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We present a performance analysis of compact monolithic optomechanical inertial sensors that describes their key fundamental limits and overall acceleration noise floor. Performance simulations for low frequency gravity-sensitive inertial…

Instrumentation and Detectors · Physics 2020-07-15 Adam Hines , Logan Richardson , Hayden Wisniewski , Felipe Guzman

We report on a compact, highly sensitive all-fiber accelerometer suitable for low frequency and low amplitude vibration sensing. The sensing elements in the device are two short segments of strongly coupled asymmetric multicore fiber (MCF)…

We present a compact heterodyne laser interferometer developed for high-sensitivity displacement sensing applications. This interferometer consists of customized prisms and waveplates assembled as a quasi-monolithic unit to realize a…

Instrumentation and Detectors · Physics 2022-09-29 Yanqi Zhang , Felipe Guzman

We present an optically-detected mechanical accelerometer that achieves a sensitivity of 100 ng/rtHz over a bandwidth of 10kHz and is traceable. We have incorporated a Fabry-Perot fiber-optic micro-cavity that is currently capable of…

Optics · Physics 2014-08-29 Felipe Guzman Cervantes , Lee Kumanchik , Jon Pratt , Jacob Taylor

In this paper, a novel coarse-to-fine optical MEMS accelerometer based on the Fabry Perot (FP) interferometer is proposed. The mechanical structure consists of a proof mass that is suspended by four L-shaped springs. The deflection of the…

Applied Physics · Physics 2023-07-19 Mojtaba Rahimi , Majid Taghavi , Mohammad Malekmohammad

In this paper, a differential MOEMS accelerometer based on the Fabry-Perot (FP) micro-cavities is presented. The optical system of the device consists of two FP cavities and the mechanical system is composed of a proof mass that is…

In this paper, a closed-loop micro-opto-electro-mechanical system (MOEMS) accelerometer based on the Fabry-P\'erot (FP) interferometer is presented. The FP cavity is formed between the end of a cleaved single-mode optical fiber and the…

The monitoring of accelerations is essential for a variety of applications ranging from inertial navigation to consumer electronics. The basic operation principle of an accelerometer is to measure the displacement of a flexibly mounted test…

We present an optomechanical accelerometer with high dynamic range, high bandwidth and read-out noise levels below 8 ${\mu}$g/$\sqrt{\mathrm{Hz}}$. The straightforward assembly and low cost of our device make it a prime candidate for…

Cavity optomechanical sensors can offer exceptional sensitivity; however, interrogating the cavity motion with high accuracy and dynamic range has proven to be challenging. Here we employ a dual optical frequency comb spectrometer to…

High-precision triaxial acceleration detection holds critical applications in seismic wave detection, geological resource exploration, and aerospace systems. Fabry-Perot (FP) optical sensors have gained widespread adoption in these domains…

Optics · Physics 2025-08-27 Chaoyue Liu , Ping Lu

Accelerometers offer motion sensing capabilities across a wide range of areas, enabling navigational awareness in consumer goods and defense applications, and playing a key role in monitoring and control systems. To date, on-chip…

We demonstrate a microfabricated optomechanical accelerometer that is capable of percent-level accuracy without external calibration. To achieve this capability, we use a mechanical model of the device behavior that can be characterized by…

Instrumentation and Detectors · Physics 2022-05-25 Benjamin J. Reschovsky , David A. Long , Feng Zhou , Yiliang Bao , Richard A. Allen , Thomas W. LeBrun , Jason J. Gorman

We present the development of a high $Q$ monolithic silica pendulum weighing 7 mg. The measured $Q$ value for the pendulum mode at 2.2 Hz was $2.0\times10^6$. To the best of our knowledge this is the lowest dissipative mg-scale mechanical…

We have developed an inertially sensitive optomechanical laser by combining a Vertical-External-Cavity Surface-Emitting Laser with a monolithic fused silica resonator. By placing the external cavity mirror of the VECSEL onto the…

Applied Physics · Physics 2023-07-19 Hayden Wisniewski , Logan Richardson , Adam Hines , Alexandre Laurain , Felipe Guzman

We present a novel optomechanical inertial sensor for low frequency applications and corresponding acceleration measurements. This sensor has a resonant frequency of 4.7Hz, a mechanical quality factor of 476k, a test mass of 2.6 gram, and a…

We report on developing, characterizing, and verifying a compact, monolithic laser interferometric assembly designed for high-precision two- and three-axis displacement measurements in coordinate positioning systems. The design targets OEM…

Optics · Physics 2025-07-11 Simon Rerucha , Ondrej Cip , Miroslava Hola , Josef Lazar , Bretislav Mikel

Inertial sensors based on cold atom interferometry exhibit many interesting features for applications related to inertial navigation, particularly in terms of sensitivity and long-term stability. However, at present the typical atom…

Interferometers play a crucial role in high-precision displacement measurement such as gravitational-wave detection. Conventional interferometer designs require accurate laser alignment, including the laser pointing and the waist position,…

Instrumentation and Detectors · Physics 2024-01-05 Xiang Lin , Peng Qiu , Yurong Liang , Xiaofang Ren , Hao Yan , Zebing Zhou

We report on progress in developing compact sensors for atomic force microscopy (AFM), in which the mechanical transducer is integrated with near-field optical readout on a single chip. The motion of a nanoscale, doubly-clamped cantilever…

Optics · Physics 2015-06-05 Yuxiang Liu , Houxun Miao , Vladimir Aksyuk , Kartik Srinivasan
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