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Weighing particles above MegaDalton mass range has been a persistent challenge in commercial mass spectrometry. Recently, nanoelectromechanical systems-based mass spectrometry (NEMS-MS) has shown remarkable performance in this mass range,…

Applied Physics · Physics 2023-06-26 Batuhan E. Kaynak , Mohammed Alkhaled , Enise Kartal , Cenk Yanik , M. Selim Hanay

We describe the application of nanoelectromechanical systems (NEMS) to ultrasensitive mass detection. In these experiments, a modulated flux of atoms was adsorbed upon the surface of a 32.8 MHz NEMS resonator within an ultrahigh vacuum…

Other Condensed Matter · Physics 2009-11-10 K. L. Ekinci , X. M. H. Huang , M. L. Roukes

Mass spectrometry of intact nanoparticles and viruses can serve as a potent characterization tool for material science and biophysics. Inaccessible by widespread commercial techniques, the mass of single nanoparticles and viruses (>10MDa)…

One of the main challenges to overcome to perform nanomechanical Mass Spectrometry (NEMS-MS) analysis in a practical time frame stems from the size mismatch between the analyte beam and the extremely small nanomechanical detector area. We…

Current approaches to Mass Spectrometry (MS) require ionization of the analytes of interest. For high-mass species, the resulting charge state distribution can be complex and difficult to interpret correctly. In this article, using a setup…

Nanomechanical sensors and quantum nanosensors are two rapidly developing technologies that have diverse interdisciplinary applications in biological and chemical analysis and microscopy. For example, nanomechanical sensors based upon…

Nanoelectromechanical systems, or NEMS, are MEMS scaled to submicron dimensions. In this size regime, it is possible to attain extremely high fundamental frequencies while simultaneously preserving very high mechanical responsivity (small…

Mesoscale and Nanoscale Physics · Physics 2007-05-23 M. L. Roukes

Nanoelectromechanical systems (NEMS) have generated considerable interest as inertial mass sensors. NEMS resonators have been used to weigh cells, biomolecules, and gas molecules, creating many new possibilities for biological and chemical…

Mesoscale and Nanoscale Physics · Physics 2012-04-13 J. Chaste , A. Eichler , J. Moser , G. Ceballos , R. Rurali , A. Bachtold

Active manipulation of mechanical waves at high frequencies opens opportunities in heat management, radio-frequency (RF) signal processing, and quantum technologies. Nanoelectromechanical systems (NEMS) are appropriate platforms for…

Applied Physics · Physics 2018-11-09 Jinwoong Cha , Chiara Daraio

Nanoelectromechanical systems (NEMS) are nano-to-micrometer scale mechanical resonators coupled to electronic devices of similar dimensions. NEMS show promise for fast, ultrasensitive force microscopy and for deepening our understanding of…

Mesoscale and Nanoscale Physics · Physics 2015-06-25 M. P. Blencowe

Nanoelectromechanical systems (NEMSs) are emerging nanoscale elements at the crossroads between mechanics, optics and electronics, with significant potential for actuation and sensing applications. The reduction of dimensions compared to…

Mesoscale and Nanoscale Physics · Physics 2012-03-20 Antoine Reserbat-Plantey , Laetitia Marty , Olivier Arcizet , Nedjma Bendiab , Vincent Bouchiat

Nanomechanical spectroscopy (NMS) is a recently developed approach to determine optical absorption spectra of nanoscale materials via mechanical measurements. It is based on measuring changes in the resonance frequency of a membrane…

This article presents a comprehensive study and design methodology of co-integrated oscillators for nano mass sensing application based on resonant Nano-Electro-Mechanical-System (NEMS). In particular, it reports the capacitive with the…

Mesoscale and Nanoscale Physics · Physics 2015-05-14 Eric Colinet , Laurent Duraffourg , Sebastien Labarthe , Philippe Andreucci , Sebastien Hentz , Philippe Robert

Atomically thin layers of two-dimensional (2D) materials such as graphene, MoS2 and h-BN have immense potential as sensors and electronic devices thanks to their highly desirable electronic, mechanical, optical and heat transport…

Mesoscale and Nanoscale Physics · Physics 2015-09-03 Nicholas D. Kay , Peter D. Tovee , Benjamin J. Robinson , Konstantin S. Novoselov , Oleg V. Kolosov

Recent advances in nanotechnology have led to the development of nano-electro-mechanical systems (NEMS) such as nanomechanical resonators, which have recently received significant attention from the scientific community. This has not only…

Mesoscale and Nanoscale Physics · Physics 2011-05-11 Kilho Eom , Harold S. Park , Dae Sung Yoon , Taeyun Kwon

Nanoelectromechanical (NEMS) resonator networks have drawn increasing interest due to their potential applications in emergent behavior, sensing, phononics, and mechanical information processing. A challenge toward realizing these…

Mesoscale and Nanoscale Physics · Physics 2023-02-08 Brittany Carter , Viva R. Horowitz , Uriel Hernandez , David J. Miller , Andrew Blaikie , Benjamín J. Alemán

We propose a scheme to measure the mass of a single particle using the nonlinear response of a 2D nanoresonator with degenerate eigenmodes. Using numerical and analytical calculations, we show that by driving a square graphene nanoresonator…

Mesoscale and Nanoscale Physics · Physics 2010-10-11 J. Atalaya , J. M. Kinaret , A. Isacsson

Tuning the frequency of a resonant element is of vital importance in both the macroscopic world, such as when tuning a musical instrument, as well as at the nanoscale. In particular, precisely controlling the resonance frequency of isolated…

Mesoscale and Nanoscale Physics · Physics 2020-04-22 David J. Miller , Andrew Blaikie , Benjamin J. Aleman

Nanoelectromechanical systems (NEMS) provide a platform for probing the quantum nature of mechanical motion in mesoscopic systems. This nature manifests most profoundly when the device vibrations are nonlinear and, currently, achieving…

Mesoscale and Nanoscale Physics · Physics 2025-04-15 M. Yuksel , M. P. Maksymowych , O. A. Hitchcock , F. M. Mayor , N. R. Lee , M. I. Dykman , A. H. Safavi-Naeini , M. L. Roukes

The scanning electron microscope (SEM) recordings of dynamic nano-electromechanical systems (NEMS) are difficult to analyze due to the noise caused by low frame rate, insufficient resolution and blurriness induced by applied electric…

Image and Video Processing · Electrical Eng. & Systems 2023-07-19 Ege Erdem , Berke Demiralp , Hadi S Pisheh , Peyman Firoozy , Ahmet Hakan Karakurt , M. Selim Hanay
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