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We present an electron interferometer based on near-field diffraction from two nanostructure gratings. Lau fringes are observed with an imaging detector, and revivals in the fringe visibility occur as the separation between gratings is…
The scattering matrix, which quantifies the optical reflection and transmission of a photonic structure, is pivotal for understanding the performance of the structure. In many photonic design tasks, it is also desired to know how the…
Ptychographic extreme ultraviolet (EUV) diffractive imaging has emerged as a promising candidate for the next-generation metrology solutions in the semiconductor industry, as it can image wafer samples in reflection geometry at the…
Arrays of nanoparticles exploited in light scattering applications commonly only feature either a periodic or a rather random arrangement of its constituents. For the periodic case, light scattering is mostly governed by the strong spatial…
CUBES is the Cassegrain U-Band Efficient Spectrograph, a high-efficiency instrument operating in the UV spectral range between 300nm and 400nm with a resolution not less than 20000. CUBES is to be installed at a Cassegrain focus of the Very…
Diffraction gratings with large angular dispersion rates are central to obtaining high spectral resolution in grating spectrometers operating over a broad spectral range from infrared to soft-x-ray domains. The greatest challenge is of…
We report on the optical characterization of an ultra-high diffraction efficiency grating in 1st order Littrow configuration. The apparatus used was an optical cavity built from the grating under investigation and an additional high…
Diffraction patterns of electrons are believed to resemble those of electromagnetic waves (EMW). I performed a series of experiments invoked to show that the periodicity of peaks in the diffraction diagram of electrons is concerned with the…
In this work, the scattering of surface plasmons by a finite periodic array of one-dimensional grooves is theoretically analyzed by means of a modal expansion technique. We have found that the geometrical parameters of the array can be…
The geometry of a Si$_3$N$_4$ lamellar grating was investigated experimentally with reference-free grazing-incidence X-ray fluorescence analysis. While simple layered systems are usually treated with the matrix formalism to determine the…
The scattering of electromagnetic wave by a periodic array of nanowires is calculated by the boundary element method. The method is extended to the infinite grating near the interface between two dielectrics. A special Green function is…
The unique ability of slot and sub-wavelength grating (SWG) waveguides to confine light outside of the waveguide core material has attracted significant interest in their application to chemical and biological sensing. However, high…
EUV scatterometry is performed on 3D patterns on EUV lithography masks. Numerical simulations of the experimental setup are performed using a rigorous Maxwell solver. Mask geometry is determined by minimizing the difference between…
A theoretical approach for uniformly extracting light propagating through a light guide plate is developed here. Typically, liquid crystal display modalities utilize a backlit lighting system illuminated from the edge with light emitting…
Developing a suitable production method for three-dimensional periodic nanostructures with high aspect ratios is a subject of growing interest. For mass production, Talbot lithography offers many advantages. However, one disadvantage is…
We outline a strategy for quantitatively evaluating the conformational characteristics of self-assembled structures using the techniques of contrast variation small angle neutron scattering. By means of basis function expansion, a case…
We consider in this paper the angular deviation and diffraction efficiency of the reflection gratings in Littrow-configuration for applications of external cavity diode laser using the rigorous coupled-wave analysis method. We consider the…
An approach to calculation of the ionized impurity and surface roughness scattering rates of electrons in very thin semiconductor quantum wires taking into account the energy level broadening is worked out. It is assumed that all the…
Metallic nano-objects play crucial roles in diverse fields, including biomedical imaging, nanomedicine, spectroscopy, and photocatalysis. Nano-objects with sizes that are less than 15 nm exhibit extremely low light scattering…
The profile of suspended silicon nitride thin films patterned with one-dimensional subwavelength grating structures is investigated using Atomic Force Microscopy. We first show that the results of the profilometry can be used as input to…