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A monolithic active pixel sensor based direct detector that is optimized for the primary beam energies in scanning electron microscopes is implemented for electron back-scattered diffraction (EBSD) applications. The high detection…

Electron Backscattering Diffraction (EBSD) provides important information to discriminate phase transformation products in steels. This task is conventionally performed by an expert, who carries a high degree of subjectivity and requires…

Compact direct electron detectors are becoming increasingly popular in electron microscopy applications including electron backscatter diffraction, as they offer an opportunity for low cost and accessible microstructural analysis. In this…

Materials Science · Physics 2025-10-17 Tianbi Zhang , Ruth Birch , Graeme Francolini , Ebru Karakurt Uluscu , Ben Britton

Orientation determination does not necessarily require complete knowledge of the local atomic arrangement in a material. We present a method for microstructural phase discrimination and orientation analysis of phases for which there is only…

Materials Science · Physics 2019-06-06 Aimo Winkelmann , Grzegorz Cios , Tomasz Tokarski , Gert Nolze , Ralf Hielscher , Tomasz Kocieł

Pattern matching approaches to electron backscatter diffraction (EBSD) in the scanning electron microscope (SEM) provide qualitatively new possibilities for the microstructural analysis of chiral non-centrosymmetric phases due to the…

Materials Science · Physics 2025-01-16 Grzegorz Cios , Aimo Winkelmann , Tomasz Tokarski , Piotr Bała

We present spherical analysis of electron backscatter diffraction (EBSD) patterns with two new algorithms: (1) band localisation and band profile analysis using the spherical Radon transform; (2) orientation determination using spherical…

Materials Science · Physics 2019-09-04 Ralf Hielscher , Felix Bartel , Thomas Benjamin Britton

In spite of the utility of 3-D electron back-scattered diffraction (EBSD) microscopy, the data collection process can be time-consuming with serial-sectioning. Hence, it is natural to look at other modalities, such as polarized light (PL)…

Image and Video Processing · Electrical Eng. & Systems 2026-04-27 Harry Dong , Timofey Efimov , Megna Shah , Jeff Simmons , Sean Donegan , Marc De Graef , Yuejie Chi

This paper presents a novel approach for denoising Electron Backscatter Diffraction (EBSD) patterns using diffusion models. We propose a two-stage training process with a UNet-based architecture, incorporating an auxiliary regression head…

Image and Video Processing · Electrical Eng. & Systems 2025-09-01 Nikolay Falaleev , Nikolai Orlov

High angular resolution electron backscatter diffraction (HR-EBSD) affords an increase in angular resolution, as compared to 'conventional' Hough transform based EBSD, of two orders of magnitude, enabling measurements of relative…

Instrumentation and Detectors · Physics 2017-10-03 T Ben Britton , James L R Hickey

For high (angular) resolution electron backscatter diffraction (HR-EBSD), the selection of a reference diffraction pattern (EBSP0) significantly affects the precision of the calculated strain and rotation maps. This effect was demonstrated…

Materials Science · Physics 2023-02-21 Abdalrhaman Koko , Vivian Tong , Angus J. Wilkinson , T. James Marrow

Precession of a converged beam during acquisition of a 4D-STEM dataset improves strain, orientation, and phase mapping accuracy by averaging over continuous angles of illumination. Precession experiments usually rely on integrated systems,…

Instrumentation and Detectors · Physics 2025-10-20 Stephanie M. Ribet , Rohan Dhall , Colin Ophus , Karen C. Bustillo

Electron back-scatter diffraction (EBSD) has traditionally relied upon methods such as the Hough transform and dictionary Indexing to interpret diffraction patterns and extract crystallographic orientation. However, these methods encounter…

Materials Science · Physics 2025-11-04 Meghraj Prajapat , Alankar Alankar

Electron backscatter diffraction (EBSD) patterns can exhibit Kikuchi bands with inverted contrast due to anomalous absorption. This can be observed, for example, on samples with nanoscale topography, in case of a low tilt backscattering…

Materials Science · Physics 2026-01-22 Grzegorz Cios , Aimo Winkelmann , Gert Nolze , Tomasz Tokarski , Benedykt R. Jany , Piotr Bała

We describe a lattice-based crystallographic approximation for the analysis of distorted crystal structures via Electron Backscatter Diffraction (EBSD) in the scanning electron microscope. EBSD patterns are closely linked to local lattice…

Materials Science · Physics 2019-01-02 Aimo Winkelmann , Gert Nolze , Grzegorz Cios , Tomasz Tokarski

The ability to characterise the three-dimensional microstructure of multiphase materials is essential for understanding the interaction between phases and associated materials properties. Here, laboratory-based diffraction-contrast…

TrueEBSD is an open-source MATLAB program for image alignment and spatial distortion correction of images and electron backscatter diffraction (EBSD) maps. We have re-implemented TrueEBSD as an add-on to MTEX, an established toolbox for…

Materials Science · Physics 2026-05-04 Vivian Tong , Stefan Olovsjö , Rachid M'Saoubi , Mathias Grabner , Manuel Petersmann , Liam Wright

High-Resolution Electron Backscatter Diffraction (HR-EBSD) has advanced rapidly in recent years, significantly improving elastic strain measurements and dislocation density evaluation with submicron spatial resolution. To achieve better…

Materials Science · Physics 2026-04-20 Xinke Xiao , Tianle Ma , Lingxuan Shao , Jun Liu , Qiwei Shi , Canying Cai , Stéphane Roux

Analytical electron microscopy and spectroscopy of biological specimens, polymers, and other beam sensitive materials has been a challenging area due to irradiation damage. There is a pressing need to develop novel imaging and spectroscopic…

Machine Learning · Computer Science 2017-07-14 Yan Zhang , G. M. Dilshan Godaliyadda , Nicola Ferrier , Emine B. Gulsoy , Charles A. Bouman , Charudatta Phatak

Scanning electron microscopy combined with electron backscatter diffraction (EBSD) and electron channeling provides rich crystallographic contrast, but the mutual influence of channeling-in and channeling-out is often simplified or…

Materials Science · Physics 2026-04-28 T. Ben Britton , M. Haroon Qaiser , Ruth M. Birch

EBSD is a foundational technique for characterizing crystallographic orientation, phase distribution, and lattice strain. Embedded within EBSD patterns lies latent information on dislocation structures, subtly encoded due to their deviation…