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The role of inhomegeneity in determining the properties of correlated electron systems is poorly understood because of the dearth of structural probes of disorder at the nanoscale. Advances in both neutron and x-ray scattering…
For the reliable fabrication of the current and next generation of nanostructures it is essential to be able to determine their material composition and dimensional parameters. Using the grazing incidence X-ray fluoresence technique, which…
We present rigorous simulations of EUV masks with technological imperfections like side-wall angles and corner roundings. We perform an optimization of two different geometrical parameters in order to fit the numerical results to results…
Spectropolarimetry from the near IR to the far UV of light scattered by dust provides a valuable diagnostic of the dust composition, grain size distribution and spatial distribution. To facilitate the use of this diagnostic, we present…
The quality of an As35S65 chalcogenide glass (ChG) grating fabricated by electron beam lithography (EBL) was characterized by optical scatterometry based on spectroscopic ellipsometry (SE) in the visible and near infrared spectral range and…
The increasing importance of well-controlled ordered nanostructures on surfaces represents a challenge for existing metrology techniques. To develop such nanostructures and monitor complex processing constraints fabrication, both a…
The diffraction spectrum of coherent waves scattered from fractal supports is calculated exactly. The fractals considered are of the class generated iteratively by successive dilations and translations, and include generalizations of the…
Diffraction gratings with high upward diffraction efficiency and large effective length are required for chip-scale light detection and ranging. In this paper, we propose a diffraction grating based on a multilayer silicon nitride…
Future observatories utilizing reflection grating spectrometers for extreme ultraviolet (EUV) and soft X-ray (SXR) spectroscopy require high-fidelity gratings with both blazed groove facets and custom groove layouts that are often fanned or…
Crack-templated networks, metallic frameworks fabricated from crack patterns in sacrificial thin films, can exhibit high optical transmittance, high electric conductivity, and a host of other properties attractive for applications. Despite…
Extreme ultraviolet (EUV) lithography is the leading lithography technique in CMOS mass production, moving towards the sub-10 nm half-pitch (HP) regime with the ongoing development of the next generation high-numerical aperture (high-NA)…
Interfering deep ultraviolet (DUV) lasers can induce substantial density modulations in an ozone-doped gas flow via photochemical reactions, creating volume diffraction gratings. These transient optics are immune to target debris and…
The diffraction of electromagnetic plane waves by a rectangular grating formed by discrete steps in the interface of a homogeneous, isotropic, linear, negative phase--velocity (negative index) material with free space is studied using the…
Moving towards significantly smaller nanostructures, direct structuring techniques such as electron beam lithography approach fundamental limitations in feature size and aspect ratios. Application of nanostructures like diffractive X-ray…
We report a breakthrough in the search for versatile diffractive elements for cold neutrons. Nanoparticles are spatially arranged by holographical means in a photopolymer. These grating structures show remarkably efficient diffraction of…
Transparent glass ceramic materials, with microstructures comprised of dispersed nanocrystallites in a residual glass matrix, offer the prospect of nonlinear optical properties. However, good transparency requires low optical scattering and…
Modelling the scattering of focused, coherent light by nano-scale structures is oftentimes used to reconstruct or infer geometrical or material properties of structures under investigation in optical scatterometry. This comprises both…
In optical devices like diffraction gratings and Fresnel lenses, light wavefront is engineered through the structuring of device surface morphology, within thicknesses comparable to the light wavelength. Fabrication of such diffractive…
We describe a dispersive unit consisting of cascaded volume-phase holographic gratings for spectroscopic applications. Each of the gratings provides high diffractive efficiency in a relatively narrow wavelength range and transmits the rest…
More than 4 orders of magnitude of cavity-linewidth narrowing in a rare-earth-ion-doped crystal cavity, emanating from strong intracavity dispersion caused by off-resonant interaction with dopant ions, is demonstrated. The dispersion…