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Directed atomic fabrication using an aberration-corrected scanning transmission electron microscope (STEM) opens new pathways for atomic engineering of functional materials. In this approach, the electron beam is used to actively alter the…

Lattice strain measurement of nanoscale semiconductor devices is crucial for the semiconductor industry as strain substantially improves the electrical performance of transistors. High resolution scanning transmission electron microscopy…

Focused Ion Beam Scanning Electron Microscope (FIB-SEM) imaging is a technique that image materials section-by-section at nano-resolution, e.g.,5 nanometer width voxels. FIB-SEM is well suited for imaging ultrastructures in cells.…

Quantitative Methods · Quantitative Biology 2020-08-06 Hans Jacob Teglbjærg Stephensen , Sune Darkner , Jon Sporring

Characterizing crystal structures and interfaces down to the atomic level is an important step for designing advanced materials. Modern electron microscopy routinely achieves atomic resolution and is capable to resolve complex arrangements…

Materials Science · Physics 2023-09-07 Andreas Leitherer , Byung Chul Yeo , Christian H. Liebscher , Luca M. Ghiringhelli

Low voltage transmission electron microscopy (<=80 kV) has many applications in imaging beam-sensitive samples, such as metallic nanoparticles, which may become damaged at higher voltages. To improve resolution, spherical aberration can be…

Instrumentation and Detectors · Physics 2022-07-27 Frances Quigley , Patrick McBean , Peter O'Donovan , Jonathan J. P. Peters , Lewys Jones

Atomic resolution imaging is key to understanding thin film growth and how a particular set of conditions influences properties. Whilst such imaging in the scanning transmission electron microscope (STEM) has had transformative impact in…

We present a method using Zernike moments for quantifying rotational and reflectional symmetries in scanning transmission electron microscopy (STEM) images, aimed at improving structural analysis of materials at the atomic scale. This…

Materials Science · Physics 2024-05-29 Jiadong Dan , Cheng Zhang , Xiaoxu Zhao , N. Duane Loh

Despite decades of research, the ultimate goal of nanotechnology--top-down manipulation of individual atoms--has been directly achieved with only one technique: scanning probe microscopy. In this Review, we demonstrate that scanning…

In this article, a new scanning electron microscopy (SEM) image composition technique is described, which can significantly reduce drift related image corruptions. Drift-distortion commonly causes blur and distortions in the SEM images.…

Instrumentation and Detectors · Physics 2010-08-09 Petr Cizmar , Andras E. Vladar , Michael T. Postek

The manuscript considers Scanning Transmission Electron Microscopy (STEM) images and derives transformations needed to correct various distortions occurring during scanning. These transformations form the basis for the correction algorithms…

Instrumentation and Detectors · Physics 2026-05-13 Pavel Potapov , Giulio Guzzinati

High-throughput analysis of multidimensional transmission electron microscopy (TEM) datasets remains a significant challenge, limiting the broader impact on strategic materials research. Conventional workflows typically involve sequential,…

Materials Science · Physics 2025-07-16 Arda Genc , Ravit Silverstein

Recently it has been shown that precise dose control and an increase in the overall acquisition speed of atomic resolution scanning transmission electron microscope (STEM) images can be achieved by acquiring only a small fraction of the…

In this review article fundamentals of aberration corrected phase contrast transmission electron microscopy for the structural characterization of materials at atomic length scale is presented. The word structure entails atomic arrangement…

Materials Science · Physics 2026-03-26 Ranjan Datta , Sneha Kobri M. , Sudip Mahato

Aberration-corrected scanning transmission electron microscopes (STEM) provide sub-angstrom lateral resolution; however, the large convergence angle greatly reduces the depth of field. For microscopes with a small depth of field,…

Materials Science · Physics 2011-12-15 Robert Hovden , Huolin L. Xin , David A. Muller

Scanning transmission electron microscopy (STEM) is now the primary tool for exploring functional materials on the atomic level. Often, features of interest are highly localized in specific regions in the material, such as ferroelectric…

Materials Science · Physics 2021-08-11 Nicole Creange , Ondrej Dyck , Rama K. Vasudevan , Maxim Ziatdinov , Sergei V. Kalinin

Scanning Transmission Electron Microscopy (STEM) offers high-resolution images that are used to quantify the nanoscale atomic structure and composition of materials and biological specimens. In many cases, however, the resolution is limited…

Signal Processing · Electrical Eng. & Systems 2021-12-23 Daniel Nicholls , Alex Robinson , Jack Wells , Amirafshar Moshtaghpour , Mounib Bahri , Angus Kirkland , Nigel Browning

Deep learning has demonstrated superb efficacy in processing imaging data, yet its suitability in solving challenging inverse problems in scientific imaging has not been fully explored. Of immense interest is the determination of local…

Materials Science · Physics 2019-02-20 Nouamane Laanait , Qian He , Albina Y. Borisevich

Thin film oxides are a source of endless fascination for the materials scientist. These materials are highly flexible, can be integrated into almost limitless combinations, and exhibit many useful functionalities for device applications.…

Materials Science · Physics 2025-06-17 Steven R. Spurgeon

Material properties strongly depend on the nature and concentration of defects. Characterizing these features may require nano- to atomic-scale resolution to establish structure-property relationships. 4D-STEM, a technique where diffraction…

Materials Science · Physics 2023-05-03 Stephanie M. Ribet , Colin Ophus , Roberto dos Reis , Vinayak P. Dravid

The robust approach for real-time analysis of the scanning transmission electron microscopy (STEM) data streams, based on the ensemble learning and iterative training (ELIT) of deep convolutional neural networks, is implemented on an…

Disordered Systems and Neural Networks · Physics 2022-07-27 Kevin M. Roccapriore , Matthew G. Boebinger , Ondrej Dyck , Ayana Ghosh , Raymond R. Unocic , Sergei V. Kalinin , Maxim Ziatdinov