The concept of compressive sensing was recently proposed to significantly reduce the electron dose in scanning transmission electron microscopy (STEM) while still maintaining the main features in the image. Here, an experimental setup based…

Instrumentation and Detectors · Physics 2016-03-23 Armand Béché , Bart Goris , Bert Freitag , Jo Verbeeck

We demonstrate a multi-beam scanning transmission electron microscopy (STEM) imaging that integrates down-sampling with super-resolution image reconstruction via a compressive sensing framework. A custom condenser aperture with six randomly…

Instrumentation and Detectors · Physics 2026-03-19 Akira Yasuhara , Takumi Sannomiya , Ryoichi Horisaki

Here a new microscopic method is proposed to image and characterize very thin samples like few-layer materials, organic molecules, and nanostructures with nanometer or sub-nanometer resolution using electron beams of energies lower than 20…

Instrumentation and Detectors · Physics 2016-01-06 Ing-Shouh Hwang

Scanning transmission electron microscopy (STEM) is an extremely versatile method for studying materials on the atomic scale. Many STEM experiments are supported or validated with electron scattering simulations. However, using the…

We report resolution enhancement in scanning electron microscopy (SEM) images using a generative adversarial network. We demonstrate the veracity of this deep learning-based super-resolution technique by inferring unresolved features in…

Computer Vision and Pattern Recognition · Computer Science 2019-08-21 Kevin de Haan , Zachary S. Ballard , Yair Rivenson , Yichen Wu , Aydogan Ozcan

Scanning Electron Microscopy (SEM) is pivotal in revealing intricate micro- and nanoscale features across various research fields. However, obtaining high-resolution SEM images presents challenges, including prolonged scanning durations and…

Image and Video Processing · Electrical Eng. & Systems 2024-10-08 Tom Reclik , Setareh Medghalchi , Philipp Schumacher , Maximilian Wollenweber , Talal Al-Samman , Sandra Korte-Kerzel , Ulrich Kerzel

Four-dimensional Scanning Transmission Electron Microscopy (4D-STEM) is a powerful technique for high-resolution and high-precision materials characterization at multiple length scales, including the characterization of beam-sensitive…

Applied Physics · Physics 2023-08-11 Hsu-Chih Ni , Renliang Yuan , Jiong Zhang , Jian-Min Zuo

Electron microscopy has shown to be a very powerful tool to map the chemical nature of samples at various scales down to atomic resolution. However, many samples can not be analyzed with an acceptable signal-to-noise ratio because of the…

Image and Video Processing · Electrical Eng. & Systems 2018-02-28 Étienne Monier , Thomas Oberlin , Nathalie Brun , Marcel Tencé , Marta de Frutos , Nicolas Dobigeon

Analytical electron microscopy and spectroscopy of biological specimens, polymers, and other beam sensitive materials has been a challenging area due to irradiation damage. There is a pressing need to develop novel imaging and spectroscopic…

Machine Learning · Computer Science 2017-07-14 Yan Zhang , G. M. Dilshan Godaliyadda , Nicola Ferrier , Emine B. Gulsoy , Charles A. Bouman , Charudatta Phatak

Despite the widespread use of Scanning Transmission Electron Microscopy (STEM) for observing the structure of materials at the atomic scale, a detailed understanding of some relevant electron beam damage mechanisms is limited. Recent…

In this work, we perform semantic segmentation of multiple defect types in electron microscopy images of irradiated FeCrAl alloys using a deep learning Mask Regional Convolutional Neural Network (Mask R-CNN) model. We conduct an in-depth…

Computer Vision and Pattern Recognition · Computer Science 2021-10-18 Ryan Jacobs , Mingren Shen , Yuhan Liu , Wei Hao , Xiaoshan Li , Ruoyu He , Jacob RC Greaves , Donglin Wang , Zeming Xie , Zitong Huang , Chao Wang , Kevin G. Field , Dane Morgan

Scanning Transmission Electron Microscopy (STEM) is a critical tool for imaging the properties of materials and biological specimens at atomic scale, yet our understanding of relevant electron beam damage mechanisms is incomplete. Recent…

Signal Processing · Electrical Eng. & Systems 2025-07-02 Amir Javadi Rad , Amirafshar Moshtaghpour , Dongdong Chen , Angus I. Kirkland

Recently it has been shown that precise dose control and an increase in the overall acquisition speed of atomic resolution scanning transmission electron microscope (STEM) images can be achieved by acquiring only a small fraction of the…

In the field of transmission electron microscopy, data interpretation often lags behind acquisition methods, as image processing methods often have to be manually tailored to individual datasets. Machine learning offers a promising approach…

Image and Video Processing · Electrical Eng. & Systems 2021-07-07 C. K. Groschner , Christina Choi , M. C. Scott

Single-beam scanning electron microscopes (SEM) are widely used to acquire massive data sets for biomedical study, material analysis, and fabrication inspection. Datasets are typically acquired with uniform acquisition: applying the…

Image and Video Processing · Electrical Eng. & Systems 2021-01-11 Lu Mi , Hao Wang , Yaron Meirovitch , Richard Schalek , Srinivas C. Turaga , Jeff W. Lichtman , Aravinthan D. T. Samuel , Nir Shavit

Artificial intelligence (AI) promises to reshape scientific inquiry and enable breakthrough discoveries in areas such as energy storage, quantum computing, and biomedicine. Scanning transmission electron microscopy (STEM), a cornerstone of…

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